Digital Flow Switches

Output mode Hysteresis mode ft3, ft3 x 103, ft3 x 106 CFM ON OUT2 is also the same.

Fieldbus system PROFINET compatible SI Unit

(W x L x H) in mm 27.6 x 120 x 61.5 Weight 120 g Housing material Nylon 73 No.EX-OMW0011-B 11.

Booster Regulator/Air Tank

Then, the charge time (T) for a 10 L tank: T = t x = 3.2 x = 32 (s). V 10 T = t x = 89 x = 89 (s).

RB/RBL/RBQ

C J G5-S Material: Carbon steel Material: Polyurethane (mm) (mm) (mm) CV MM A B M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 B 3.5 4.5 5 6 6.6 C 22 27 32 41 41 h1 25.4 31.2 37 47.3 47.3 C 4 8 8.3 11.3 13.1 h M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 MM B 6 6 6 6 6 C 22 27 32 41 41 Part no. Part no. Part no.

RB/RBL/RBQ

x 1.0 19 M5 9 drill, 14 counterbore depth 8.6 16 12.5 34 54 M14 x 1.5 25 M8 11 drill, 17.5 counterbore depth 10.8 22 19 44 70 M20 x 1.5 38 M10 13.5 drill, 20 counterbore depth 13 34 25 52 80 M27 x 1.5 50 M12 10-18-16

Adsorption Plate

Particle diameter Adsorption surface size A B C Standard (0.3) 1 2 3 4 5 6 50 x 50 mm 100 x 100 mm 150 x 150 mm 200 x 200 mm 250 x 250 mm 300 x 300 mm 0.2 0.4 When particle diameter and port position are both standard, neither of them are specified.

Process Valve Series VNA

A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 202.5 232 267 286.5 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 x 8 7 x 10 9 x 12 9 x 12 VCC 20 24 24 70 92 109 413 Series VNH Specific Product Precautions Be sure to read before handling.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

CL Bore size (mm) 20, 25, 32 40, 50, 63 80, 100 Thread size Pulling force Stroke (mm) MLGC M2.5 X 0.45 X 25l 4.9N 2 M3 X 0.5 X 3l 10N 3 CNA M5 X 0.8 X 40l 24.5N 3 Bolt should be detached under normal operation, otherwise it may cause malfunction of the locking feature. CB wThe lock piston is pushed further upward.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

CL MLG Stroke (mm) Pulling force Bore size (mm) 20, 25, 32 40, 50, 63 80, 100 Thread size CNA 2 4.9N M2.5 X 25l 3 10N M3 X 3l CNG 3 24.5N M5 X 40l Bolt should be detached under normal operation, otherwise it may cause malfunction of the locking feature. MNB wThe lock piston is pushed further upward.

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

100

Use a male thread with a length of 10.5 or less for the vacuum port and 11.5 or less for the exhaust port for connection. 23 87.5 73 4 x M5 x 0.8 Thread depth 6 (Mounting hole)3 (Recommended tightening torque: 1.3 to 1.5 Nm) 15 149 15 76 27 73 80 27 Multistage Ejector ZL3/ZL6 Series Pressure switch for vacuum with energy saving function With supply valve and release valve Dimensions ZL3mmm-K1

Digital Flow Switches

Unit switching Real-time switch output ( ) For air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES CFM x 10-2, CFM x 10-1 ft3 x 10-1 OFF P-1 P-2 High flow rate CFM=ft3/min "P" Window comparator mode H : Hysteresis High Flow Rate Type (For Air) H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON NO OFF P-1 P-2 ft3, ft3 x 103, ft3 x 106 CFM

PF2A/PF2W

Unit switching Real-time switch output ( ) ZSE ISE For Air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON PSE YES CFM x 102, CFM x 101 ft3 x 101 OFF P-1 P-2 High flow rate Z I SE3 CFM = ft3/min P Window comparator mode H: Hysteresis High Flow Rate Type (For Air) PS H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON Z I SE1 2 NO OFF P-1 P-

Air Slide Table Series MXQ

is not available with shock absorber. x x BS x x x BT x x x x B x x x : Available, x: Not available Note 3) With the combination of buffer mechanism and extension end stroke adjuster, the buffer stroke decreases by the amount of stroke adjusted with the extension end stroke adjuster.

Digital Flow Switches, Series PF2A, Series PF2W

Unit switching Real-time switch output ( ) For air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES CFM x 10-2, CFM x 10-1 ft3 x 10-1 OFF P-1 P-2 High flow rate CFM=ft3/min "P" Window comparator mode H : Hysteresis High Flow Rate Type (For Air) H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON NO OFF P-1 P-2 ft3, ft3 x 103, ft3 x 106 CFM

Clamp Cylinder with Lock Series CLK1

Power supply voltage Internal voltage drop Leakage current Load impedance Load voltage at OFF = x 2 pcs. x Load voltage at ON = x 2 pcs. = 24V 4V x 2 pcs. = 16V = 1mA x 2 pcs. x 3k = 6V Example: Load impedance is 3k Leakage current from switch is 1mA Example: Power supply is 24VDC Internal voltage drop in switch is 4V 19 Clamp Cylinder with Lock Series CLK1 Magnet Field Resistant 2 Color

Air Catch Sensor Series ISA

Description Each part order comes with two M3 x 8 tapping screws.

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

Grease pack part no.: GR-L-010 (10g) MGT D-X Individual -X 415 Series MGF Dimensions: 40 MGF40 120 4 x M8 x 1.25 through 100 100 120 90 9.5 8 46 + Stroke 36.5 + Stroke 7.5 18.5 2 x Rc, NPT, G 1/8 Breathing hole for guide (with element) 38 When the cylinder is extended Port for extending cylinder Port for retracting cylinder 114 4 x M8 x 1.25 through M5: T-slot for hexagon bolt K 3.5 40 100

Sine Rodless Cylinder Series REA

Stop 5 Series REA Sine Rodless Cylinder Dimensions (mm) REA 25, 32, 40 1in = 25.4mm Effective thread depth J L 0 0.1 NN G 4-MM H G B 2Port size I X D NB NB T N K W N S + Stroke F NA F R ZZ + Stroke MM x J B D F G H I K L N NA NB NN Model Port size REA25 REA32 REA40 Rc(PT) 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc(PT) 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15

Electric Actuator

(7) B 30 +0.030 +0.030 0 6H9 ( ) depth 4 11 n x 5.5 114 64 200 E 20 C x 200 (=D) Note 1) Distance within which the table can move when it returns to origin.