CP95

6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13 H13 0.5 0.5 32 22 10 14 15 30 5 32.5 10.5 6.6 45 10.5 5.5 40 38 12 25

70astamb1

60 M10 x 1.25 16 19 24 34 34 M10 x 1.25 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20 30 30 12 M14 x 1.5 M14 x 1.5 12.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 16.5 CS1 23.5 23.5 C76 Bracket Combinations C85 Bracket Combinations Available Refer to table together with combination drawings.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

60 1.

Compact 5-Port Solenoid Valve

Plug-in Common Dimensions Made to Order Manifold Exploded View Light A side: Orange B side: Green Light A side: Orange B side: Green Solenoid a Solenoid a Output circuit Solenoid b Solenoid b Surge voltage 24 V 0 V sol.1: Energized 60 V Changing Connector Entry Direction R Surge voltage Internal circuit 24 V 0 V Caution sol.2: De-energized 60 V R Surge

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Fittings & Tubing Air Cylinders Rotary Actuators SZ3 LOZ 1 60 10 C6 5 Rated voltage CE-compliant 5 24 VDC Nil Clean series CE-compliant Q Actuation type Made to Order Nil 2 position single solenoid Main valve fluororubber (Refer to page 411.)

HRX-OM-M090

Circulating fluid set temperature 20 oC READY band width (upper/lower temperature range) 2 oC READY time 60 sec. Preparation is completed 60 seconds after the circulating fluid temperature reaches 18oC to 22oC.

HRX-OM-Y098

fluid outlet 0.6 60 Pressure [MPa] 0.5 50 Lifting head [m] Usable flow rate range 0.4 40 0.3 30 Circulating fluid return 0.2 20 0.1 10 0 0 0 20 40 60 80 100 120 140 160 180 Circulating fluid flow[L/min] Fig. 8-11 Pump capacity(HRL300-A-20 CH1) 8.5.4 HRL-A-20CH2 0.6 60 0.5 50 Lifting head [m] Pressure [MPa] 0.4 40 Usable flow rate range Circulating fluid outlet 0.3 30 0.2 20 Chiller display

HRX-OM-X037

Fig. 9-22 Cooling Capacity (HRL100/200-W-40-T2 CH2) HRL Series 9.4 Cooling Capacity 9-19 HRX-OM-X037 Chapter 9 Documents 9.5 Pump Capacity 9.5.1 HRL100-A/W-40 CH1 0.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 Circulating fluid flow [L/min] Fig.

LEF-OM002xx

60 B A 50 H 50 W(kg) A/H W(kg) 40 40 30 30 20 20 10 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 LECPA V(mm/s) V(mm/s) LES40 Horizontal Transfer LES40 Vertical Transfer B 60 (2) Servo motor (24VDC) Ball screw drive 60 B A 50 H 50 A/H W(kg) W(kg) 40 40 30 30 20 20 10 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 V(mm/s) V(mm/s) LEFS16A LEFS25A Model Stroke [

CG1

CS1 Trunnion (mm) Stroke range Bore (mm) TV TT TS TR TH TF B TDe8 TE Front Rear 0.025 0.047 0.025 0.047 0.032 0.059 0.032 0.059 0.032 0.059 0.032 0.059 20 25 32 40 50 63 3.2 3.2 4.5 4.5 6 8 28 33 40 49 60 74 39 43 54.5 65.5 80 98 25 30 35 40 50 60 5.5 5.5 6.6 6.6 9 11 Up to 200 Up to 200 8 10 12 14 16 18 35.8 39.8 49.4 58.4 72.4 90.4 38 45.5 54 63.5 79 96 10 10 10 10 20 20 Up to 300 Up to

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

70 60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 80 80 Pressure 0.6 MPa 0.6 MPa Pressure 70 70 F F 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 60 60 50 50 0.4 MPa 0.4 MPa 40 40 0.3 MPa 0.3 MPa 30 30 0.2 MPa 0.2 MPa 20 20 10 10 0 10 30 50 0 10 30 50 70 90 90 70 Gripping point L (mm) Gripping point L (mm) 12-5-7 8 Series MHR2/MDHR2 Construction

