lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

Slit Valve

10 O-ring: FKM Internal leak Note 2) (Pam3/s) O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s) FKM,

O

Lock keys ( ref er t o P11) M i ni m um pressure ( F_1) adj ust i ng range M axi m um pressure ( F_2) adj ust i ng range 100% 100% 50% 0% 10% 0% 20m A 20m A 5V 10V 20m A 20m A 5V 10V 4 0 0 0 12 10 2. 5 5 4 0 0 0 12 10 2. 5 5 ( N ot e 1) : F_1 i s adj ust abl e i n a range f rom 0 t o 50% of t he rat ed val ue. ( N ot e 2) : F_2 i s adj ust abl e i n a range f rom 10 t o 100% of t he rat ed

O

Lock keys ( ref er t o P11) M i ni m um pressure ( F_1) adj ust i ng range M axi m um pressure ( F_2) adj ust i ng range 100% 100% 50% 0% 10% 0% 20m A 20m A 5V 10V 20m A 20m A 5V 10V 4 0 0 0 12 10 2. 5 5 4 0 0 0 12 10 2. 5 5 ( N ot e 1) : F_1 i s adj ust abl e i n a range f rom 0 t o 50% of t he rat ed val ue. ( N ot e 2) : F_2 i s adj ust abl e i n a range f rom 10 t o 100% of t he rat ed

IP80-OM00019

No.IP80-OM00019-B / / * 3-4 5 1. 5 2. 6-7 2-1 IP8000 6 2-2 IP8100 7 3. 8-9 3-1 IP8000 8 3-2 IP8100 9 4. 10-12 5. 13 5-1 13 5-2 13 6. 14 7. 15-17 7-1 16 7-2 17 7-3 17 8. 18 9. 18-20 10. 20-22 11. 23-25 11-1 23 11-2 IP8100 23 11-3 IP8000 24 11-4 24 11-5 25 12. 26 13. 27-33 2 A (ISO/IEC)(JIS)*1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic

PA300/500/700

N.O. 101.2 kPa to 0.2 VPA344 544 744 Pilot pressure (MPa) Ambient and fluid temperature (C) Lubrication Mounting orientation Impact/Vibration resistance (m/s2) Note) Same as operating pressure (Min. 0.2 MPa) 10 to 50C (No freezing. Refer to page 5-11-4.) Not required (Use turbine oil Class 1 lSO VG32, if lubricated.)

VG342

(Normally open) B 4 VP 5 6 24 VDC 12 VDC Thread type VG Rc Nil G F 7 240 VAC, 50/60 Hz 9 Other VP NPT N Option NPTF T Electrical entry S070 G Grommet D DIN terminal Port size VQ 04 06 10 1 2 Rc T Conduit terminal E Grommet terminal 3 4 Rc Rc 1 VKF Light/Surge voltage suppressor VQZ Nil None S With surge voltage suppressor (Only grommet type is only available.)

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Solenoid Specifications 100, 200 VAC, 50/60 Hz; 24 VDC Coil rated voltage How to Calculate the Flow Rate 15 to +10% of rated voltage Allowable voltage fluctuation For obtaining the flow rate, refer to page 31-10.

Air Cylinder CP Series Cylinder Positioner Assembly

BORE B D GA'GA K MM N P x LD LH H zz h 1 3 8 (35) 2.76 2.05 t52l 0 7 9 l:20) 1.57 1.39 (10) 0.67 M8x1.25 J.2A t7l M18rl 5 1 . 1 4 3 5 4 l90l 1.06 lz7) 1 5 1 o3) 3 5 4 ls0J 2.24 (58) 1188) 2.05 (52) '11.21 2.60 (66) s T o 7 7 2 (196) 1 3 8 (35) 3.35 (85) 2.52 079 (20) 1 5 7 1.39 (10) 0.67 M10x1.25 i.2a l7l M18x1 5 1.22 (31) 3 8 6 l93l 1.34 (341 1.63 (16) 0.45 1 1 1 . 5 ) 1 9 7 t50l 6 5 4 t1661

