Rotary Table/

to the plate (also the same in case of a thicker plate) = m 2 r2 = m 5 2r2 = m 4 r2 = m 12 a2 + b2 !

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

5 2r2 = m 4 r2 CRQ2 = m 12 a2 + b2 MSQ MRQ 10.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

CY1F

m P 0.1 x mcos + msin P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m mv P Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 29) 1 Review of operating conditions Determination of load factor () = Load mass (m) Maximum allowable load (m max) + Static moment (M) Allowable static moment (Mmax)+ Dynamic moment (ME) Allowable dynamic moment

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

0.1 x mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

x mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting), Operation Manual: K (Operation Manual, Calibration Certificate)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting), Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting), Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting), Operation Manual: K (Operation Manual, Calibration Certificate)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)

Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting), Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)