Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 CY Mounting pattern w B2 A2 D-F9W, D-F9WV MG (mm) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 Operating range CX B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 Mounting pattern e DB3 A3 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 -X These values are given as a guideline including the hysteresis and are

Slider Type/Ball Bushing Bearing

Specifications Switch rail CY1L Applicable Series Bore size 6 to 40 Bore size (mm) Applicable stroke (mm) 6 10 15 20 25 32 40 20 to 25 to 35 to CY3B CY3R CY1S CY1L CY1L CY1H CY1H CY1F CYP D-X Technical Data 1539

3 Port Air Operated Valve

) 36 35 31 25 (17.5) 16.5 (45) 26.2 15 (20.9) (Distance between ports) 2.8 (54.5) 1/8, 1/4 1(P), 3(R) port 4.5 1P 26.5 NO 3 3R M5 x 0.8 (Breathing hole) 16 20.4 53.7 01 02 A B For vacuum/VPA342V-1(-F) 1/8, 1/4 2(A) port 26.2 2 x 3.2 (For mounting) 21.5 NC 2A 3.4 (1.6) 20.4 16 65.2 (9) 2 x 3.2 (For mounting) 1/8 12(PA) port (Mounting groove for M5 thread) (5.4) 12 (35) 36 35 31 25 16.5 (17.5

CE

19 49 60 9 M10 x 1.5 Rc 1/4 64 89.5 35 19 For rod nut and accessory bracket, refer to page 10-12-20.

CJ2X/CUX/CQSX/CQ2X/CM2X

Standard Stroke Bore size (mm) Standard stroke (mm) Auto switch Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Nil Without auto switch (Built-in magnet) 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Rod end thread For the applicable auto switch model, refer to page 10-3-12.

MVGQ

60 38 160 88 185 140 15 166 18 21 J VF3000 100 84 66 30 112 40 224 55.5 56.5 62 M14 x 2 35 M14 x 2 M14 x 2 41 44 80 190 108 221 170 15 200 21 25 Note 1) It is possible to manufacture the intermediate strokes other than the standard strokes by means of installing a spacer.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

5.5 34 64 22 76 34 76 Mounting pattern e DB3 A3 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 -X These values are given as a guideline including the hysteresis and are not guaranteed.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

(N) Operating pressure (MPa) Cylinder bore size (mm) 8 Piston area (mm2) 0.2 10 Symbol Specifications 50 0.3 15 0.4 20 0.5 25 0.6 30 0.7 35 -X16 Heat treated metal stopper -X23 Axial piping port set screw -X42 Rust proof guide -X51 Adjusting nut length specifications Weight Standard Stroke For the clean room specifications, refer to Pneumatics Clean Series catalog.

KN Series Nozzles for Blowing

D L1 VMG KN KN 861 KN Series Nozzle for One-touch fitting/KN (mm) Model Nozzle size D Applicable fitting size d L1 A Weight (g) KN-Q06-100 KN-Q06-150 KN-Q06-200 KN-Q08-150 KN-Q08-200 KN-Q10-200 KN-Q10-250 KN-Q12-250 KN-Q12-300 5 5 5 9 9 16 16 23 23 18 18 18 20.5 20.5 22 22 24 24 35 35 35 39 39 43 43 45.5 45.5 6 6 6 8 8 10 10 12 12 1 1.5 2 1.5 2 2 2.5 2.5 3 D 10 A Connecting products with

LECA6_C

CN5I/O . 23 6.1 . 23 6.2 (NPNPNP ) . 23 (1) I/O (NPNPNP ) . 23 (2) I/O . 23 6.3 . 24 6.4 I/O . 27 7. . 28 7.1 . 28 7.2 . 31 7.3 . 33 8. . 34 8.1 . 34 8.2 . 34 8.3 . 35 (1) . 35 (2) (). 35 (3) . 35 8.4 . 36 8.5 . 36 9. (). 37 9.1 . 37 9.2 . 38 10. . 39 10.1 . 39 10.2 I/O . 39 (1) . 39 (2) . 40 (3) . 41 (4) HOLD. 42 (5) . 42 2 - 6 . 42 (7) . 43 11. . 44 11.1 . 44 11.2 (). 45 11.3 I/O . 46 11.4

