x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]

x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]

x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]

x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]

Slit Valve

width (mm) 32 x 222 46 x 236 50 x 336 Applicable wafer size Symbol 32 Note) Height 200 mm 46236 50336 300 mm Note) Neither cassette type Half MESK nor cassette type Full MESK are set.

CC

C J G5-S Air-hydro Converter: CCT40 CV MVGQ 50 M32 x 2 Lube-plug CC Rc 1/4 Air port size RB J D-X 20Rc 1/4 Oil port size Data L Dimension (Effective oil level stroke) (mm) Effective oil level stroke (mm) 50 100 150 200 300 L 213.5 263.5 313.5 363.5 463.5 10-17-9 10 Valve Unit Series CCVS/CCVL How to Order CCV S 1 1 1 U1 Suffix S Single valve Valve unit size Unit for CC63 (Unit mounted to

Speed Controller with

n + L17 x 2 L8 x n + L16 x 2 L8 x n + L25 x 2 L8 L8 Note 1) Refer to page 3 for L8.

HRX-OM-X071

Sensitivity (High pump head Rated current voltage x size of leak current [Optional]) (A) [mA] 3 cores x12AWG 1-phase (3 cores x HRR050-A/W-2020 200-230V AC 3.5mm2) (50/60Hz) (including ground) 30 4 cores 3-phase x14AWG 380-415V AC(50/60Hz) (4 cores x HRR050-A/W-4010 2.0mm2) 460-480V AC(60Hz) (including ground) Installation/operation in accordance with the UL standard For operate the product

Series 10-MGF Guide table ø40, ø63, ø100

M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) 170 140 10 10 38 38 36.5 E B F KC GB D A 11 11 8.7 120 X T V M6 M6 M5 18.5 KA KB 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C 1/4 1/4 1/8 40 P 100 63 30, 50,75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 7.5 200 160 20 20 11.5 11.5 9.5 96 Guide table10-MGF Air cylinder Rotary actuator Air

Oval pad with adapter, Vertical vacuum inlet direction, Pad size: 3.5 x 7, 4 x 10, 5 x 10, 6 x 10, 4 x 20, 5 x 20, 6 x 20, 8 x 20, 4 x 30, 5 x 30, 6 x 30, 8 x 30, Pad material: NBR, silicone rubber, urethane rubber, FKM, conductive NBR, conductive silicone rubber, M5 x 0.8 vacuum inlet VACUUM PAD, ZP, ZP2, ZP3. OVAL CUP WITH BUFFER. 39.11000 lb. M30.

Oval pad with adapter, Vertical vacuum inlet direction, Pad size: 3.5 x 7, 4 x 10, 5 x 10, 6 x 10, 4 x 20, 5 x 20, 6 x 20, 8 x 20, 4 x 30, 5 x 30, 6 x 30, 8 x 30, Pad material: NBR, silicone rubber, urethane rubber, FKM, conductive NBR, conductive silicone rubber, M5 x 0.8 vacuum inlet VACUUM PAD, ZP, ZP2, ZP3. OVAL CUP WITH BUFFER. 28.34000 lb. M30.

Oval pad with adapter, Vertical vacuum inlet direction, Pad size: 3.5 x 7, 4 x 10, 5 x 10, 6 x 10, 4 x 20, 5 x 20, 6 x 20, 8 x 20, 4 x 30, 5 x 30, 6 x 30, 8 x 30, Pad material: NBR, silicone rubber, urethane rubber, FKM, conductive NBR, conductive silicone rubber, M5 x 0.8 vacuum inlet VACUUM PAD, ZP, ZP2, ZP3. OVAL CUP WITH BUFFER. 40.11000 lb. M30.