AN

Model Model Model Port size R(PT) Effective area (mm2) Weight (g) Dimensions (mm) Weight Effective area Port size Model Dimensions (mm) R(PT) (mm2) (g) AN200-02 35 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233 74 60 820 263 86 70 A B D A B D 1 4 1 4 AN202-02 35 16 64 22 19 33 84 28 24 47 95 34 24 AN300-03 60 3 8 AN302-03 60 3 8 AN402-04 90 1 2 AN400

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

0.5MPa 0.5MPa 60 60 Holding force (N) Holding force (N) 50 50 0.4MPa 0.4MPa 40 40 0.3MPa 0.3MPa 30 30 0.2MPa 0.2MPa 20 20 10 10 0 10 30 50 0 10 30 50 70 90 90 70 Holding point L (mm) Holding point L (mm) 2.3-6 Series MHR2/MDHR2 Construction MHR2 !

VQ7-6/7-8

Hz 200 VAC, 50/60 Hz 24 VDC 12 VDC Other Nil SB None With 10 10 stations VF Note) When equipped with control unit, 1 or 2 stations are used for mounting.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Cylinder Series CQS OUT IN Double Acting Single or Double Rod Theoretical Force Operating pressure Piston area MPa 0.3 psi 43.5 MPa 0.5 psi 72.5 MPa 0.7 psi 101.5 Bore size Operation Rod diameter Theoretical Force (in 2) (mm 2) (inch) N lbf N lbf N lbf (mm) 25 84.8 0.131 IN 5.6 42 13.3 59 9.4 12 6 0.24 34 113 0.175 OUT 7.6 57 17.8 79 12.8 45 151 0.234 IN 10.1 75 23.8 106 16.9 16 8 0.31 60

High Power Cylinder Series RHC

80 35 32 63 55 0.074 0 250 to 1000 13 89 78 10 13 90 20 23 61 25 75 95 40 37 80 65 0.074 0 250 to 1000 16 110 80 10 13 95 20 25 63 30 90 116 40 37 100 80 0.074 Bore size (mm) ZZ Y 6.8 to 11.3 WH 335 X 10 P 30 S 1/2 NF 215 NE 24 ND 25 MM 27.7 M M18 x 1.5 LZ 7.5 LX 73 LY 53 LT 88.5 LS 10 LH 275 52 50 342 10 37 1/2 215 24 24.5 27.7 M18 x 1.5 7.5 80 60 95 10 289 55 63 371 8.5 to 13.5 13 40 3

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Refer to page 7 for the weight of DIN rails. 22 Cassette Type Manifold Series SZ3000 Manifold Exploded View Type 60 (non-plug-in) manifold U side DIN rail holding screw D side DIN rail holding screw Description No. Part no.

AC Servo Motor Driver (CC-Link Type)

Example using a 20[mm] Lead Actuator with target travel speed of 500[mm/sec] Rotations per second Travel distance per second Travel distance per rotation Rotation Speed (rpm) = {Speed (mm/s) Lead (mm) }60 (S) = {500 (mm/s) 20 (mm) }60 (s) =1500 (rpm) The rotation speed must be a value between 0 and the allowable actuator speed. The actuator will not operate if set to 0.

Vacuum Equipment

-60 kPa -50 kPa -40 kPa -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa Lifting force (N) Lifting force (N) How to read the graph Example: Workpiece weight 1 kg (Lifting force: 9.8 N) : Conditions/Number of pads: 5 pcs.

SY

Air temperature (C) 20 10 0 10 30 40 50 60 Correction coefficient 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 233 Series SY3000/5000/7000/9000 Specific Product Precautions 1 Be sure to read before handling. Refer to pages 230 through 233 for safety instructions and common precautions.