Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: No Lead Wire, Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: D (Panel Mount Adapter+Front Protective Cover), Calibration Certificate

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: No Lead Wire, Adapter: D (Panel Mount Adapter+Front Protective Cover)

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: M (Fixed SI Unit, kPa)

Type: Pressure Switch, Fluid Type: Air, Sensor, Monitor Structure: [Integrated Type] Integrated shape, Analog Output Specification: Voltage, Pipe Port Type: Female Thread, Plumbing Thread Type: M, Plumbing Thread Nominal: M5x0.8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 0.5, Operating Temperature Range(°C): -5～50, Operating Humidity Range(%): 35～85, Number

Type: Pressure Switch, Fluid Type: Air, Sensor, Monitor Structure: [Integrated Type] Integrated shape, Analog Output Specification: Voltage, Pipe Port Type: Female Thread, Plumbing Thread Type: M, Plumbing Thread Nominal: M5x0.8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 0.5, Operating Temperature Range(°C): -5～50, Operating Humidity Range(%): 35～85, Number

Type: Pressure Switch, Fluid Type: Air, Sensor, Monitor Structure: [Integrated Type] Integrated shape, Analog Output Specification: Voltage, Pipe Port Type: Female Thread, Plumbing Thread Type: M, Plumbing Thread Nominal: M5x0.8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 0.5, Operating Temperature Range(°C): -5～50, Operating Humidity Range(%): 35～85, Number

Type: Pressure Switch, Fluid Type: Air, Sensor, Monitor Structure: [Integrated Type] Integrated shape, Analog Output Specification: Voltage, Pipe Port Type: Female Thread, Plumbing Thread Type: M, Plumbing Thread Nominal: M5x0.8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 0.5, Operating Temperature Range(°C): -5～50, Operating Humidity Range(%): 35～85, Number

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 Female Thread/Side Piping Port, Output Specifications: PNP Open Collector 1 Output+Analog Voltage, Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: Panel Mount Adapter+Front Protective Cover, Calibration Certificate: -

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 Female Thread/Side Piping Port, Output Specifications: PNP Open Collector 1 Output+Analog Voltage, Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: No Lead Wire, Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)], Calibration Certificate: -

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 Female Thread/Side Piping Port, Output Specifications: PNP Open Collector 1 Output+Analog Voltage, Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: Panel Mount Adapter+Front Protective Cover, Calibration Certificate: w

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 Female Thread/Side Piping Port, Output Specifications: PNP Open Collector 1 Output+Analog Voltage, Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: No Lead Wire, Adapter: Panel Mount Adapter+Front Protective Cover, Calibration Certificate: -

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 Female Thread/Side Piping Port, Output Specifications: PNP Open Collector 1 Output+Analog Voltage, Unit Specifications: Fixed SI Unit, kPa, Lead Wire: -, Adapter: -, Calibration Certificate: -

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

CNG

CL CL1 MLGC P 0.3 MPa Lock unit part no.

New

C R E A B1 B1 A B 2 x P 1 (IN), 2 (OUT) port 2 x M5 Thread depth N B 2 x P 1 (IN), 2 (OUT) port 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal F Cable 6 to 12 Q D D S G1/2 Qp2 F 34 (44) 31.5 32 R 25 T C K C R E E Sp2 A A B1 2 x P 1 (IN), 2 (OUT) port B1 2 x P 1 (IN), 2 (OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H J H G1/2 (mm) Grommet Grommet (with surge

E-P HYREG

Refer to Specific Product Precautions on page 1006. 990 E-P HYREG VY1 Series R Standard Specifications 0 1 0 1 0 1 VY110 01 02 0 1 0 1 VY140 0 1 VY150 0 1 VY170 0 1 20 VY190 0 1 VY1D00 M5 VY1A0 VY1B0 M5 VY120 01 02 VY130 02 03 Model 10 12 10 04 02 03 04 04 06 14 M5 01 Port 1(P) 11 2 Port size 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 1 M5 M5 2 2 M5 2(A) 1 4 3(R) Weight

VQ7-6/7-8

AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 AXT632-45-13 Mounting bolt Size M5 x 35 with SW M5 x 15 with SW M5 x 45 with SW M5 x 60 with SW M5 x 65 with SW M5 x 70 with SW M5 x 75 with SW M5 x 90 with SW M5 x 95 with SW M5 x 100 with SW M5 x 105 with SW M5 x 115 with SW VK Option mounting diagram SMC

2 Phase Stepper Motor/Without Motor Brake Series LXS

E-M5 thread depth 10 6 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch U N x P 20 5 N C 1 0.2 (5.1) 10 5.8