Through the combination of parallel I/O inputs, 14 points of positioning are available.  The speed and acceleration of the positioning can be set by the switch for each operating direction.  A single signal sent to a dedicated terminal returns an actuator to the home position. 

Through the combination of parallel I/O inputs, 14 points of positioning are available.  The speed and acceleration of the positioning can be set by the switch for each operating direction.  A single signal sent to a dedicated terminal returns an actuator to the home position. 

Through the combination of parallel I/O inputs, 14 points of positioning are available.  The speed and acceleration of the positioning can be set by the switch for each operating direction.  A single signal sent to a dedicated terminal returns an actuator to the home position. 

Through the combination of parallel I/O inputs, 14 points of positioning are available.  The speed and acceleration of the positioning can be set by the switch for each operating direction.  A single signal sent to a dedicated terminal returns an actuator to the home position. 

Through the combination of parallel I/O inputs, 14 points of positioning are available.  The speed and acceleration of the positioning can be set by the switch for each operating direction.  A single signal sent to a dedicated terminal returns an actuator to the home position. 

Through the combination of parallel I/O inputs, 14 points of positioning are available.  The speed and acceleration of the positioning can be set by the switch for each operating direction.  A single signal sent to a dedicated terminal returns an actuator to the home position. 

Through the combination of parallel I/O inputs, 14 points of positioning are available.  The speed and acceleration of the positioning can be set by the switch for each operating direction.  A single signal sent to a dedicated terminal returns an actuator to the home position. 

25

M4 x 0.7 Female mounting threads Thread depth 6 12 Silencer: AN120-M5 (Option) 8 AIR SUP Rc, NPT, G 1/8 16 Lead wire length: Approx. 570 mm FLUID IN Rc, NPT, G 1/8 8 18 12 11 11 AIR EXH M5 x 0.8 Thread depth 8 Air Operated PB1013A 18 1.5 10 Mount with this surface up FLUID OUT Rc, NPT, G 1/8 76 64 52 37 7.5 20 2 x M4 x 0.7 Female mounting threads Thread depth 6 2 x 4.5 Mounting hole 66 14

3

26 18 13.6 PFMC7202 Rc3/4, NPT3/4, G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 Symbol Model Bracket dimensions S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 Lead wire and M8 connector ZS-40-A Cable Specifications 2 (White) (Black) 4 4 Conductor Nominal cross section AWG23 10 (Blue) 3 1 (Brown) Outside diameter Approx. 0.7 mm

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Ar CClF3 Argon Halocarbon 13 C2Cl2F4 CF4 Halocarbon 114 Halocarbon 14 C2ClF5 CH2F2 Halocarbon 115 Halocarbon 32 C2F6 CH4 Halocarbon 116 Methane C2H2 CHF3 Acetylene Halocarbon 23 C2H2F4 CO2 Halocarbon 134A Carbon Dioxide C2HF5 H2 Halocarbon 125 Hydrogen C3F8 He Halocarbon R218 Helium C3H6 Kr Propene Krypton C3H8 N2

Clean Regulator

Applicable tube O.D.: 4 Fitting: KQH04-M5-X17 14 EXH OUT 16.6 IN OUT 864 SRH Series Made to Order Specifications 2 Please contact SMC for detailed dimensions, specifications and lead times.

Precision Clean Regulator

size 41 IN OUT A B C D Model Port size SRP111-M5 M5 x 0.8 14 23.5 30 30 C D SRP111-01 Rc 1/8 15 22.5 40 40 873 SRP Series Made to Order Specifications: Please contact SMC for detailed dimensions, specifications and lead times.

Related Products: Holder Series TMH 1

14 28 14.2 14.6 34 TMH-12 TMH-13 15-9-13

Table of Contents - Tubing

TUB-14 TAS Antistatic Nylon Tubing . TUB-15 TAU Antistatic Polyurethane Tubing . TUB-16 TIRS Flame Resistant Soft Nylon TubingInch . TUB-17 TRS Flame Resistant Nylon TubingMetric . TUB-18 TRB Flame Resistant Double Layer TubingMetric. TUB-19 TRBU Flame Resistant Double Layer Polyurethane TubingMetric ... TUB-20 PEAPP Polyurethane TubingInch/Metric . TUB-21 Related Equipment .

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

VFN212N-5D-02F 240 VFN212N-5D-02F-D 380 C b Cv C b Cv 2-position Single solenoid 2.68 0.40 0.72 5.41 0.31 1.38 Double solenoid 2.68 0.40 0.72 5.41 0.31 1.38 189 A VFN200N Series Dimensions DIN terminal VFN212N-l D (Y)ll-02l-l 138 19 23 Applicable heavy-duty cord O.D. 6 to 8 Pg 9 Indicator light (With "Z") 84.5 ( Without "Z": 66.5) 36.5 75.5 (Without "Z": 57) 2(A) port 24 32 40 119 Pilot EXH 14

Exhaust Cleaner Series AMC

Body size 2 AMC220 AMC310, 320 AMC510, 520 AMC610 AMC810 AMC910 Refer to page 5-10-14 for Specific Product Precautions. 3 5 6 8 9 Model/Male Thread Type Model Specifications Effective area (mm2) AMC310 AMC510 AMC610 AMC810 AMC910 16 55 165 330 550 Max. air flow (l/min(ANR)) Port size Weight (kg) Element model no.

฀AS

FlowRateandEffectiveArea FlowDirection SymbolonBody AS1002F 3.2,4,6 1/8",5/32" 1/4" 100 1.5 AS2002F 4 AS3002F AS2052F AS4002F 12 Series Metricsize 6 2 8 1/4" 5/16" 460 7 8 6 6 10 10,12 JISsymbol Inchsize TubeO.D. 5/16" 1/4" 5/32" 3/8" 1/4" 3/8" 1/2" Flowrate(l/min(ANR)) 230 3.5 20 0.3 290 4.5 130 2 920 14 660 10 390 6 920 14 1390 21 Controlledflow (Freeflow) Effectivearea(mm2) Note)Flowratevaluesaremeasuredat0.5MPaand20C

Information

Information Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN URL http://www.smcworld.com 2006 SMC Corporation All Rights Reserved 06-E533 Issued: June, 2006 D-DNP P-120 (DN) Stainless Steel Speed Controller (Elbow Type) Series ASG Flow Rate and Effective Area Material: Stainless steel 316 Model ASG22F-M5 Tubing O.D.

D series Pin Clamp Cylinder G G Series CKQ D/CLKQ D P P How to Order Built-in standard magnet D A 50 177 R A L KQG C P4DWSC With magnetic field resistant auto switch Built-in strong magnet D A 50 198 R A L KQP C P79WSE With magnetic field

CKQ CLKQ Relay, PLC Note 1) D-P4DWZ 5 m 2-wire (14) 2-color display CK1 D-P79WSE 24 VDC 0.3 m Pre-wired connector DC/AC magnetic field Reed auto switch CLK2 Series C(L)KQP D-P74L 3 m 24 VDC 100 VAC 1-color display 2-wire Grommet D-P74Z 5 m Note 1) PLC: Programmable Logic Controller Note 2) There are other applicable auto switches other than the listed above.

Through the combination of parallel I/O inputs, 14 points of positioning are available.  The speed and acceleration of the positioning can be set by the switch for each operating direction.  A single signal sent to a dedicated terminal returns an actuator to the home position.