AS

[L/min (ANR)] 200 06 200 04 06 08 50 500 04 100 100 0 0 0 0 5 10 5 10 5 10 5 10 Number of needle rotations Number of needle rotations Number of needle rotations Number of needle rotations Note) The numbers above the flow rate characteristic curves in the charts show the tubing diameter as defined by the product number.

CG1x-OM0006N

M4x0.7x22L 20 NBA-088S 25 NBA-106S (mm) 32 BGS1-032S 40 BAF-04S 50 BAF-05S 63 BAF-06S 80 BAF-08S 100 BAF-10S D-G5BA mm 20 25 32 40 50 63 80 100 D-G5BA 5 5 5.5 6 7 7.5 7.5 8 30% 1 2 2 mm mm D-G5BA A B Hs 20 25 31.5 31.5 24 26 24 25 28 36 36 46 80 28.5 32 40 50 63 32.5 33 37 36.5 45.5 45.5 42 48.5 57.5 56 100 57 46 68 (mm) 10 20 75 15 3. 3-1. 1 2 3 4 5 6 7 8 9 10 1 2 3 416

Air Suction Filter

type allows element replacement ZFB30 8, 10, 3/8" 75 Easily replaced filter element ZFB40 1/2" 100 ZFC 10 4, 5/32" ZFA ZFA IN/OUT straight piping ZFC5 In-line type 20 Easy installation and removal with One-touch fittings ZFB ZFB 6, 1/4" 30 ZFC ZFC 5 P.281 Light and compact molded resin parts 8, 5/16" 70 ZFC7 10, 3/8" 80 Easily replaced filter element 12 100 Note) Flow rate when initial

VCA

Valve type Thread type (for single unit only) Rc G NPT NPTF Nil F N T OUT(2) 1 IN(1) Port size Fluid Symbol 02 03 04 06 Class 3 Class 2 Port size 1/4 (8A) 3/8(10A) 1/2(15A) 3/4(20A) Class 4 General air Dry air Nil A Voltage 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Orifice size Orifice size (mm) 3 4 5 7 10 Class 3 Class 2 Class 4 Symbol 3 4 5 7 10 Please consult

EX500-GPR1A.eng

Connector specification ES M8 connector ( socket ) /10 pcs. TP M12 connector ( plug ) /1 pc. TS M12 connector ( socket ) /10 pcs. 40 41 Item No.

Slide Tables MX Series

15 20 25 30 40 50 60 75 100 125 150 175 200 225 250 275 300 Standard Stroke (mm) Bore Size (mm) 6 8 10 12 16 20 25 MXH MXS MXQ MXF MXW MXP Dual Rods For Twice The Force The MXS, MXQ, and MXW use a twin bore design to double the actuation force while maintaining the single bore height.

RSH

RSH80 RSH80 RSH80 200 200 RSH63 RSH63 RSH63 RSH50 RSH50 RSH50 0.9 Operating pressure : P (MPa) 100 100 0.8 0.7 0 0 10 20 30 40 10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000 5000 0 32 Lateral load: W (N) 70 70 60 60 50 50 Weight : W (kg) Weight : W (kg) 32 40

EX600-SEN7_8eng

Up to 10 units (including the SI unit) can be connected to one manifold. 2 Operator OFF Green ON Green flashing Yellow ON Yellow flashing OFF Green ON Green flashing Yellow ON Yellow flashing No Link, No Activity Link, No Activity (100 Mbps) Link, Activity (100 Mbps) Link, No Activity (10 Mbps) Link, Activity(10 Mbps) No Link, No Activity (3)Connecting the SI unit.

Magnetically Coupled Rodless Cylinder: Low Profile Guide Type ø 10, ø 15, ø 25 CY1F Series

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Air Slide Table ø 4, ø 6, ø 8 Series MXJ

Adjuster option Both ends (C) MXJ6 5, 10, 15 MXJ8 5, 10, 15, 20 Stroke adjuster is mountable on the axial piping.

Compact and

rate 40 40 40 10 10 20 20 20 20 5 5 10 0 0 0 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 2 4 6 8 10 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 2 4 6 8 10 12 14 16 Suction flow rate [L/min(ANR)] Suction flow rate [L/min(ANR)] Supply pressure [MPa] Supply pressure [MPa] ZU07SA Exhaust Characteristics Exhaust Characteristics Flow Rate Characteristics Flow Rate Characteristics ZU07LA 100 80 100 50 60 50 Vacuum

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

Compact Vacuum Ejector Series ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 10

COQ2BP

Intermedial e stroke between 50-100 (55, 60, 65. ). are obtained through the use 01 spacers (5, 10. I S, 2Omm) (Example) CDOBPSo-55 OM: SMC would install a 2Qmm width spacer in the C002BP 50-750M. Not.. No. Auto Switch Mounting Bracket Part No. AutoPart Specifications Auld ..

AFF

Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5

Cylinder with Turntable ø63, ø80, ø100 Series MGT

Port thread type 80 80 mm Rc Nil 100 100 mm Table position detector hardware TN NPT Position detector arms Switch bracket Positioning angle Symbol TF G Table unit/ Auto switch a b c d 10 11 12 13 14 15 20 23 25 180 c Nil Without auto switch (Built-in magnet) Stroke (mm) 90 Refer to Standard Stroke on page 452.

ARJ1020F

VY1 How to Order G Port size (IN, OUT) PPA 1/8 (Male thread), M5 x 0.8 (Female thread) 1/8 (Female thread) IN OUT 01 AL ARJ 3 10 01 BG ARJ 3 10 F BG With One-touch fitting 04 01 Option Body size 0.7 MPa setting (Standard) 0.2 MPa setting (1) Nil 1 S Model With seal Relieving type 10 Note 1) Compared with standard specifications, its adjusting spring has been only changed for 0.2 MPa.

IDX-OM-W035

S 10 S 10-1 10-2 PE IDFB Series 10-1 10-1 IDX-OM-W035 11 T 11 T 11-1 IEC 11-2 AC200V / 2A DC24V / 2A ( 20V / 3mA) 11-3 ON ONOFF 3 () 5 /1 () 11-1 IDFB Series 11-1 IDX-OM-W035 11 T 11-4 IDFB22E/37E PE 1 2 3 0.25inch (6.5mm) (1.25mm 2) AWG14 (2mm 2) AWG16 (1.25mm 2) AWG14 (2mm 2) AWG16 IDFB Series 11-4 11-2 IDX-OM-W035 11 T IDFB55E/75E =M4X10 3 2 1 0.25inch (6.5mm) 0.4inch (