6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.
CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations R
1-C6 ind exhaust spacer, VQ1000/VQ20/VQ30 VALVE*** $59.55 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-R-1-N7 ind exhaust spacer, VV5Q* MANIFOLD VQ 4/5 PORT*** $59.55
1-C6 ind exhaust spacer, VQ1000/VQ20/VQ30 VALVE*** $59.55 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-R-1-N7 ind exhaust spacer, VV5Q* MANIFOLD VQ 4/5 PORT*** $59.55
1-C6 ind exhaust spacer, VQ1000/VQ20/VQ30 VALVE*** $59.55 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-R-1-N7 ind exhaust spacer, VV5Q* MANIFOLD VQ 4/5 PORT*** $59.55
6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .88184 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?
6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .68587 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?
6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .58790 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?
6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .67924 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?
6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .95993 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?
6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, 1.05821 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?
6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, 1.14872 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?
6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, 1.32277 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?
6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .97488 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?
6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .68343 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?
6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, 1.10231 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?
6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .97488 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?
6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, 1.54323 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?
6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, 1.54323 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?