MHZ

(For D-Y) 4 Finger Position/Narrow Type 9 MHZ2-20N 14 Auto switch mounting groove (For D-F, D-M9(V)) 2.1 +2.2 0 0 0.4 When open 17.2 When closed 7.2 Note) When using D-Y59, D-Y69 and D-Y7 type auto switches, through-hole mounting is not possible. 12-2-35 35 Series MHZ2 Dimensions MHZ2-25 Double acting/Single acting Basic type 36.5 22 2-M6 x 1 thread depth 10 (Mounting thread) 4-M6 x 1 thread

CE

19 61.5 49 60 9 M10 x 1.5 Rc(PT) 1/4 89.5 35 19 64 Refer to page 11 regarding the rod end nut which is included.

Magnetically Coupled Rodless Cylinder

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0

Dedicated Controller

Therefore, never connect it to other equipment as this may cause fire or malfunction. 86 15 Regenerative Absorption Unit Series LC7R Dimensions 52 97 35 38 96 Operation window Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 35 Label DIN rail holding plate 22 22 Connector

MHZ

(For D-Y) 4 Finger Position/Narrow Type 9 MHZ2-20N 14 Auto switch mounting groove (For D-F, D-M9(V)) 2.1 +2.2 0 0 0.4 When open 17.2 When closed 7.2 Note) When using D-Y59, D-Y69 and D-Y7 type auto switches, through-hole mounting is not possible. 12-2-35 35 Series MHZ2 Dimensions MHZ2-25 Double acting/Single acting Basic type 36.5 22 2-M6 x 1 thread depth 10 (Mounting thread) 4-M6 x 1 thread

3 Port Air Operated Valve Series SYJA300 1

Bracket (Mounting hole) 23.2 (PA port) Rc 1/8 (Mounting groove for M5 thread) 2-R2.7 PA 5 36 35 35 3.5 21.5 31 17.5 1.6 15 26.7 45 9 54.5 65.6 54.4 1(P) 3(R) 4.5 (Piping port) Rc 1/4,1/8 (Breathing port) M5 x 0.8 16.5 20.4 5-5-15 4 Series VPA300/500/700 Dimensions Base mounted: VPA344A B (A port) Rc 1/8,1/4 12 65.6 58.6 39 12 30 (PA port) Rc 1/8 (PA port) Rc 1/8 2(A) NO 26.5 35 43 PA PA

PA300/500/700

Bracket (Mounting hole) 23.2 (PA port) Rc 1/8 (Mounting groove for M5 thread) 2-R2.7 PA 5 36 35 35 3.5 21.5 31 17.5 1.6 15 26.7 45 9 54.5 65.6 54.4 1(P) 3(R) 4.5 (Piping port) Rc 1/4,1/8 (Breathing port) M5 x 0.8 16.5 20.4 5-5-15 4 Series VPA300/500/700 Dimensions Base mounted: VPA344A B (A port) Rc 1/8,1/4 12 65.6 58.6 39 12 30 (PA port) Rc 1/8 (PA port) Rc 1/8 2(A) NO 26.5 35 43 PA PA

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

SB RA AA Counter bore depth 9 (mounting hole) 6.4 AB 3 35 35 RA 5 VA, depth VB 8 NA B RB RB XA, depth XB 8h9 0 -0.036 2-UA, thread depth UB (mounting threads) Q 4.5 20 20 FX FY FZ (Open DO) (Closed DC) WA, depth 2 4-M4 x 0.7, thread depth 8 Attachment mounting threads CB CA M5 x 0.8 (finger opening port) Open EO Closed EC 9 L J M5 x 0.8 (finger closing port) G I 2 (mm) RB 25 28 I 6 7 Model

e-Rodless Actuator

M2 M3 m2 m3 16 25 16 25 5 4 3.5 18 16 14 E-MY2C 13 14 10 35 35 30 7 6 7 15 13 13 E-MY2H 28 26 26 32 30 30 The above values are the maximum allowable values for moment and load weight. Refer to each graph regarding the maximum allowable moment and maximum load weight for a particular slide table speed.