Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

e r t y u i o !

VFN2000N

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

Conduit terminal w/ indicator light For obtaining the flow rate, refer to page 4-1-6.

2/3 Port Valve for Various

Power dissipation (W): For AC , W = V/A cos. For DC, W = V/A (Note) cos shows power factor. LVD LVQ 2. Surge voltage The surge voltage is a high voltage generated momentarily when cutting the power supply. LQ 3. Hum sound The hum sound is a noise generated through repeated adsorption and releasing on an armature adsorption surface.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

e r t y u i o !

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

AFF

(Element life check) Max. contact capacity: 10 VA AC, 10 W DC Rated contact voltage (max. operating current): 125 V AC (0.08 A), 30 V DC (0.33 A) Max. contact capacity: 10 W DC Rated contact voltage (max. operating current): 30 V DC (0.33 A) Pressure drop 0.1 MPa Symbol V: Degreasing wash, white vaseline Reed switch Reed switch Body/housing is degreasing washed.

AL800/900

(Example) 23-R Nil N F Option Combinations Available Not available Accessary, Option Option Symbol 1 1S-1 1S-2 2 3 6 8 R -1 -1S-1 -1S-2 -2 -3 -6 -8 -R 1000 cm3 tank 1000 cm3 (With switch) Bottom limit ON 1000 cm3 (With switch) Bottom limit OFF Metal bowl Lubricator with drain cock Nylon bowl Metal bowl with level gauge Flow direction: Right Left Note) -1, -1S-1 and -1S-2 are with metal bowl

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

R.

SYJ300

For type R, U, DC voltage is only available. Power saving circuit is only available in the "Z" type. DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Bracket Nil: Without bracket F: With bracket AC (50/60 Hz) 3 port 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type W, DC voltage is only available.

VM100F

Construction Side ported Bottom ported t y w u q q w u y t 3(R) (3-port only) 3(R) (3-port only) Non-actuated Non-actuated !4 i !0 2(A) 1(P) r o e !3 !1 !2 !3 e o r !0 i !1 !2 2(A) 1(P) Actuated Actuated 2(A) 1(P) 2(A) 1(P) Component Parts No. Description Material Note 1 Valve PBT 2 Valve sheet A PBT 3 Valve sheet B PBT 4 Valve sheet C PBT No.

Air Cylinder Series CS1

Cushion Not required (Non-lube) Lubrication 125, 140, 160 Bore size (mm) Basic style, Foot style, Rod side flange style, Head side flange style, Single clevis style, Double clevis style, Center trunnion style Mounting In the case of w/ cushion, pressure inside cushion stroke is not included.

SY3000-OMH0002

(N.O.)3 8 No.SY3000-OMH0002 SY series .3.23.7mm ( ( (1mm) (R) (U) DC24V 12V 1/4 DC24V 62ms L M () (S) 0.5V (Z) () 9 No.SY3000-OMH0002 SY series DIN W 1 3WA +4-3 (DS) (Z) DIN M8 ( ) DC24V 12V 1V WA (FU) +COM (S) (Z) (R) (U) (SS5Y(3,5)-45)-COM (SS5Y(3,5)-45N) 4 (WA ) (S 3( WA ) L M (GZ, LZ, LOZ, MZ, MOZ) 4 (WA ) 3( WA ) DIN (DZ, YZ) 4 WA 3 WA 4 (WA

AL800/900

(Example) 23-R Nil N F Option Combinations Available Not available Accessary, Option Option Symbol 1 1S-1 1S-2 2 3 6 8 R -1 -1S-1 -1S-2 -2 -3 -6 -8 -R 1000 cm3 tank 1000 cm3 (With switch) Bottom limit ON 1000 cm3 (With switch) Bottom limit OFF Metal bowl Lubricator with drain cock Nylon bowl Metal bowl with level gauge Flow direction: Right Left Note) -1, -1S-1 and -1S-2 are with metal bowl

Clean Room Regulator/Fluoro Resin Type Series SRF30

Construction Tubing Integral fittings e y t e t i r y !6 r u i u q o q !0 o !1 !0 w !1 !2 w !2 Parts list !3 No.

High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro is a registered trademark of MATSUMURA OIL Co.,Ltd. R Kalrez is a registered trademark of E.

Large Flow Lubricator AL800/900 Series

(Example) 23-R Semi-standard Combinations Available Not available Accessory, Semi-standard Option Symbol 1 1S-1 1S-2 2 3 6 8 R -1 -1S-1 -1S-2 -2 -3 -6 -8 -R 1000 cm3 tank 1000 cm3 (With switch) Bottom limit ON 1000 cm3 (With switch) Bottom limit OFF Metal bowl Lubricator with drain cock Nylon bowl Metal bowl with level gauge Flow direction: Right to left Note) -1, -1S-1 and -1S-2 are with

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Center of F.R.L. body A D Silencer Compact resin type High noise reduction type B B A A Dimensions [mm] Model Port size R Dimensions [mm] A B AN302-03 3/8 84 28 AN402-04 1/2 95 34 Model Port size R A B AN30-03 3/8 58.5 20 AN40-04 1/2 68 24 3 Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve VP500/700 Series Dimensions VP517 Surge voltage suppressor (for D YS, D YZ) Manual