1.63

C 0.2 B 0.2 0.1 A 0.2 0.05 100 1000 D (mm) MGPWM MGPWL/A Hexagon socket head cap screw 126 146 176 192 240 266 Maximum speed (mm/s) Bore size (mm) A (mm) B (mm) C (mm) 20 25 32 40 50 63 24 30 34 40 46 58 108 128 156 172 220 248 12 14 18 18 22 22 12 15 18 18 22 22 M5 x 0.8 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 Other Caution Do not use this cylinder as a stopper. 518

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, relief port JIS class 2 +1.0 0 mm M5 x 0.8 M5 x 0.8 11 Clean Room Series Microspeed Cylinder Series 10/11 -CM2X Series 10/11 -CM2X How to Order Clean room series 10 11 Mounting Relieving type Vacuum type B L F G BZ Basic Type Axial foot type Front flange type Rear flange type Boss-cut basic type C(D)M2X L 40 10 150 C73 With auto switch (with built-in magnet) Boss-cut front flange type

Platform Cylinder Series CXT

Grease pack part no.: GR-S-010 (10 g) Individual -X 527 Series CXT Dimensions: 12 to 25 S + Stroke X + Stroke H 4 x LD through, counterbore B depth C 4 x MM HP Depth M Back side 4 x J depth JK HG HA T PA T (N) d d NN RW RW PW QW PB GP E W Y Z 2 x M5 x 0.8 2 x RB G G HT U (NA) (Option) A L HN (Max.)

Clamp Cylinder Series CK1

Grease pack part no.: GR-S-005 (compatible with all sizes) Please order 2 pieces exceeding 100 strokes.

High Power Cylinder Series RHC

VQZ2000 (12.6) VQZ3000 (21.6) VFR2000 (16.2) VFR3000 (41.4) VFR4000 (67.0) 0.5 0.1 0.3 In-line type VFS1000 (9.0) VFS2000 (18.0) VFS3000 (36.0) VFS4000 (64.5) 2-B 5 AS221F (3.5) AS231F (3.5) AS2051F (4.5) AS220 (2.9) AS2000 (3.8) AS3001F (6.5) 1-A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2

CYP_EN

Recommended speed controlling restrictor/ dual speed controller for CYP cylinder Model Series Restrictor CYP15 CYP32 Elbow type 10-AS1200-M5-X216 10-AS2200-01-X214 Metal body piping type In-line type 10-AS1000-M5-X214 10-AS2000-01-X209 10-AS1201F-M5-04-X214 10-AS2201F-01-04-X214 Elbow type 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 (Restrictor) 10-AS2201F-01-06-X214 10-AS1301F-M5-04-X214

One-touch Fittings

KQ2 Series Model Applicable tubing Connection thread Part number 3.2 M3 x 0.5 KQ2H23-M3G1 3.2 M5 x 0.8 KQ2H23-M51 4 M3 x 0.5 KQ2H04-M3G1 4 M5 x 0.8 KQ2H04-M51 4 M6 x 1.0 KQ2H04-M61 6 M5 x 0.8 KQ2H06-M51 6 M6 x 1.0 KQ2H06-M61 6 R1/8 KQ2H06-01S1 1/8 10-32UNF KQ2H01-321 5/32 10-32UNF KQ2H03-321 3/16 10-32UNF KQ2H05-321 5/32 NPT1/16 KQ2H03-33S1 1/8 M5 x 0.8 KQ2H01-M51 3/16 M5 x 0.8 KQ2H05-M51

ZISE10.eng

White 3 (FUNC) Gray 2 DC(-) Blue 1 Thank you for purchasing the SMC ZSE10(F)/ISE10 Series Digital Pressure Switch.

