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(ASME B40.1 Grade B or better) psig/bar 4) (No code) Accuracy Cleanliness No oil ASME B40.1 level IV No oil Brass Polycarbonate Brass Phosphor bronze B Case Window Socket Bourdon tube Material MPa MPA 1.14 (29) 2.28 (58) 2.1 (53.5) 2.12 (54) NPT 1/4 0.42 (10.5) inch (mm) 3) Part number of pressure gauge itself.

B) In the state of A), attach the workpiece and the arm side block, and adjust the shim so that there is a space of about 0 mm. During this step, theoretically, there is no clamping force pressing down on the workpiece. C) In order to generate a clamping force from the state described in step B), insert an additional shim.

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A9 D-M9 22 (24.5) A 2.8 0.5 W B ( ): Dimensions for D-A93 Bore size (mm) D-A9 A B W 6 10 16 36 11.5 9.5 (7) D-M9 A B W 29.5 5.5 3.5 (1) 29.5 9.5 7.5 (5) 33.5 9.5 0.5 33.5 13.5 3.5 40 15.5 5.5 20 41 15 13 (10.5) 45 19 9 25 40.5 16.5 14.5 (12) 45.5 20.5 10.5 Note) The above mentioned values are indicated as a guide for auto switch

flats C G E H B NN Effective thread length T (R) NA Q N F NA I F N CC 0.1 + 12-CY3B50, 63 12-CY3B6 to 15 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20

Material NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR Piston seal Rod seal A Rod seal B Brake piston seal Intermediate cover gasket Cam gasket Cushion seal A Cushion seal B Valve seal A Valve seal B Valve retaining gasket Cylinder tube gasket #6 #7 #8 #9 $0 $1 $2 $3 $4 $5 $6 $7 Note) Please contact SMC if the fine lock unit must be disassembled. 9-2-33 Series CLG1 Accessory Bracket Dimensions

VHS One-handed operation Two-handed operation Clamping Press fitting with an air cylinder, Caulking Application Examples 1681 Two Hand Control Valve VR51 Series RoHS How to Order VR51 B C06 Option Two hand control valve Nil B None With bracket Silencer (Accessory) Connection piping size Flame resistant One-touch fitting C06 C07 Flame resistant One-touch fitting 6 Flame resistant One-touch

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

4 Bumper B Bumper B Bumper B Bumper B Resin Resin Resin Resin (Only 63 is common to the bumper A.) (Only 63 is common to the bumper A.) 13 !4 13 !4 Bumper B Bumper B Resin Resin (Only 63 is common to the bumper A.) HYQB20R-PS HYQB32R-PS HYQB20-PS HYQB25-PS 20 25 HYQB32-PS HYQB40-PS HYQB50-PS HYQB63-PS 32 40 50 63 Set of nos. above o, !0, !4.

20 30 40 Symbol Nil B* H* Symbol 02 03 04 *Note: Bracket and/or panel mount nut are not assembled and are supplied loose at time of shipment.

The port on the piston rod B side for 10-/12-, 21is plugged since unlike the vacuum, it is not necessary to exhaust from 2 ports.

20 30 40 Symbol Nil B* H* Symbol 02 03 04 *Note: Bracket and/or panel mount nut are not assembled and are supplied loose at time of shipment.

Construction Diaphragm Seat Body 1110 B Diaphragm Valve for Ultra High Purity Air operated type Series AZ3542 & 4542 Dimensions inch (mm) AZ3542 & 4542 Ports: 2PW (Welded) Ports: 2P (Machined) M5 x 0.8 Actuation port Actuation port M5 x 0.8 1.57 (40) 1.57 (40) FORGED BODY BAR STOCK BODY Note) 2.24 (57) 2.24 (57) 0.44 (11.2) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A

JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993: *2 : : : 1, 2 3 1 2 3 4 -3No.EX-OMN0035CN-A / 1 1.5 *3) *3) 1 1 () -4No.EX-OMN0035CN-A () () () () -5No.EX-OMN0035CN-A /, , () * UL UL1310 Class2 0V -6No.EX-OMN0035CN-A * IP67 / *() ,, SI SI SI * IP67 M12M8 () -7No.EX-OMN0035CN-A CE , * 20-23 PLC PLC * -8No.EX-OMN0035CN-A , SI 1 SI 32 10 SI SI ON/OFF PNP

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment for machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. *2) Labor Safety and Sanitation Law, etc. Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

A IDFA60-23-T IDFA70-23-T IDFA80-23-T IDFA90-23-T M3.5 8.5mm M4.0 9.5Mm [3.2.5 ] IDFA60/70/80/90 Series 12-3 IDX-OM-W094 T 12.5 IDFA60/70-23-T A B AC 230V50Hz CM OLR FM MC MC2 PRS PRS2 ILS THR C01 C11 TB CN GFCI EDV PE TDR BK WH IDFA80/90-23-T A B A B GR A B AC 230V50Hz SY BU BR YE OR G/Y / IDFA60/70/80/90 Series 12-4 IDX-OM-W094 V 13 V V 13.1 0 () 13.2

Blanking plate assembly Blanking plate 437 AWG30, 40 Exploded View 2 Pressure gauge cover Stem assembly Handle (Convex) Pressure Valve assembly Pressure gauge assembly O-ring Valve spring Pressure adjustment guide Valve guide Planet gear A Clip Spanner flats Concave: 2 places Planet gear B Element Bonnet Mounting screws (4 pcs.)

P3, L10 1 2 1 2 1/2 B Thd D A Thd C Hole Dia. Stainless Steel Threaded Parts Page & Part No. Line No. Page & Part No. Line No. D Line No.