ITV-E

Lock keys ( ref er t o P11) M i ni m um pressure ( F_1) adj ust i ng range M axi m um pressure ( F_2) adj ust i ng range 100% 100% 50% 0% 10% 0% 20m A 20m A 5V 10V 20m A 20m A 5V 10V 4 0 0 0 12 10 2. 5 5 4 0 0 0 12 10 2. 5 5 ( N ot e 1) : F_1 i s adj ust abl e i n a range f rom 0 t o 50% of t he rat ed val ue. ( N ot e 2) : F_2 i s adj ust abl e i n a range f rom 10 t o 100% of t he rat ed

ZSE3/ISE3

22.6 5.75 Vacuum supply port 2-3.3 Mounting hole Vacuum pad connection port 0X: M5 x 0.8 0XY: M6 x 1.0 0X: M5 x 0.8 0XY: M6 x 1.0 Connector type ZSE3-0X-C 7 50.6 Vacuum supply port Vacuum pad connection port 20.5 RESET button DOWN button Pneumatic circuit SET button UP button Lead wire length 600 50 (3000) 10 58 PV 18 10.2 8 6.5 10.25 10 22.6 5.75 Vacuum pad connection port Vacuum supply

Air Suction Filter Series ZFA 1

Case Replacement Parts q Gasket for cover case AL-204H AL-205H ZFA100 Part no. ZFA200 No. Description Selection Warning 1.

10% of rated voltageClass B1.5 W(0.06 A)2.5 W(0.1 A)1 W50 dB

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

Electroless nickel plated q w e r t y u i o !0 !1 !2 !3 !4 !5 !

I

._ I 10, 22o, 12, 24, 48' 24ov sodoHz DC -24,6,12, 48, 100, 1 10v Voltag6 allowance 15.' + 10% of rated voltage lrcUlailon-Class B or equivalent Power consumptim AC Inrush-5.6VA(soHz)' 5.0VA(6OHZ) Hotdino-3.4VA(5OHz), 2.3VA(6OHz) DC_ 1.8W/2W (With LED) Indicator light Surg voltage supp(Gsor circuil AC ZNR (Varistor) ,Neon lamp (LED 10OV or le6s) DCDiode.

VQ1000V-OMV0001

B A, B A VQ1000 : 0.250.35Nm VQ2000 : 0.50.7Nm 3.2 4.2 A B VQ1000 VQ2000 90 3.2 4.2 VQ1000 VQ2000 90 VQ1000 VQ2000 No.VQ1000V-OMV0001 8 - VQ1000 Series VQ1000 Series VQ1000 Series VQ1000 Series/ / / / 3,4,5 3,4,5 3,4,5 3,4,5 / / / / M M M M-03 03 03 03-3 3 3 3 IP65 IP65 IP65 IP65 IP65 IP65 Assy )O )M5 Assy (0.81.2Nm) )10 Assy VQ1000 VQ2000 Assy VVQ1000-82A-1 VVQ2000-82A-1 10

10-SYJ3000

4/5 Port Solenoid Valve 10-SYJ3000 How to Order Note) CE-compliant: For DC only.

AR425 to 935

AR45 AR65 AR85 AR95 Description Model VBA Bracket Pressure gauge with limit indicator (1) B24P B25P G46-10-02 (Max. 1.0 MPa), G46-2-02 (Max. 0.2 MPa) VE Note 1) In the gauge part no. (e.g. G46-10-02), indicate kind of the connecting thread. Put nothing for Rc and N for NPT thread. Please consult with SMC for NPT pressure gauge.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Assembly example qResidual pressure relief 3 port solenoid valve VP517Y-5DZ1 1 pc. wAir combination AC30C-03DG 1 pc. eSpacer with bracket Y300T-A1 pc. tPiping adapter *1 *2 rSpacer Y300-A1 pc. tPiping adapter E300-03-A1 pc. q Residual pressure relief 3 port solenoid valve Applicable Combinations/Attachment Part Nos.

VXH

(mm) Port size Weight (g) Max.system pressure (MPa) Note) VXD Water Air Oil 3 1 4 3 8 1 2 2.0 2.3 2.3 2.0 550 550 630 0.35 0.30 0.30 10 0.05 2.0 2.0 1.5 1.6 2.0 2.0 8.5 9.5 9.5 1.9 2.4 2.4 VXZ VXS Note) Weight of grommet type. Add 10 g for conduit type, 30 g for DIN terminal, 60 g for conduit terminal type respectively.