Pad Diameter: ø63, Pad Type: HB (Heavy-duty, Bellows), Pad Material: N (NBR), Buffer Body Material: J (Aluminum Alloy), Buffer Stroke: 75mm, Vacuum Inlet Thread Size: N01 (NPT1/8), Mounting Thread Size: A18 (M18 X 1.5)

PSE540/560

between live parts and case (at 500 VDC) 10 to 500 Hz at whichever is smaller of 1.5 mm amplitude or 98 m/s2 acceleration, Vibration resistance in X, Y, Z directions, for 2 hours each (De-energized) 980 m/s2 in X, Y, Z directions, 3 times each (de-energized) Impact resistance Temperature characteristics 2% F.S. or less (based on 25C) Piping Specifications R04 N01 Model M3 M5 01 R06 IM5 IM5H

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 22.1 12.3 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1

Booster Regulator/Air Tank

Then, the charge time (T) for a 10 L tank: T = t x = 3.2 x = 32 (s). V 10 T = t x = 89 x = 89 (s).

PFxx-OMJ0005CN

1 W Z (2 m) (2 m) + () 2 R S () () T V () () A A B B -11No.PF-OMJ0005CN-I IN OUT X693 IN OUT 73 IN OUT X694 IN OUT 73 X731 (Ar)(CO2) (ArCO2) 92:890:1080:2070:3060:40 75 / ZS-33-D 2 m () ZS-33-F ZS-33-J () ZS-33-JS () ZS-33-M () 2 ZS-33-MS () 3 ZS-33-R DIN 1 2 3 4 5 DIN F02(G1/4)DIN -12No.PF-OMJ0005CN-I LED UP) (DOWN) (OUT2) (OUT1) SET) (OUT ) (IN ) (OUT1

Tamper Proof and Flat Head Screw

(mm) 1in=25.4mm L4 D3 H (width across flats) T2 A L2 D1 L3 D2 T1 L1 Dimensions A Model T2 H D1 T1 D2 D3 L3 L1 L4 L2 AS12 0-M5-T M5 x 0.8 8 9 M5 x 0.8 9 4.5 10 31 10.3 0.7 28.4 AS12 0-U10/32-T 10-32UNF 10-32UNF AS22 0-01-ST Rc 1/8 12 14.3 R 1/8 AS22 0-F01-ST PF 1/8 14.6 7 18 35.6 14.1 1.5 32 AS22 0-N01-ST NPT 1/8 12.7 NPT 1/8 AS22 0-02-ST Rc 1/4 17 18 R 1/4 AS22 0-F02-ST PF 1/4 19.5 7 27.2

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

0.8 External pilot port 53 14.5 14.5 (Only external pilot type (R)) R3.5 8.5 12 X A 2 10 24 1 P 3 R Manual override 34 41 3.5 (Lead wire length) 38.5 300 Cover diameter 1.4 Cross sectional area 0.2mm2 SMC 35.5 A port PE 16 12 7.5 7.5 14.5 7 7.5 1/8 NPTF P,A,R port M5 x 0.8 PE port L type plug connector (L): VQZ115(R)L -01T M type plug connector (M): VQZ115(R)M -01T 51.5 300 (Lead wire length

Micro Mechanical Valve Series VM1000

-02-05 Panel mounting hole M x 18 x 1 Hexagon nut thick 11, across flats 27 Min. 3 Max. 11 M5 x 0.8 (Pilot exhaust port) Symbol (B) 2 (A) 4 12 14 3 (EB) 1 (P) 5 (EA) 0.5 MPa supply 3.5 mm T.T. 2.0 mm O.T. 1.5 mm P.T. 20 N F.O.F. 3 x 4.5 mounting hole 5 x Rc 1 4 Roller plunger VFM250-02-06 VFM250-02-06S Panel mounting hole 15 polyacetal or head steel roller M18 x 1 Hexagon nut thick 11,

VM

1 Mechanical Valves Series VM Mechanical Valves Series VM Mechanical Valves SA VA Model VM1000 VM100 VM200 VM400 VZM500 VZM400 VFM300 VFM200 VM800 SA Dimensions (mm) Side ported 11 x 36 x 16 Bottom ported 11 x 28 x 25 Side ported 17 x 44 x 25 Bottom ported 17 x 44 x 30 25 x 40 x 52 21 x 35 x 53 18 x 28 x 87 18 x 30 x 91 26 x 35 x 94 23 x 40 x 115 30 x 40 x 57 VA VM Courtesy of Steven Engineering

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: ø4 One-touch Fitting, Straight Type, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: ø6 One-touch Fitting, Elbow Type, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: C4H (ø4 One-touch Fitting, Straight Type)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: Operation Manual, Calibration Certificate

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8)