Clean Regulator/Fluororesin Type

2 w !2 w !3 !4 !5 With reducer Tube extensions e t y r i u q o !1 !0 !2 w Component parts No.

Compact Rotary Actuator Rack & Pinion Style Series CRQ2 How to Order CRQ2B S 20 90 Without auto switch CDRQ2B S 20 90 M9BW With auto switch Built-in magnet Number of Shaft type auto switches S Single shaft 2 pcs. Nil W Double shaft S 1 pc. ∗ Refer to p

Symbol Specifications/Content Applicable shaft type Mass Shaft type variation X, Y, Z, T, J, K (g) S, W XA1 to XA24 Shaft pattern sequencing I Size Standard mass X, Y, Z, T, J, K XA31 to XA59 Shaft pattern sequencing II 90 180 360 XC7 S, W, X, T, J Reversed shaft 10 120 150 200 XC8 to XC11 Change of rotating range 15 220 270 380 Change of angle adjustable range (0 to 100) XC12 to XC15 20

mlu

2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

Series VCS

Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Nozzle Type Ionizer

Bracket Power supply cable IZN10 B1 IZN10E CP Bracket Power supply cable Symbol Type B1 L-bracket B2 Pivoting bracket B3 DIN rail mounting bracket Symbol Type Nil 3 m Z 10 m Power supply cable: Made to order IZN10E CP X13 01 L-bracket IZN10-B1 Pivoting bracket IZN10-B2 Power supply cable length Symbol Type 01 1 m 20 20 m * Available in 1 m increments from 1 m to 20 m.

Unit Manifold Valve

(Value in the initial state) The impact/vibration resistance is 50/10 [m/s2] for the manifold with a power-saving circuit (0.23 W).

Microspeed Cylinder

As a rule when W + Pa>PA adjust P so that W + Pa = PA. (2) Installing a regulator with check valve at position (b) can decrease lurching during descent and actuation delay during ascent. As a rule adjust P so that W + PA = Pa.

KP/KPQ/KPG

Elbow: KPL D 2-Applicable tubing Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS M M L Q L Q KPL04-00 20.7 4.5 18 3.5 3.5 3 10.4 4 KPL06-00 22.8 5.3 19.5 9 9 7 12.8 6 D KPL08-00 26.3 6 21.5 22 15 11 15.2 8 4.2 KPL10-00 29.4 6.8 24 35 25 16 18.5 10 M 8 KPL12-00 L 31.4 7.5 25 50 40 20 20.9 12 Note 1) D indicates the maximum diameter.

Electric Actuator Triple Axis P&P Unit

Minimum number of T nuts required for each stroke Stroke (mm) 100400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 Number of T nuts (pcs.) 8 10 12 14 16 18 20 Model LJ1-T8 (Weight: 8.4g) M8 x 1.25 17.5 7.5 15 The end cover must be removed when a T nut is inserted into the T slot. 18 11.5 M6 x 20 4 positions 45 10 T slots for mounting 9.4 4.5 T-slot size End cover A A A A 110 The A dimension

Clean Gas Filter

Construction q t e r w IN Description No.

LG1H

) a = 3000 2000 m L1 0 10 20 30 Transfer load m (kg) L2 600 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 10 20 30 0 Transfer load m (kg) m a = 1000 4000 a = 2000 L3 (mm) L3 a = 3000 2000 m Mey a 10 20 30 0 Transfer load m (kg) Refer to page 183 for deflection data. 164

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m For three phase 200 VAC For single phase 200 VAC L1 CNP1 NFB MC CNP3 L1 CNP1 NFB MC CNP3 Single phase 200 to 230 VAC Three phase 200 to 230 VAC L2 L2 U U U Motor V U Motor V L3 L3 V V W M N () W M N W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Terminal q DC (+) w N.C e DC () r IN (1 to 5 V) e w q Power supply/Output connection cable (Accessory) Power supply/Output connector (8P) Pin no. 7 Green 8 Yellow 6 Red 5 Gray 4 White 3 Black 2 Blue 1 Brown i u y t r e w q Pin no.

Manifold Specifications

r VZ1000-3A-1U t VZ1000-2A-1M SUP/EXH block assembly y Note) Block pin (2 pcs.) is attached for q, e, t, y.

Air-hydro Unit

The {T series W (white)} nylon tube can be used for hydraulic piping. Self-aligning fittings can be used for hydraulic piping, but One-touch fittings cannot be used. Make sure that there are no extreme differences in the bore of the pipes used for hydraulic piping. Also check for protrusions or burrs. Prevent air from being drawn into the hydraulic piping.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

How to Order 11 LEFS 100 B 1 1 S K 6N 16 w e r t u y o i !0 !1 !2 !

E-MY2B_E_A

Light load Output type Stroke N NPN Stroke adjusting unit P PNP Nil Motor placement M Motor side E End side T On the top D On the bottom W Double-side Note) Refer to the catalog for Stroke, Auto switch and Number of auto switches.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Platinum silver Body C: Conduit VS4010-CSSub-plate Platinum silver Aluminum die-casted w T: Conduit terminal VS4010-TSSpool/Sleeve Stainless steel e U: Grommet, D: DIN terminal VS4010-SReplacement Parts Part no. No.

VZ3000

Material Aluminum die-casted Note Platinum silver q Description Sub-plate Platinum silver Solenoid assembly Common with Series VZ 000 1 5 Thread type Nil: Rc F : G N: NPT T : NPTF u Aluminum die-casted DXT192-14-1P Piston plate Body DXT170-CEpoxy/Stainless steel Resin Resin Black i w e Piston Spool valve NBR 13 x 11 x 1 O-ring o r Aluminum, HNBR t Resin End cover y Stainless steel Spool

ML1C

Horizontal collision Vertical (Downward) Vertical (Upward) Type of impact V2 W 2 Kinetic energy E1 Thrust energy E2 Fs Fs + Wsg Fs Wsg Absorbed energy E E1 + E2 Symbol V: Impact speed (m/s) g: Gravitational acceleration (m/s2) W: Impact object mass (kg) F: Cylinder thrust (N) s: Stroke length of shock absorber (m) Note) The speed of the impact object is measured at the moment of impact with