Electric Actuator Triple Axis P&P Unit

T nuts provided by P/A.

VQ5000

27.5 2-3/8 Ports R1, R2 (Port A) 17.5 13.5 (Port B) Indicator light SMC 2 4 T 5 1 3 16 16 13 A 40 53 66 53 66 B A VQ5000 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 3-1/2 Ports P, A, B Bottom ports 16 M5 ground screw SMC (Ports A, B) 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 0 1 G H

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: Operation Manual, Calibration Certificate

Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting), Operation Manual: K (Operation Manual, Calibration Certificate)

Vacuum System Peripherals:

Air operated Nil M6 x 1 (Option) M5 x 0.8 PV/V port size Applicable to only plug connector.

5 Port Air Operated Valve

qe r q e (B)2 4(A) SYA w (B) 2 (A) 4 (A) 4 (B) 2 w y SYJA 1 (P) (EB)3 5(EA) VFA3000 VFA5000 VZA t (A)4 2(B) 3 (EB) 5 (EA) 1 (P) 5 (EA) 3 (EB) 1 (P) VFA VFA r y 1 (P) (EA)5 3(EB) VFRA 2 position double VPA4 Symbol 2 position double SYJA r t q q VFA1000 (B)2 4(A) w w (A) 4 (B) 2 (A) 4 (B) 2 VZA 5(EA) 1 (P) (EB)3 VTA VFA3000 VFA5000 2(B) (A)4 VGA 3 (EB) 5 (EA) 1 (P) 1 (P) 5 (EA) 3 (EB) t r (

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

S 20 20 stations P, R port thread type + + + + + + + A, B port size R R P P port 1/8 R port 1/8 A B M5 Nil Rc M5 x 0.8 B A A, B port M5 x 0.8, C4 A, B port M5 x 0.8, C4 C4 F G One-touch fitting for 4 N3 N NPT One-touch fitting for 5/32" T NPTF Common SUP/Individual EXH type Note) For more than 10 stations, supply air to both sides of P port.

CQS

M5 X 40 l M5 X 45 l M5 X 50 l M5 X 55 l M5 X 60 l M5 X 65 l M5 X 70 l M5 X 75 l M5 X 80 l M5 X 85 l 40 45 50 55 60 65 70 75 80 85 M3 X 30 l M3 X 35 l M5 X 40 l M3 X 45 l M5 X 50 l M3 X 55 l 30 35 40 45 50 55 6.5 8.5 Note 1) The appropriate plain washer must be used for through-hole mounting.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L2 = 6 mm Applicable shaft types: J, K, T 2. Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M L1 = 5. Q2 = M 6.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: X, Z Q1 = M C1 = C L2 = L2 = D1 = L1 + (3 x P) L1 = C1 Q2 = M Q2 = M Z axis X axis L1 = X = (mm) (mm) (mm) D1 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 L1 max Size 30 50 63 80 100 X 3 to 25 3.5 to 36 3.5 to 41 4 to 50 5 to 60 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q1 M3 M4, M5, M6,

XL

msec T msec Bellows seal 200 200 0 0 0.4 0.5 0.6 0.7 0.3 0.4 0.5 0.6 P MPa P MPa Double acting (dual operation) XLF-40 Normally closed XLG-40 Valve type Model 80 80 60 60 T msec T msec 40 40 O-ring seal 20 20 0 0 0.4 0.5 0.6 0.7 0.3 0.4 0.5 0.6 P MPa P MPa Valve type XLD-40 Normally closed Model Main valve Initial exhaust valve 600 600 400 400 Smooth exhaust valve T msec T msec 200 200 0

Bernoulli Gripper

Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.

CL

MLU E D P ML1C CLJ2D16D19 16 8 Silencer -X 12 2 20Head cover port in axial direction (R) 25.5 Data M5 x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking Lock nut Manual unlocking cam M5 x 0.8 unlocking port Unlocked when pressurized 5H9 +0.030 0 71 46 6 Clevis pin (5d9 ) 0.030 0.060 M5 x 0.8 Rod side cylinder port 31 M14 x 1.0 28 23 5 M5 x 0.8 Head side cylinder

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

27.5 2-3/8 Ports R1, R2 (Port A) 17.5 13.5 (Port B) Indicator light SMC 2 4 T 5 1 3 16 16 13 A 40 53 66 53 66 B A VQ5000 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 3-1/2 Ports P, A, B Bottom ports 16 M5 ground screw SMC (Ports A, B) 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 0 1 G H

VFR

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

+ + + + + + + 20 20 stations S P P A, B port size P Nil Rc A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 A A B B B A, B port M5 x 0.8, C4 A M5 M5 x 0.8 F G C4 One-touch fitting for 4 N NPT N3 One-touch fitting for 5/32" T NPTF 13 Series SYJ3000 Flat Ribbon Cable Manifold Common SUP/Common EXH Note) For more than 10 stations, supply air to both sides of P port and exhaust air from

SZ3000

0 e w t y q o 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center 4(A) (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i Component Parts 2 position single with back pressure check valve Material Note Description No. q w e r t y u i Zinc die-casted Body r u !

CL

MLU E D P ML1C CLJ2D16D19 16 8 Silencer -X 12 2 20Head cover port in axial direction (R) 25.5 Data M5 x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking Lock nut Manual unlocking cam M5 x 0.8 unlocking port Unlocked when pressurized 5H9 +0.030 0 71 46 6 Clevis pin (5d9 ) 0.030 0.060 M5 x 0.8 Rod side cylinder port 31 M14 x 1.0 28 23 5 M5 x 0.8 Head side cylinder

New

1 (IN), 2 (OUT) port 2 x M5 Thread depth N B 2 x P 1 (IN), 2 (OUT) port 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal F Cable 6 to 12 Q D D S G1/2 Qp2 F 34 (44) 31.5 32 R 25 T C K C R E E Sp2 A A B1 2 x P 1 (IN), 2 (OUT) port B1 2 x P 1 (IN), 2 (OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H J H G1/2 (mm) Grommet Grommet (with surge Dimensions Size Port

Fieldbus System

P P P P P P P P SY5000 P P P P P P P P SY5000 P P P P C2 C3 C4 C6 C8 CM N1 N3 N7 N9 CM 2 One-touch fitting 1/8" One-touch fitting 3.2 One-touch fitting 5/32" One-touch fitting P P P P P P P P P P P P P P Straight Elbow Straight Elbow 4 One-touch fitting 1/4" One-touch fitting 6 One-touch fitting 5/16" One-touch fitting 8 One-touch fitting Straight port, mixed sizes LN3 LN7 LN9