Clean Regulator

Model XT13-394-06 XT13-394-10 INA-48-1-06 INA-48-1-10 INA-48-16-10 INA-48-16-06 INA-48-58-10-H INA-48-58-06-H Port size Rc3/4 Rc1 Rc3/4 Rc1 Rc3/4 Rc1 Rc3/4 Rc1 Relief mechanism Non-relief Relief Non-relief Fluid Deionized water (Pure water) Air, N2 Proof pressure 1.9 MPa 1.5 MPa Max. operating pressure 1.3 MPa 1.0 MPa Set pressure 0.1 to 1.0 MPa 0.05 to 0.5 MPa 5 to 60C Ambient and fluid

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Free flow 0.2 0.3 0.3 0.4 0.4 0.3 0.3 b values: Critical pressure ratio Controlled flow 0.2 0.3 0.3 0.3 0.3 Note) C and b values are for controlled flow with the needle fully open and free flow with the needle fully closed. 636 Speed Controller with Indicator/Elbow Type Uni Thread Type AS-FS Series Elbow Brass 1 Electroless nickel plated How to Order AS 2 1F 0 U01 S 06 2 Applicable tubing

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Caution REC25 101110-AS2001F-06-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC32 101110-AS3001F-08-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC40 101110-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 2. Speed control is possible with meter-in and meter-out types of speed controllers.

Title not found

port size (inch) A, B port size (metric) spaEleyonamanr'od Manifold D-sub Connector .

HRX-OM-M090

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

Soft Start-up Valve

Unit Series AV2000-A AV3000-A AV4000-A AV5000-A Spacer Y200-A Y300-A Y400-A Y600-A Spacer with bracket Y200T-A Y300T-A Y400T-A Y600T-A Applicable model AC20-A AC20-B AC25-A, AC30-A AC25-B, AC30-B AC40-A*1 AC40-B*1 AC50-B, AC55-B AC60-B *1 Except port size 06 Assembly Example eSpacer with bracket qSoft start-up valve Air combination wAC30-03G-A Assembly example Products do not come assembled

Series KC Self-seal Fittings

Component module KBC1 KBC2 KBC3 KBC4 KBP1 KBP2 KBP3 KBP4 KBV2-06 2 KBE2-06 2 KBN2 1 KBN2 KBV1-06 KBE2-06 KBV2-06 5 Bracket: KBX(Page 87) Component module KB X 6 KBV2-06 1 KBV1-06 1 KBR2-1 1 KBH2-R2S 1 KBP1 1 KBP1 KBR2-1 Applicable thread size KBH2-R2R KBV2-06 KBP1 Type Bracket: KBX KBV1-06 Part No.

AN

ANA1-01 to 06 ANA1-06: PP How to Order ANA1-01 to 20 A1 03 AN Port size Symbol Port size Connection 01 1 8 02 1 4 03 3 8 04 1 2 Screw-in 06 3 4 1 4 10 1 12 1 1 2 1 14 20 2 Model (One-touch fitting connection) C08 (8 One-touch fittings size) Effective area (mm2) Weight (g) ANA1-C08 11 5 58 16 A B Dimensions (mm) Model One -touch fitting size 8 10 12 C10 (10 One-touch fittings size) One-touch

Series AK1000

Dimensions inch (mm) AK3542 & 4542 M5 x 0.8 Actuation port 1.57 (40) 2.24 (57) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: N, BRN Connections: 4T, 6T Connections: 4, 6, BR 4 6 4 6 4 6 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70

FQ1

Micromesh element (SUS304) Bonding material: Epoxy resin Q005 FQ1 0 1 1 B 06 N Part number Dimensions Filtration accuracy (m) Element symbol Element type Select from tables on the right.

VXR21/22/23

Then the pressure in the pressure action chamber B falls to open the main valve C. < Valve closed > When the coil o is not energized, the pilot valve A is closed and the pressure in the pressure action chamber B rises and the main valve C closes.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Micromesh element (SUS304) Bonding material: Epoxy resin Q005 FQ1 0 1 1 B 06 N Part number Dimensions Filtration accuracy (m) Element symbol Element type Select from tables on the right.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

B B B B B 65.4 4-Rc(PT)1/8 (P, R port) Manual override 2n-M3 X 0.5 (A, B port) Depress and turn to operate and lock override.

VXD21/22/23

Then the pressure in the pressure action chamber B falls to open the main valve C. When the coil o is not energized, the pilot valve A is closed and the pressure in the pressure action chamber B rises and the main valve C closes.

LVQ

S) SMC C A B D SMC B A SMC (Max. T) U Z M N LVQ40, LVQ60 C B A D (Max.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No

KB

KBC1 KBC2 KBC3 KBC4 KBP1 KBP2 KBP3 KBP4 KBN2 KBV1-06 KBE2-06 KBV2-06 5 Kl Bracket: KBX (P.2.1-80) Component module KBV2-061 KBV1-061 KBR2-11 KBH2-R2S1 KBP1 1 KBP1 KB X 6 Ml KBR2-1 Hl Applicable thread size KBH2-R2R Dl KBV2-06 KBP1 Style MS Bracket: KBX KBV1-06 Component module KBV2-061 KBV1-061 KBR2-11 KBH2-R2S1 KBP2 1 KBP1 1 Tl Part No.

CL

D C B H d Tube I.D.

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

(b(smple) D-C73 ' D-C731.