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In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 17 No.VQZ100V-OMK0002-B S Record of changes A Renewal MY B Safety Instructions oY 1st printing : KV 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and

(Normally open) 1 2 Note) B Option Note) Latching manual override: push-locking type only.

(Normally open) 1 2 Note) B Option Note) Latching manual override: push-locking type only.

(Normally open) 1 2 Note) B Option Note) Latching manual override: push-locking type only.

N.O. 9 VFR5000-OMN0001 VFR5000 Series/ DIN / 01T DIN 180 (A B AB ) COM ARBF5050 A B P 1.0MPa 1) 1.25-3.5M1.25Y-3L1.25-3M VFR5000 A-B+B+COM -COM AB+ B0.1~0.83MPa 2) VFR5100 A COM 5~60 () 3) VFR5200 A COM B Rc1/8 3 (kg) 0.83 A COM B VFR5 400 PA 44 38 32 (mm2) P1=0.7MPa;P2=0.5MPa S PB 38 40 31 5 AEA 90 (mm2) P2=0.5MPa S AEB 77 1) 0.9MPa 2) 3) .50 4) 2 5) P A B ARBF5000 ARBF5000

JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993:*2) 1. 2. 3. 1. 2. 3. 4. 3 *3) 1 1.5 3) 1 1 () 4 1 1-1 MXQ6 MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 1) 2) ( ) 3) 4) / / 2 ,3 ) 2 2 ,3 ) 1) 1 2) 20 ,0.150.6MPa 3) MXQ25(A)-150,MXQ6B-50,75MXQ8B-75,100MXQ16B-100,150MXQ20B-125,150 300mm/s 4) MXQ**B 50200mm/S 1 (MPa) MXQ8(A,C) 0.3 MXQ8B 0.3 MXQ12(A,C) 0.3 MXQ12B 0.3 MXQ16(A) 0.2

AF-OMX0052-C PRODUCT NAME Air Filter MODEL / Series / Product Number AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D AF50-(F,N)06(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF60-(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2.

The pressure difference generated at this time opens check valve and the residual pressure on the A port side is quickly exhausted from R port. 2 1(P) OFF 2(A) 1 3(R) 3 Soft Start-up Valve AV2000/3000/4000/5000 Construction B ON OFF B-B 1(P) 2(A) B 3(R) Parts list No. 1 2 3 Description Material Body Cap Cover ADC ADC ADC Replacement parts Description No. Part no.

Terminal block 5 External sensor: Terminal B of resistance temperature detector 6 External sensor: Terminal B of resistance temperature detector 7 FG D A Pin No. Signal contents A short pin is installed between No. 1 and No. 2 pins to short-circuit it (Remote ON) when shipped.

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMH850 1 2 13 42 348 220 57.5 220 10 Please refer to Made to Order Specifications of Series AMH on pages 14-20-55 to 14-20-57. 14-20-35

AF-OMX0053-B PRODUCT NAME Mist Separator MODEL / Series / Product Number AFM20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AFM30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2. Application 8 3. Standard Specifications 8 4. How to Order 9 5.

A B C D E F G S 6 11/2 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMD850 13 42 348 220 57.5 220 10 AMD850SAM, #7 4.6-12 Series AMD Precautions Dimensions: AMD801/901/800/900/1000 AMD801/901 Be sure to read before handling.

AF-OMX0054-B PRODUCT NAME Micro Mist Separator MODEL / Series / Product Number AFD20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AFD30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFD40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFD40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2. Application 8 3. Standard Specifications 8 4. How to Order 9 5.

DIN DIN DIN DIN DIN D 68mm Y 4.57mm T 68mm E 2.32.8mm E, T 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S D,Y R Y Z EZTZDZLZMZ AC24V (+) D C S VF1000 VF1000 VF1000 VF1000 VF3000 VF3000 VF3000 VF3000 VF5000 VF5000 VF5000 VF5000 () P P(SUP) P A B A(CYL2) B(CYL1) A B EA EB R1(EXH2) R2(EXH1) R1 R2 (B)2 4(A) (B)2 4(A) (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 3(R2) 1(P) 5(R1) JIS () Z (B)2 (A)4 1:P

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7

550 3 4 650 1 850 11 2 1 4 3 8 04 1 2 06 10 14 None B With bracket Port size (Dimension B) 01 B 1 8 02 03 B B Thread B Rc(PT) F G(PF) N NPT 3 4 1B B Note) Refer to p.4.7-7 regarding How to Order of case assembly. 1 1 2 20 2B B AMF800 to AMF1000 (Standing style) AMF801/901 (Piping support style) 20 80 AMF 0 20 80 AMF 1 Body size Body size 80 90 80 90 Port size Port size 100 With bracket

Switch operating position (ON) Hysteresis Switch reset position (OFF) Unit: mm Auto switch model Air gripper D-Y7 W N B D-Y59A B D-Y69A B D-Y7 WV N B D-Y7BA 0.8 0.6 0.7 0.5 MHL2-10Dl Note)Use a watchmakers screwdriver with a grip diameter of 5 to 6mm to tighten the auto switch set screw. Use a tightening torque of 0.05 to 0.1 Nm.

AL-OMX0056-A PRODUCT NAME Lubricator MODEL / Series / Product Number AL20-(F,N)01(F,N)02(B)(-2,3,6,C,R,Z)-D AL30-(F,N)02(F,N)03(B)(-2,3,6,8,R,W,Z)-D AL40-(F,N)02(F,N)04(B)(-2,3,6,8,R,W,Z)-D AL40-(F,N)06(B)(-2,3,6,8,R,W,Z)-D AL50-(F,N)06(F,N)10(B)(-2,3,6,8,R,W,Z)-D AL60-(F,N)10(B)(-2,3,6,8,R,W,Z)-D Contents Page 1. Safety Instructions 2-6 2. Application 7 3. Standard Specifications 7 4.