HRX-OM-R016

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R016 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-R005

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R005 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

VXD21/22/23

TI/ TIL Table (2) Rated Voltage-Electrical Entry-Electrical Option Table (1) Connection Size and Applicable Model PA Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G Connection Applicable model VXD2142-03 VXD2142-04 VXD2152-06 VXD2262-10 VXD2272-32 VXD2382-40 VXD2392-50 Size PAX C D, T G, C T

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J A Z 2 2 x K T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) X R S W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M Z VHS2510 VHS3510 VHS4510 VHS4510-06 VHS5510 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9

CL

Description Material Auto switch model 40 50 63 80 100 NBR NBR NBR NBR NBR NBR NBR NBR Piston seal Rod seal A Rod seal B Brake piston seal Cushion seal Tube gasket Cushion valve seal Piston gasket D-A5/A6/A59W D-F5/J5/F5W/J59W D-F5NTL, F5BAL, F59F D-A3/A44/G39/K39 D-B5/B6/B59W D-G5/K59/G5W/K59W D-G5BAL/G59F/G5NTL D-A3C/A44C/G39C/K39C #6 #7 #8 #9 $0 $1 $2 $3 BT-04 BT-04 BT-06 BT-08 BT-08 BD1

Quick Exhaust Valve Series AQ 1

Applicable tubing O.D. d Weight (g) D1 39.2 M1 L3 12.9 M2 M1 12.9 L2 14.3 L4 12.9 L1 5.2 D2 39.2 L3 23.5 Weight (g) D1 10.0 L2 13.7 L1 5.2 Model Tubing O.D. d AQ240F-04-00 Model Tubing O.D. d AQ240F-04-04 6 4 9.3 5 4 9.3 AQ240F-06-00 AQ240F-06-06 13.7 13.7 15.4 6.2 13.7 26.7 40.7 8 10.0 14.7 6 11.6 6 6 11.6 6.2 40.7 AQ340F-06-00 AQ340F-06-06 13.7 19.5 13.7 13.7 6.3 44.8 31.7 13 19.6 11.8

Table of Contents - Tubing

Model 6 Size: nominal size X length Number of pieces 8 12 4 6 8 10 12 TM-04 TM-06 TM-08 TM-10 TM-12 2 X 6 2.6 X 8 4 3 X 8 Tube Release Tool Series TG To remove tube in a confined space or from manifolded one-touch fittings.

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

M Weight (g) AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 Model Applicable tubing O.D. d 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 27.9 28.2 29.6 32.4 40.2 32.5 33.1

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Weight (g) d L4 Model L3 D1 T H D2 D3 L1 L2 Max. Min.

LVQ

LVQ20 C A B D (Max.

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

Speed Controller with One-touch Fittings

L4 Note) Weight (g) 3 5 5.5 6.5 8.5 9.5 19 22 36 38 42 44 76 82 Model D1 Applicable tubing O.D. d AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 D2 D3 D4 L1 L2 L3 L5 L6 L7 L8 M1 MIN. 18.4 21 21.7 22.7 25.4 26.5 28.2 29.5 33.6 34.4 36 37.1 44.1 45.1 3.2 5 6 25.4 36 37 39.5 40.7 42.5 53.2

212

0 q 4 Series LVR Dimensions Integral ttings/LQ3 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Model A B C D E LVR20-Z07(06) 40 40 49.3 68 20.1 LVR40-Z11(10) 82.5 82.5 89 115 33 LVR40-Z13(12) 82.5 82.5 89 115 33 LVR50-Z19 100 100 117.5 135 45 Breathing port M5 x 0.8 IN Model F G H J LVR20-Z07(06) 8 27 56 88 LVR40-Z11(10) 14 64.5 100 150.5 LVR40-Z13(12) 14 64.5 100 159.5 LVR50-Z19

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

Output 1 Output 2 A B C Dimensions L5 D2 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tubing O.D. d L1 D3 Metric sizes Weight g Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9 26.4 VR1211F-23 14.8 4 12.8 10.4 56 26.6 38.5 21.9 15.7 15.8 30.4 VR1211F-04 6.8 6 12.8 12.8 53.2 28.8 41.9 25.2 16.8 16.8 25.0 VR1211F-06 Inch sizes Weight g Model d D1 D2 L3 L2 D3 L1

Shuttle Valve/AND Valve with One-Touch Fittings

10.4 56 20.3 32.2 21.9 15.7 15.8 25.2 14.8 6.8 VR1210F-06 6 12.8 12.8 53.2 35.6 25.2 16.8 16.8 23.0 22.5 VR1210F-08 8 15.2 15.2 60.4 8.1 38.2 28.2 18.7 18.7 24.0 VR1220F-06 6 12.8 12.8 59 7.4 37.7 25.2 16.8 16.8 27.2 23.9 19.8 VR1220F-08 8 15.2 15.2 65 8.2 39.7 28.2 18.7 18.7 31.9 VR1220F-10 10 18.5 18.5 71.6 9.8 25.8 44.8 31 20.8 20.8 43.2 Inch sizes Weight g Model d D1 D2 L3 L2 D3 L1 L4

VCA

AXT632-69-1 AXT632-69-2 VVCA40-3A-06-2 VVCA40-3A-06-1 OR-3200-200-H VCA45--VVCA40-6-n VVCA40-4A-06-2 VVCA40-4A-06-1 Material Mounting screw (side ported) Mounting screw (side ported) 1 1 Steel Steel Mounting screw (front ported) Mounting screw (front ported) End plate assembly (D side, side ported) End plate assembly (D side, side ported) 2 2 Al Al End plate assembly (D side, front ported

VCA

AXT632-69-1 AXT632-69-2 VVCA40-3A-06-2 VVCA40-3A-06-1 OR-3200-200-H VCA45--VVCA40-6-n VVCA40-4A-06-2 VVCA40-4A-06-1 Material Mounting screw (side port) Mounting screw (side port) q q Steel Steel Mounting screw (front port) Mounting screw (front port) End plate assembly (D side, side port) End plate assembly (D side, side port) w w Aluminum Aluminum End plate assembly (D side, front port)

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L 285.5 21 273 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions (mm) Applicable fitting d Part number A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32