MXH

7 w q!9 t !8 i !0 @0 @0 y @1 !6 w q !9 t !8 !0 i Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !1 r !4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !

Intrinsically Safe Valve

(g) n: Stations W = 100n + 151 W = 79n + 127 W = 61n + 101 Note 1) For 10 stations or more (5 stations or more for the 53-SS5Y7), supply pressure to P port on both sides and exhaust from EA/EB port on both sides.

MU

Snap ring Type C 8 for axis Type C 10 for axis Type C 10 for axis Type C 14 for axis m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part no.

MU

Snap ring Type C 8 for axis Type C 10 for axis Type C 10 for axis Type C 14 for axis m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part no.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

KA KQG2 KG KFG2 Model M-3AUM-3N M-3P M-3ALUM-3UL M-3UT M-5ANM-5AUM-5HM-5J M-5N M-5UN M-5P M-5ALN-6 M-5ALU-6 M-5ALHN-6 M-5ALHU-6 M-5HLM-5HLHM-5ALN-4 M-5ALU-3,4 M-5ALHN-4 M-5ALHU-3,4 M-5UL M-5UT Thread Number of tightening rotations Approx. 1/4 rotations MS M3 KKA Approx. 1/2 rotations KP LQ Approx. 1/6 to 1/4 rotations Note) MQR T M5 IDK Approx. 1/2 rotations Note) Note) As a guideline, the

Return Filter

level of risk which, if not avoided, could result w level of risk which, if not avoided, could result w level of risk which, if not avoided, could result w level of risk which, if not avoided, could result Caution in minor or moderate injury. in minor or moderate injury.

Solid State Auto Switches

Manufacture of 3 m and 5 m types is also possible. Please consult SMC for these types.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

Vacuum Unit Series ZK2

Note 15) Standard lead wire length for pressure sensor is 3 m. Standard lead wire length with connector for switch for vacuum and the lead wire length for switch with energy saving function is 2 m. Note 16) Select C, L, L1, Y when the pressure sensor (P, T) is selected for t Pressure Sensor/Digital Pressure Switch for Vacuum Specifications.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

t l t t RR1 m m m m d Dd9 d Dd9 0.1 0.3 NX +0.2 0 A1 U1 L 7 12 Material: Pin and snap ring both SUS304 Material: SUS304 Material: Pin and snap ring both SUS304 Part no.

Series KV2 Fittings

m m m p p p p m m m m m m m p p p p p p p p m m m m m M m M m R p m p p p m m m M m R m p R M p m p p m p m p M m m m m M m p p M m M p p m m m m p m M M m R m m m p m m p m m p p m p m p m p m m R p m m p m p m m M M m m m m p m m p M m p m p m m m m p m M p p m m R p p p p p p p p R p p p m m p m m R p m p m p m m p M p m m m m p p m p p m p m m p R m p p p R m p p p R p p m m p m m p p

Low-Speed Compact Rotary Actuator Rack & Pinion Type CRQ2X Series Size: 10, 15, 20, 30, 40

Symbol Specifications/Content Applicable shaft type Shaft type variation X,Y,Z,T,J,K S,W XA1 to XA24 Shaft pattern sequencing I X,Y,Z,T,J,K XA31 to XA59 XC7 Shaft pattern sequencing II Weight S,W,X,T,J Reversed shaft XC8 to XC11 Change of rotating range (g) Change of angle adjustable range (0 to 100)" Size Standard weight XC12 to XC15 90 180 S,W,Y Change of angle adjustable range (90 to

PFxx-OMA1007

T Temperature characteristics Indicates the change in the display value caused by ambient temperature changes. U A function to select display units other than the international unit (SI unit) specified in the new Japanese measurement law. The product is not equipped with this function. Units selection function W Wetted part A part that comes into physical contact with the fluid.

Peltier-type Chiller Thermo-con/ Compact Type

Water bath Q = T x V x x C h x 60 x 1000 10 x 2 x 1 x 103 x 4.2 x 103 20C V = 15 x 60 x 1000 After 15 min, = 93.3 W cool 30C down to 20C.

IDX-OM-W095

11 T T 11.1 11.2 AC240V / DC24V 5A() / 2A() DC20V 3mA IDFC60/70/80/90 Series 11-1 IDX-OM-W095 T 11.3 AC230V ON A(4-5) B6-7 A4-5A B6-7B 3 5 /() OFF 3 OFF6.2 IDFC60/70/80/90 Series 11-2 IDX-OM-W095 T 11.4 M3.5 1.01.3Nm M4.0 1.42.0Nm 6 5 4 1 2 3 PE N L 7 L,N PE B A IDFC60-23-TIDFC70-23-T IDFC80-23-TIDFC90-23-T M3.5 8.5mm M4.0 9.5mm [3.2.5 ] IDFC60/70/80/90 Series

CY1F

m P 0.1 x mcos + msin P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m mv P Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 29) 1 Review of operating conditions Determination of load factor () = Load mass (m) Maximum allowable load (m max) + Static moment (M) Allowable static moment (Mmax)+ Dynamic moment (ME) Allowable dynamic moment

Escapements Series MIW/MIS

4 w i !7 q y r !3 !2 t o w e !0 !5 !6 25, 32 Option @4 @1 @3 @0 !9 @2 Scraper Stroke adjuster u w !1 !8 (32 only) Description Material Note Component parts Description Material Note No. No.

Ejector Valve Unit Series ZYY/ZYX 1

plug connector: M, MN, MO ZF 0.5 W (With indicator light: 0.6 W): Series ZYY3000 Power consumption ZP 0.6 W (With indicator light: 0.65 W): Series ZYX3000 Effective area (Cv factor) 4.68 mm2 (0.26) ZCU Series ZYX3000 AMJ Misc. 13-8-7 8 Series ZYY/ZYX Electronic Vacuum Pressure Switch Specifications ZSE1-00-14 ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSE1-00-55 Model -X129 (-

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

PF-OMN0009_C

P a ] [ M P a ] PF3W540 PF3W511() [ M P a ] [ M P a ] PF3W521() [ M P a ] -33No.PF-OMN0009CN-F PF3W511(PVC ) PF3W521(PVC ) [ M P a ] [ M P a ] -34No.PF-OMN0009CN-F PF3W504/520/540 PF3W504S/520S/540S [MPa] [MPa] [ M P a ] [ M P a ] a] [MP a] [MP PF3W511() PF3W521() PF3W511/521(PVC ) [MPa] [ M P a ] [ M P a ] a] [MP [MPa] a] [MP -35No.PF-OMN0009CN-F IN 3F.S.8 cm (100 L/min 11