Compressed Air Preparation Filter

x P (Port size) R V C Q OUT IN B Maintenance space A G 15 Compressed Air Preparation Filter AFF/AM/AMD Series Dimensions Optional specifications Semi-standard With auto drain PC/PA bowl1 Stainless steel bowl2 Metal bowl1 Applicable model AFF/AM/AMD AMK Modular Connection Example Drain cock with barb fitting With drain guide With drain cock With drain guide B B B B AFF/AM/AMD20 1/8 M5 x 0.8

Oval pad with adapter, Vertical vacuum inlet direction, Pad size: 3.5 x 7, 4 x 10, 5 x 10, 6 x 10, 4 x 20, 5 x 20, 6 x 20, 8 x 20, 4 x 30, 5 x 30, 6 x 30, 8 x 30, Pad material: NBR, silicone rubber, urethane rubber, FKM, conductive NBR, conductive silicone rubber, M5 x 0.8 vacuum inlet VACUUM PAD, ZP, ZP2, ZP3. OVAL CUP WITH BUFFER. 28.43000 lb. M30.

HRX-OM-S004

to 230VAC HRS150-W-20R8-5 40 (4 cores x 8mm2) (60Hz) *including ground HRS100-A-40HRS100-W-403phase 380 to 415VAC 30 M5 HRS150-A-40(50/60Hz) HRS150-W-404 cores x AWG10 3phase HRS100-A-4620 R5.5-5 (4 cores x 5.5mm2) HRS100-W-46380 to 415VAC *including ground (50/60Hz) 3phase HRS150-A-46460 to 480VAC HRS150-W-46(60Hz) *1: A specified earth leakage breaker is installed for option B [Earth leakage

HRX-OM-X084

Rated Sensitivity Rated current voltage x size voltage of leak (A) [V] current [mA] 1-phase 100, HRR010-A/W-10100V AC(50/60Hz) 115 15 115V AC(60Hz) 3 cores x 14AWG (3 cores x 30 2.0mm2) (including 1-phase ground) 200, HRR010-A/W-20230 10 200-230V AC (50/60Hz) Installation/operation in accordance with the UL standard For the product operation in the UL compliant conditions, the conditions

Oval pad with adapter, Vertical vacuum inlet direction, Pad size: 3.5 x 7, 4 x 10, 5 x 10, 6 x 10, 4 x 20, 5 x 20, 6 x 20, 8 x 20, 4 x 30, 5 x 30, 6 x 30, 8 x 30, Pad material: NBR, silicone rubber, urethane rubber, FKM, conductive NBR, conductive silicone rubber, M5 x 0.8 vacuum inlet, Oval Pad with Buffer, VACUUM PAD, ZP, ZP2, ZP3, 29.92 lb

Oval pad with adapter, Vertical vacuum inlet direction, Pad size: 3.5 x 7, 4 x 10, 5 x 10, 6 x 10, 4 x 20, 5 x 20, 6 x 20, 8 x 20, 4 x 30, 5 x 30, 6 x 30, 8 x 30, Pad material: NBR, silicone rubber, urethane rubber, FKM, conductive NBR, conductive silicone rubber, M5 x 0.8 vacuum inlet, Oval Pad with Adapter, VACUUM PAD, ZP, ZP2, ZP3, 0.00000 lb

Oval pad with adapter, Vertical vacuum inlet direction, Pad size: 3.5 x 7, 4 x 10, 5 x 10, 6 x 10, 4 x 20, 5 x 20, 6 x 20, 8 x 20, 4 x 30, 5 x 30, 6 x 30, 8 x 30, Pad material: NBR, silicone rubber, urethane rubber, FKM, conductive NBR, conductive silicone rubber, M5 x 0.8 vacuum inlet, Oval Pad with Adapter, VACUUM PAD, ZP, ZP2, ZP3

Oval pad with adapter, Vertical vacuum inlet direction, Pad size: 3.5 x 7, 4 x 10, 5 x 10, 6 x 10, 4 x 20, 5 x 20, 6 x 20, 8 x 20, 4 x 30, 5 x 30, 6 x 30, 8 x 30, Pad material: NBR, silicone rubber, urethane rubber, FKM, conductive NBR, conductive silicone rubber, M5 x 0.8 vacuum inlet, Oval Pad with Buffer, VACUUM PAD, ZP, ZP2, ZP3