CS1

1 !2 !3 !4 !5 !6 !7 !8 !

CU

Note Hard anodized Kit components CU20A-PS 20 1 Aluminum alloy 1 CU25A-PS 25 1 Hard anodized Aluminum alloy 2 Rod cover/Bearing 13, 14, and 15 CU32A-PS 32 1 Clear chromated Aluminum alloy 3 Head cover 1 Chromated Aluminum alloy 4 Piston 1 Stainless steel 5 Piston rod 1 Phosphate coated Carbon tool steel 6 Snap ring 1 Nickel plated Carbon steel 7 Rod end nut (2) 8 Cushion needle assembly

Series SY100 3 Port Solenoid Valve Rubber Seal

SY114/SY124, SY114A/SY124A only. 2.1-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) 1 (P) q y e r w i SY SYJ VK VZ VT VT VP A R P o u t !0 !1 VG VP VQ VQZ Part No.

RLQ

T3 Cylinder with Bypass Piping Component Parts T2 63.4 73.8 80.3 T3 57.8 67.8 74.3 TH 47.9 57.3 57.3 TP Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 T1 81.4 93.3 99.8 No. 1 2 3 4 Description Qty. 1 1 1 1 Part no.

Air cylinder

No.CM2*-OM0064P-A PRODUCT NAME Air cylinder MODEL / Series / Product Number Contents Safety Instructions P2 1. Specifications P4 1-1. Specifications 2. Installation and Handling P4 2-1. Air supply 2-2. Design 2-3. Mounting and Installation 2-4. Environment 2-5. Speed control 2-6. Allowable kinetic energy 2-7. Control of direction 2-8. Auto switches 3. Maintenance P18 3-1.

MGP

MGP*-OM0001B-A MGP 1. 1 2. 1 3. 1 4. 2 5. 2 6. 3 7. 4 8. 5 9. 5 10. 6 11. 6 12. 8 13. 9 14. 9 15. 10 16. 11 17. 14 18. 19 MGP series ISO/IEC)(JIS)1)2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part1:General requirements) ISO 10218

SFOD-OMT0012

Start-up . 6 3.1 Preparation . 6 (1) Software installation . 6 (2) Installation and wiring . 6 3.2. Start-up . 6 (1) Supply of power . 6 (2) Start-up of the Controller setting software . 6 (3) Alarm check . 8 4.

Pressure Gauge Guide

This will cause a malfunction. 8 1 R , 4 1 R G 1 4 The dimensions in ( ): Connecting thread R X2: Stud parts nickle plated 8 1 R PPA 8 1 R , 4 1 R AL 8 1 R , 4 1 R X3: Wetted parts stainless steel MPa 8 1 R 8 1 R , 4 1 R 8 1 R , 4 1 R X4: Oil-free (Wetted parts degreasing) 8 1 R 8 1 R , 4 1 R How to Order G 43 01 Option Connection thread size Symbol Specifications Nil X2 X3 Stud parts nickel

Heavy Duty Stopper Cylinder Series RSH/RS1H

6 i @7 @1 #2 @9 @6 @4 #9 !0 !9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting spring extended (TL, TM) Double acting spring type (BL, BM) r $0 !1 !

VK3000

direction 01 1 station Solenoid on same side of A and B port A port: Rc 1/8 B port: Rc 1/8 Nil P port: Rc 1/8 Thread type R port: Rc 1/8 20 Type S42 Solenoid on same side of A and B port 20 stations Type VK334 Nil F N T Rc S Port size Type VK3140 G P port: Rc 1/8 1 8 01 Rc C6 6 cassette NPT R port: Rc 1/8 NPTF B port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH Type 21: Body ported (

Soft Start-up Valve

Y AV2000-m02-1 to 6D/Y(Z)m-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV3000-m03-1 to 6D/Y(Z)m-A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AV4000-m04-1 to 6D/Y(Z)m-A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AV5000-m06, 10-1 to 6D/Y(Z)m-A 70 75 70 60 11 16 100 3.2 45 80 56 M6 x 1 Depth

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

2.0

Inscribed number 3 3 x 1 3 3A 1/8" x 1/16" 4 4 x 2 4 4A 5/32" x 1/32" 6 6 x 4 6 6A 1/4" x 1/8" KO Plug connector, Without connector G (Option) Grommet, 300 mm y Lead wire length Nil 300 mm 6 600 mm 10 1000 mm The plug connector is included but does not come assembled.

Gun Type Ionizer

(Refer to Table 1.) Table 1 Model Applicable tubing O.D.

LMU100/200 Series Mist Spray Unit

3 LMD1-4 LMD1-5 LMD1-6 n 3 6 9 12 15 18 L1 4 x 5.5 3 x Rc1/8 n = Rc 1/8 LMD2 n: Stations L1 25.5 44.5 63.5 82.5 101.5 120.5 L 38 57 76 95 114 133 Model LMD2-1 LMD2-2 LMD2-3 LMD2-4 LMD2-5 LMD2-6 n 2 4 6 8 10 12 2 x 6.5 n x Rc1/8 2 x 6.5 2 x Rc1/8 L1 1067

VVXA21/22

0" #1 ( 2 3 " " " 1 (N.O.) Manifold Specifications 4 " 4 " $! 5"5 6"( % " 7 1 ' % 8 6 4 # " 5 " " 0 5 9 9 ' 9 ' * 9 $ # " 5 Indivisual SUP type (N.C.)

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Recommended flow rate Note) (l/min (ANR)) Internal capacity (cm3) 1.7 Mass (g) ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 1.7 4.3 ZR Metric size Easy installation

Series VCL

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

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Lightweight and Compact

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt fixing brackets 2 pcs.