Compact Rotary Actuator

u t o s w i t c h A u t o s w i t c h s p e c i f i c a t i o n A u t o s w i t c h i n s t a l l a t i o n A u t o s w i t c h s e t p o s i t i o n I n t e r n a l s t r u c t u r e a n d o p e r a t i o n p r i n c i p l e C u s h i o n s M a i n t e n a n c e I n s p e c t i o n P e r i o d i c i n s p e c t i o n D i sassem ble and reassem bl e C a u t i o n o f d i

FSQ seies

Lad sire Oi ptool \inyt. @3.4, o.2mn1, 2 w1r6 (red, b ack). 0.5m ' . lmpacl sistance J00m/s: {30 6G) . hsu aron resistance ---50Mo or more underl6sr vo tage soovDc (belw6n case and cabre) . w thsland vo tage l500VAC 1 min (between case aid bte) .Ambiontlemperalure 50 140"F (10-60"C) ' Polecton skucture lEC529 spec.lP67, warelprcoj (JtS C 0920), oibrcoj ' Suffx L lor the modelwlth a 3m long

Air Cylinder RSQ Series Stopper Cylinder

Lad sire Oi ptool \inyt. @3.4, o.2mn1, 2 w1r6 (red, b ack). 0.5m ' . lmpacl sistance J00m/s: {30 6G) . hsu aron resistance ---50Mo or more underl6sr vo tage soovDc (belw6n case and cabre) . w thsland vo tage l500VAC 1 min (between case aid bte) .Ambiontlemperalure 50 140"F (10-60"C) ' Polecton skucture lEC529 spec.lP67, warelprcoj (JtS C 0920), oibrcoj ' Suffx L lor the modelwlth a 3m long

Rotary Actuator

For equiangular acceleration, the angular velocity, , after t seconds are obtained using the following equations. 1 ( 2 ( C : Integration constant Because the displacement angle in t=0 becomes =0, it becomes C=0.

Rotary Table

C: Erratum Correction. D: Fully revised following product review. E: Added a note of caution.

Toggle Type Air Gripper

Tightening torque Tightening torque Model Screw (Nm) A M6 4.8 B M5 2.8 MHT2-32DZ C M8 12 A M6 4.8 B M6 4.8 MHT2-40DZ C M8 12 A M8 12 B M8 12 MHT2-50DZ C M10 24 A M10 24 B M10 24 MHT2-63DZ C M10 24 13 - 3-4. Construction / Parts list Components No.

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

For equiangular acceleration, the angular velocity, , after t seconds are obtained using the following equations. 1 ( 2 ( C : Integration constant Because the displacement angle in t=0 becomes =0, it becomes C=0.

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

Grease pack part no.: GR-L-010 (10g) MGT D-X Individual -X 415 Series MGF Dimensions: 40 MGF40 120 4 x M8 x 1.25 through 100 100 120 90 9.5 8 46 + Stroke 36.5 + Stroke 7.5 18.5 2 x Rc, NPT, G 1/8 Breathing hole for guide (with element) 38 When the cylinder is extended Port for extending cylinder Port for retracting cylinder 114 4 x M8 x 1.25 through M5: T-slot for hexagon bolt K 3.5 40 100

0.01

ZSE30 ISE30 ZSE40 ISE40 ZSE10 ISE10 Plug connectors (Centralized wiring) Requires less man hours to wire. Easy to add and remove manifold stations. Modular construction Requires less man hours to wire. ISE70 ZSE80 ISE80 Terminal block box ZSE ISE ZSP PS ISA2 ISA2 With regulator + 2 port solenoid valve PSE With 2 port solenoid valve IS ISG ZSM1 Check optimum position at a glance.

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: C (NPN Open Collector 1 Output+Analog Voltage)

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 Female Thread/Side Piping Port, Output Specifications: NPN Open Collector 1 Output+Analog Voltage, Unit Specifications: -, Lead Wire: -, Adapter: -, Calibration Certificate: -

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

CUX32-PS M5 2.55 10% Due to cylinder structure, 10mm bore size seals cannot be replaced. M6 4.02 10% 2. Grease pack When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) Operation Warning 1. The speed may not be controllable during low speed operation with the meter-out controller. Caution 1.