s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex30 to 250 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed changes

NARM Series

plate L 1 End plate ass'y NARM2500 NARM3000 12 O-ring 1 13636A 13646A 13636B 13646B Bracket A 131515A 1349161A 3 Diaphragm ass'y NBR 2 (Except for O-ring) (Except for O-ring) Bracket 2 1 set 2 Bracket B Hexagon socket head cap screw 13649A 13639A 4 13 Valve ass'y Brass/NBR 136410 136310 5 Valve spring Stainless steel 11.5 X 8.5 X 1.5 14.5 X 10.5 X 2 6 14 Valve O-ring NBR 1 O-ring Bracket A P3

Vacuum

H-NBR P53801005 Brass, H-NBR P53803015 Brass, H-NBR P53803016 Fixed orifice sus$4 P36202018 P36202018 P mn17 O-ring H,I'BR o 4 3 5 x 1 0 6 x l 0 8 3 1 x 1 O-ring H-NBR 0 2 x 0 6 o 3 2 \ 1 O-rlng NBR JtsB240t P16 NoE 1) O-ring NBR ol.7 x 0.85 o 2 . 5 \ ' l O-ring NBR a 2 5 x 1 0 3 x l l 1 O-ring NBR o24 x 1.5 o 3 9 5 x 2 O-rlng NBR o l 0 x 1 3 Jls8240t Pl r a27.8 x 1 5 O-rlng NBR JtsB2401 P3

Electro-Pneumatic Proportional Valve Series VEF/VEP

F2 P3 wSub-plate Thread type Port size Thread type Rc G Note) Symbol Port size 1/4 3/8 Nil F N T Symbol 1 2 NPT NPTF !1Gasket DXT172-7 !

.; Release Valve: N.C., Rated Voltage: 24VDC, Electrical Entry: L-Type Plug Connector w/Lead Wire, Manual Override: Non-Locking Push Type, Sensor/Switch Specifications: P3 [Pressure Sensor: -14.5 to 14.5 (-100 to 100); Output: 1 to 5V, Accuracy ±2% F.S. or Less], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Elbow ø1/8" One-Touch Fitting, Option: -

.; Release Valve: N.C., Rated Voltage: 24VDC, Electrical Entry: L-Type Plug Connector w/Lead Wire, Manual Override: Non-Locking Push Type, Sensor/Switch Specifications: P3 [Pressure Sensor: -14.5 to 14.5 (-100 to 100); Output: 1 to 5V, Accuracy ±2% F.S. or Less], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Straight ø5/32" One-Touch Fitting, Option: Screwdriver Handling

.; Release Valve: N.C., Rated Voltage: 24VDC, Electrical Entry: L-Type Plug Connector w/Lead Wire, Manual Override: Non-Locking Push Type, Sensor/Switch Specifications: P3 [Pressure Sensor: -14.5 to 14.5 (-100 to 100); Output: 1 to 5V, Accuracy ±2% F.S. or Less], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Straight ø4mm One-Touch Fitting, Option: Bracket for Single

.; Release Valve: N.C., Rated Voltage: 24VDC, Electrical Entry: L-Type Plug Connector w/Lead Wire, Manual Override: Non-Locking Push Type, Sensor/Switch Specifications: P3 [Pressure Sensor: -14.5 to 14.5 (-100 to 100); Output: 1 to 5V, Accuracy ±2% F.S. or Less], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Elbow ø1/8" One-Touch Fitting, Option: -

.; Release Valve: N.C., Rated Voltage: 24VDC, Electrical Entry: L-Type Plug Connector w/Lead Wire, Manual Override: Locking Type, Tool Required, Semi-Standard, Sensor/Switch Specifications: P3 [Pressure Sensor: -14.5 to 14.5 (-100 to 100); Output: 1 to 5V, Accuracy ±2% F.S. or Less], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Straight ø5/32" One-Touch Fitting, Option

.; Release Valve: N.C., Rated Voltage: 24VDC, Electrical Entry: L-Type Plug Connector w/Lead Wire, Manual Override: Non-Locking Push Type, Sensor/Switch Specifications: P3 [Pressure Sensor: -14.5 to 14.5 (-100 to 100); Output: 1 to 5V, Accuracy ±2% F.S. or Less], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Straight ø4mm One-Touch Fitting, Option: B+K

.; Release Valve: N.C., Rated Voltage: 24VDC, Electrical Entry: L-Type Plug Connector w/Lead Wire, Manual Override: Non-Locking Push Type, Sensor/Switch Specifications: P3 [Pressure Sensor: -14.5 to 14.5 (-100 to 100); Output: 1 to 5V, Accuracy ±2% F.S. or Less], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Straight ø1/8" One-Touch Fitting, Option: -

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex30 to 250 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed changes