The LEHZ series is lightweight, and body sizes 10, 16, 20 and 25 are available with a compact motor size.2-finger type , Manual override adjustment screw * , Body size: 10, 16, 20, 25, 32, 40 , Compact motor size available for body sizes 10, 16, 20 and 25 , Optional controller ELECTRIC ACTUATOR. 2-FINGER TYPE ELECTRIC GRIPPER. 0.67500 lb. A10.

The LEHZ series is lightweight, and body sizes 10, 16, 20 and 25 are available with a compact motor size.2-finger type , Manual override adjustment screw * , Body size: 10, 16, 20, 25, 32, 40 , Compact motor size available for body sizes 10, 16, 20 and 25 , Optional controller ELECTRIC ACTUATOR. 2-FINGER TYPE ELECTRIC GRIPPER. 1.40000 lb. A10.

The LEHZ series is lightweight, and body sizes 10, 16, 20 and 25 are available with a compact motor size.2-finger type , Manual override adjustment screw * , Body size: 10, 16, 20, 25, 32, 40 , Compact motor size available for body sizes 10, 16, 20 and 25 , Optional controller ELECTRIC ACTUATOR. 2-FINGER TYPE ELECTRIC GRIPPER. 2.14000 lb. A10.

The LEHZ series is lightweight, and body sizes 10, 16, 20 and 25 are available with a compact motor size.2-finger type , Manual override adjustment screw * , Body size: 10, 16, 20, 25, 32, 40 , Compact motor size available for body sizes 10, 16, 20 and 25 , Optional controller ELECTRIC ACTUATOR. 2-FINGER TYPE ELECTRIC GRIPPER. 1.11000 lb. A10.

The LEHZ series is lightweight, and body sizes 10, 16, 20 and 25 are available with a compact motor size.2-finger type , Manual override adjustment screw * , Body size: 10, 16, 20, 25, 32, 40 , Compact motor size available for body sizes 10, 16, 20 and 25 , Optional controller ELECTRIC ACTUATOR. 2-FINGER TYPE ELECTRIC GRIPPER. 2.13000 lb. A10.

The LEHZ series is lightweight, and body sizes 10, 16, 20 and 25 are available with a compact motor size.2-finger type , Manual override adjustment screw * , Body size: 10, 16, 20, 25, 32, 40 , Compact motor size available for body sizes 10, 16, 20 and 25 , Optional controller ELECTRIC ACTUATOR. 2-FINGER TYPE ELECTRIC GRIPPER. 1.60500 lb. A10.

The LEHZ series is lightweight, and body sizes 10, 16, 20 and 25 are available with a compact motor size.2-finger type , Manual override adjustment screw * , Body size: 10, 16, 20, 25, 32, 40 , Compact motor size available for body sizes 10, 16, 20 and 25 , Optional controller 2-FINGER TYPE ELECTRIC GRIPPER. A10. 0.93500 lb. ELECTRIC ACTUATOR.

The LEHZ series is lightweight, and body sizes 10, 16, 20 and 25 are available with a compact motor size.2-finger type , Manual override adjustment screw * , Body size: 10, 16, 20, 25, 32, 40 , Compact motor size available for body sizes 10, 16, 20 and 25 , Optional controller ELECTRIC ACTUATOR. 2-FINGER TYPE ELECTRIC GRIPPER. 1.16500 lb. A10.

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01 Side-ported 1/8 Side-ported 1/4 Specifications Piping specifications Weight (kg) Model Port size for 1(P), 2(B), 4(A) Port size for 3(R2), 5(R1) Piping direction VS1-01-A01 VS1-01-A02 VS1-02-A01 1/8 Horizontal 0.14 1/4 Horizontal 0.07 1/8 1 Solenoid Valve (with M Connector) Comforming to ISO 15407-1 Series EVS1-01/1-02 Models Series EVS1-01 Flow rate characteristics 14, 2 (PA, B) 4, 25

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

34 34 18 18 25 14 14 Indicator light Indicator light 5 1 3 5 1 3 32.5 29.5 32.5 29.5 37 34 2-4.6 mounting holes Manual override 2-4.6 mounting holes Manual override 37 34 M8 connector M8 connector 74.5 74.5 66.5 23 23 66.5 PE port PE port PE port PE port 13.5 13.5 8.5 8.5 SMC SMC 16 16 1/8-2 ports 3, 5 port 1/8 1 port 16 16 1/8-2 ports 3, 5 port 1/8 1 port 5

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01 Side-ported 1/8 Side-ported 1/4 Specifications Piping specifications Weight (kg) Model Port size for 1(P), 2(B), 4(A) Port size for 3(R2), 5(R1) Piping direction VS1-01-A01 VS1-01-A02 VS1-02-A01 1/8 Horizontal 0.14 1/4 Horizontal 0.07 1/8 1 Solenoid Valve (with M Connector) Comforming to ISO 15407-1 Series EVS1-01/1-02 Models Series EVS1-01 Flow rate characteristics 14, 2 (PA, B) 4, 25

02-cxsj-e

Grease pack part no.: GR-S-010 (10 g) 147

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Standard strokes (mm) Bore sizes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 50, 63 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Example) For CQ2XB40-57D, an 18mm spacer is installed inside a standard stroke CQ2XB40-75D cylinder. Specific Product Precautions Be sure to read before handling. Refer to pages 15 to 24 for safety instructions and precautions.

Regulator for 2 MPa ARX 20

Piston assembly Valve Valve spring No. 4 5 6 1348104A 1348105 1348109 SUP OUT 2 ARX 20 Dimensions Panel cutout dimensions 26 R2.5 SUP OUT SMC K C O P A A L U S H 12 37 54 25 1.6 (max. thickness 4.5) 44 79.5 (when regulating pressure = 82) 5.4 10 31.5 OUT OUT 35 Options Bracket Panel nut Material 1348110A POM, NBR (gasket) Material 1348112 SPCC (black zinc chromated) Part No. Part No.

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

Thermo-chiller

/CH2: 20 to 40 Cooling capacity2 [kW] 9 18 19 18 26 18 Heating capacity3 [kW] 1.5 1 4.5 1 6.5 1 Temperature stability4 [C] CH1: 0.1/CH2: 0.5 Rated ow (Outlet) [L/min] 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum ow rate [L/min] 120 16 130 16 180 16 Maximum pump head [m] 50 49 55 49 68 49 Settable pressure range5 [MPa] 0.10 to 0.50 0.10 to 0.49

08-cm2k-e

Contents Bore size (mm) CM2K20-PS CM2K25-PS CM2K32-PS CM2K40-PS 20 25 32 40 CM2K20-PS CM2K25-PS CM2K32-PS CM2K40-PS NBR Rod seal @3 Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-010 (10 g) 13 A

01-mxq-e

MXQ6P-PS 6 8 12 16 20 25 MXQ6P-PS MXQ8P-PS MXQ12P-PS MXQ16P-PS MXQ20P-PS MXQ25P-PS Set of left nos. !8, !9, @0, $1, $2, $3, $4 MXQ8P-PS MXQ12P-PS MXQ16P-PS Set of left nos. !8, !9, @0, $1, $2, $3 MXQ20P-PS MXQ25P-PS Replacement Parts: Grease Pack Grease pack part no. Applied section GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide Cylinder 118

06-mu-e

Grease pack part no.: GR-S-010 (10 g) 87

Magnet: None, Mounting: Basic, Bore Size: 160mm, Thread: Rc, Stroke 1: 25mm, Rod Boot 1: None, Stroke Adjustment: None, +: +, Stroke 2: 25mm, Rod Boot 2: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Stroke Options: Dual Stroke, Single Rod Type