DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

FGD-C

FGDA(1 ) FGDB(2 ) 50mm Rc Rc 9/11 FGX-OM-L007-C 5. 1 1) 50mm 2) 0.02MPa 0.02MPa 3) 2 1) 2) 6. ,0.1MPa, 11 1) 2) oC 40 3) IN OUT 4) 5) 6) 7) *2 250mm 8) 21 1) 6 1 2) 3) 2 250mm * * 4) 5) *:FGDT/F 25NmFGDC/E 15Nm 10/11 FGX-OM-L007-C 3 1) 2) 7. 1 2 1 11/11 FGX-OM-L007-C Revision history A P6. 10 1 B P5. P6.1-2. P7.

MONOSASHI-KUN WITH BRAKE CONTROLLER

Adjustment of Air Balance 11. Error Messages & Countermeasures 46 11-1. Controller 11-2. Brake Units Life Span 12. Appendix 50 12-1. Data Sheet Specifications are subject to change without prior notice CE2/CEU2 MONOSASHI-KUN WITH BRAKE/CONTROLLER Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

LEC-OM038xx

LED display.32 10. 1 LED display.32 10. 2 Controller IF communication status and LED display.33 11. Mode.34 11. 1 Outline.34 11. 2. Step data input mode .34 11. 3. Numerical data input mode.34 11. 4. Data writing mode.36 12.

Vacuum Unit Ejector / Vacuum Pump System

Note 10) Select C, C1 for (6) Wiring Combinations for the single unit model. (5) Options Note 11) Symbol Type Nil Without option B With DIN rail mounting bracket Note 12) D With common release pressure supply (PD) port Note 13) L Manifold individual supply specification Note 14) Note 11) When more than one option is selected, list the option symbols in an alphabetical order.

Digital Flow Switch (Remote type sensor unit)

Width across flats of attachment 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41 mm 11/4 54 mm 11/2 54 mm Tighten to the specified torque for piping. The tightening torque for connection threads is shown in the table below.

Pressure Gauge Guide

The installation torque is 0.3 to 0.5 Nm. 14-11-15

Vacuum Manifold for fieldbus system

Supply valve chatters Deformation of the check valve Refer to (11) -34No. ZKJ-OM00201-D Countermeasure No.

IDX-OM-U010

Option T . 11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 OPERATION / ERROR SIGNAL OUTPUT . 11-1 11.3 REMOTE OPERATION . 11-2 11.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 11-3 11.5 ELECTRIC CIRCUIT . 11-4 Chapter 12 Option V . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 SPECIFICATIONS . 12-1 12.3 MAINTENANCE . 12-2 Chapter 13 Inspection record . 13-1 13.1 INSPECTION RECORD .

Hygienic Design Cylinder/Basic Type

0 11 o !0 11 o !0 11 o !0 11 Rod seal Rod seal Rod seal Rod seal NBR NBR NBR NBR (FKM can be selected.) (FKM can be selected.) (FKM can be selected.) (FKM can be selected.) o !0 11 o !0 11 Rod seal Rod seal NBR (FKM can be selected.)

One-touch Fittings Series KQ2

D1 D2 L1 L2 M A 5 32 3 16 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 KQ2L01-03 KQ2L01-05 KQ2L03-05 KQ2L03-07 KQ2L05-07 KQ2L05-09 KQ2L07-09 KQ2L07-11 KQ2L09-11 KQ2L09-13 KQ2L11-13 9.6 7 10 10 8 3 7 6 3 8 11 12 17 17 30 25 17 17.5 25 13.5 2.2 2.5 3 2.5 1 8 15.5 33 33.5 26 34.5 35.5 36.5 37.5 40.5 41.5 43 21.5 22.5 14.5 23.5 23 24.5 23.5 5 32 16 18 10.4 3 16 3.5 16.5 19.5 10 11.4 1 4 4.6 17 20.5

Compact Cylinder with Air Cushion and Lock Series RLQ

YU-03 T1 B 2-D through 2-O counterbore (mm) Bore size (mm) B D E J M O Part No. 12 7 25 9 34 11.5 depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5 depth 8.5 YB-05 50, 63 Joint Weight (g) Bore size (mm) T1 RS T2 V W Part No. K ( across flats) H (With locking) 80 9 6.5 10 18 50 YB-03 32, 40 120 11 6.5 12 22 60 YB-05 50, 63 d2 d1 L UT C UA (mm) UA C d1 d2 H k L UT Weight (g) 25 Part No.

HRX-OM-W004

SW screen TYPE Contact input signal 2 operation D.IN2 No.11 Setting input operation of contact input signal 2.

05-hyq-e

0 11 o !0 11 o !0 11 o !0 11 Rod seal Rod seal Rod seal Rod seal NBR NBR NBR NBR (FKM can be selected.) (FKM can be selected.) (FKM can be selected.) (FKM can be selected.) o !0 11 o !0 11 Rod seal Rod seal NBR (FKM can be selected.)

CEx-OMQ0013

No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

LEC-OM034xx

LED display.34 10. 1 LED display.34 10. 2 Controller IF communication status and LED display.35 11. Mode.36 11. 1 Outline.36 11. 2. Step data input mode .36 11. 3. Numerical data input mode.36 11. 4. Data writing mode.38 12.

CUJ

Table 2 Applicable auto switch models Refer to pages 11 to 14 for detailed specifications.

KP/KPQ/KPG

20 12 11 21 15 23 30 40 40 65 D 11 4 4 4 18 10.4 10.4 14 13 M 6 10 10 19.5 12.8 12.8 14 8 A L 4.2 8 17 15.2 18 26 21.5 15.2 (R) 10 19 18.5 29 41 24 18.5 Connection threads H 12 22 20.9 46 58 25 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Speed Controller with

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.