SMC Corporation of America
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7.5 M5 x 0.8 (P, R port) 17.5 23 L plug connector (L): 10-SYJ34M-L-M5 M plug connector (M): 10-SYJ34M-M-M5 M8 connector (WO): 10-SYJ34M-WO-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to page 646 for dimensions

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

S L Please use the applicable pressure gauge depending on the fluid used.

RS Q G RS H A Model REBH15 REBH25 REBHT25 REBHT32 Thread size M6 x 1.0 M5 x 0.8 M8 x 1.25 Bolt dimensions RZQ Dimension t l-9 l-8 l-12 Nm Tightening torque 4.4 2.65 13.2 MI W S CEP1 CE1 Square nut CE2 ML2B C J G5-S l t CV MVGQ CC RB J D-X 20Data 10-2-75 75 Series REBH Model Selection 1 Operating Conditions Pv: Maximum operating pressure for vertical operation (MPa) Wv: Allowable load weight

RS Q G RS H A Model REBH15 REBH25 REBHT25 REBHT32 Thread size M6 x 1.0 M5 x 0.8 M8 x 1.25 Bolt dimensions RZQ Dimension t l-9 l-8 l-12 Nm Tightening torque 4.4 2.65 13.2 MI W S CEP1 CE1 Square nut CE2 ML2B C J G5-S l t CV MVGQ CC RB J D-X 20Data 10-2-75 75 Series REBH Model Selection 1 Operating Conditions Pv: Maximum operating pressure for vertical operation (MPa) Wv: Allowable load weight

X 0.8 20 Type How to Order Applicable solenoid valve SYJ512-l-M5 SYJ512M-l-M5 SYJ522-l-M5 SYJ522M-l-M5 SS3YJ5--20-05 Stations Applicable blank plate ass'y SYJ500-10-1A 2 stations 02 P Port Rc(PT)1/8 .. .. 20 stations 20 R Port Rc(PT)1/8 Note) If more than 6 stations, supply air to both sides of P port and exhaust air from both sides of R port. 40 Type Applicable solenoid valve SYJ514-l SYJ514M-l

Angle adjusting screw Angle adjusting screw Angle adjusting screw n o A R ti n 0 0 n c ot g 9 e 9 o l e y at ir ti y c d a a a io e d w g w ir n j n u y d y ti s ra e e g s ti k k u n n n g j ti of d g of s d a e u ir e e e e j d of c l g a g ti g o n n e n k A n l g n ra ra A e y n n w io io a y at at 9 ot ot 0 R R The rotation range under the adjustment of an angle at 60 is indicated

M5 X 40 l M5 X 45 l M5 X 50 l M5 X 55 l M5 X 60 l M5 X 65 l M5 X 70 l M5 X 75 l M5 X 80 l M5 X 85 l 40 45 50 55 60 65 70 75 80 85 M3 X 30 l M3 X 35 l M5 X 40 l M3 X 45 l M5 X 50 l M3 X 55 l 30 35 40 45 50 55 6.5 8.5 Note 1) The appropriate plain washer must be used for through-hole mounting.

kit: 0.32n + 0.75 S, T kit: 0.32(n2) + 1.8 F, T kit 18 stations Side 1/2 Option SV L F kitD-sub connector L T kitTerminal block box L L kitLead wire L S kitSerial transmission VQ4l00 VQ4l01 L kit 16 stations VQ4000 VV5Q41-lll Direct exhaust with silencer box SYJ S kit 18 stations Not including valve weight.

CRBU2W10-S CRBU2W10-SE A port B port For unit mounting A port B port For unit mounting (mm) (Depth) Q2 Model A B C D E(g6) F(h9) G H J K L M N P Q1 R S1 S2 T U V W X CRBU2W10-S CRBU2W10-SE CRBU2W15-S CRBU2W15-SE CRBU2W20-S CRBU2W20-SE CRBU2W30-S CRBU2W30-SE M3 (4) 10.5 10.5 M5 x 0.8 M3 x 0.5 M5 x 0.8 M3 x 0.5 -0.004 -0.012 0 -0.036

MNB h + l Z + l + Stroke ZZ + l + Stroke ZZ +Stroke Z +Stroke S +Stroke CNA CNS 125 to 160 CLS CLQ With rod boot A Rc BP lock-up port Unlocked when pressurized CD hole H10 Axis d9 B Rc BP lock-up port 2-Rc P MLGP Width across flats KA RLQ MLU EA D e ML1C Plug cap 2 positions l Dh + l Z + l + Stroke Z + Stroke S + Stroke ZZ + l + Stroke ZZ + Stroke -X 20Data Stroke range (mm) Bore size (

Model CY1H10 CY1H15 CY1H20 CY1H25 CY1HT25 CY1HT32 Screw size M6 x 1.0 M4 x 0.7 M5 x 0.8 M8 x 1.25 Bolt dimensions Dimension t l-9 l-7 l-8 l-8 l-12 Nm 4.4 1.37 2.65 13.2 Fastening torque {kgfm} 0.45 0.14 0.27 1.35 Square nut l t 4.

ZF Symbol S Pad dia. 02 to 16 L 20 to 50 ZP ZCU With buffer AMJ Misc.

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

10 16 12 4 MXQ-CT12(L)-X11 15 32 G MXQ-CT12(L)-X12 25 42 B C MXQ-CT16(L) 5 23 J MXQ16(L) M10 x 1 M5 x 12 MXQ-CT16(L)-X11 15 33.5 35.5 20 12 17 14 5 33 MXQ-CT16(L)-X12 25 43 A K MXQ-CT20(L) 5 27 MXQ20(L) MXQ-CT20(L)-X11 M5 x 14 M12 x 1.25 15 41 44.5 25 23 37 13 17 6 MXQ-CT20(L)-X12 25 47 MXQ-CT25(L) 5 30 MXQ25(L) M14 x 1.5 M6 x 18 MXQ-CT25(L)-X11 15 40 49 53.5 31 15 28 19 6 MXQ-CT25(L)-X12

h + l S + Stroke ZZ + Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZZ + l + Stroke 125 to 160 With rod boot B Rc BP lock-up port A Rc BP lock-up port Unlocked when pressurized 4-FD 2-Rc P Width across flats KA EB D e Plug cap 2 positions l S + Stroke ZZ

A cm 2 7 Ultimate Pressure Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1 D3/L (L/sec) at an air temperature of 20C. Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s).

(Example) For M3: L1 = 6 mm Applicable shaft types: S, W, Y Q1 = M L1 + (3 x P) L1 = (mm) Q1 M3 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 Symbol: A2 Machine female threads into the short shaft.