33

6 0.04 0.04 4 4 Allowable operating range Allowable operating range Return port Return port 0.02 0.02 2 2 0.00 0.00 0 2 4 6 8 10 12 14 16 0 2 4 6 8 10 12 14 16 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] Option (-T): High Pressure Pump Mounted HRSE -A-10-T 012 018 012 018 024 Option (-T): High Pressure Pump Mounted HRSE -A-20/23-T 0.3 0.3 Circulating fluid pressure

PFxx-OMJ0005CN

10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/

XL-OMV0002

1. 1 1 Assy Assy Assy 12 XL-OMV0002 6-2. 1 2 3 3 2 1 4 162540 50,63,80,100,160 O O O O 50 4 5 6 3 3 2 1 4 2 1 Nm 4 0.7 XLC-16 1.5 -25 2.5 -40 6 -50 6 -63 15 -80 20 -100 25 -160 O O O O , O , 13 XL-OMV0002 6-3.O 1 2 3 4 5 3 2 1 4 162540 50,63,80,100,160 O O 50 O ( ) 3 2 1 Nm 4 0.7 XLC-16 1.5 -25 2.5 -40 6 -50 6 -63 15 -80 20 -100 25 -160 O O ,O , 14 XL-OMV0002 VR

XL-OMY0003

SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O

CEx-OMQ0010

No.CE-OMQ0010-C CE2 CE2 SMC 1 2 2 2-1. 89 2-2 10 2-2-1. 10 2-2-2. 11 3 1213 4 4-1. 14 4-2. 14 4-3. () 15 5 5-1. 16 5-2. 16 5-3 17 5-4 1718 6 6-1. 18 6-2 19 6-3. 19 7 7-1. 20 7-2. 2021 8 8-1 21 8-2. 2122 8-3. 22 8-4. 23 8-5. 2324 1 1) (ISO/IEC)(JIS) 2) *1) ISO 4414:Pneumatic fluid power General rules relating to systems.

MLGC

6 !7 !8 !

CYV

4 #6 !5 !1 !9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

6 8 6 8 8 10 10 12 Applicable tubing O.D. d T L3 L2 H D1 D2 L1 Model Max.

MHL2

5 Rubber magnet Synthetic rubber Replacement Parts MHL2-40 Main parts Seal kit @6@7@8@9#0 <10> !1!3!6@6 <16 to 25> eo!0!4!6@6#0 <32, 40> ei!4!

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

3 5 4.5 24 4 4 4 33 33 33 (mm) I 4 5 5 Model MHS2-16D MHS2-20D MHS2-25D G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 NB 5h9 6h9 6h9 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB 32 35 37 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 0 -0.030 0 -0.030 0 -0.030 Model MHS2-16D MHS2-20D MHS2-25D VA 2H9 2H9 3H9 TB 5 6

Compact Cylinder with Air Cushion and Lock Series RLQ

6 6 6.5 Number of auto switch D-F7LF D-A9 D-F9 D-A79W 7.5 7.5 8 D-F7LF 7.5 D-F9, F9V D-F9W, F9WV D-F9BAL 1 pc. 2 pcs. 20 20 20 20 25 25 20 20 5.5 5.5 5.5 6.5 The operating ranges are provided as guidelines including hystereses and are not guaranteed values (assuming approximately 30% variations).

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Note 6) When the current output is selected.

Refrigerated Air dryer Series IDU/IDF

Note 3) Option "T" is not available for IDU6D, 8D-4 and -6.

AC Servo Motor Driver (Parameter Configuration using Setup software (SigmaWin+ TM ))

SigmaWin+ Preparation . 6 2.1 SigmaWin+ . 6 2.1.1 USB driver Installation Method .6 3. SigmaWin+ Basic Setting . 6 3.1 Start up the SigmaWin+ . 6 4.

Digital pressure switch for energy-saving control ejector

HHH is 6 displayed. (1) Reset applied pressure (1) Check that the pressure is not LLL is to a level within the set pressure range.

PSxx-OML0002CN

5R.D. <> [F 6] [FSC] 1 [F 6] -34No.PS-OML0002CN-G [F 7] 30 <> [F 7] [F 7] 30 () (ON) ON OFF ON -35No.PS-OML0002CN-G [F 8] <> [F 8] [F 8] 0 45 -36No.PS-OML0002CN-G [F90] <> [F90] [on] [oFF] 1 [oFF]() 2 [F90] 1 38 -37No.PS-OML0002CN-G 1 2 OUT1 3 OUT1 4 OUT1 5 OUT1 6 7 OUT2 8 OUT2 NPN2 PNP2 9 OUT2 10 OUT2 11 12 13 14 15 16 2 -38No.PS-OML0002CN-G

PSxx-OMF0005CN

160 198 236 L2 38 76 114 152 L3 38 76 114 152 190 DIN EXH DIN 1 2 3 4 5 6 L1 46 84 122 160 198 236 1 L2 38 76 114 152 L3 38 76 114 152 190 L4 62.5 120 162.5 200 237.5 275 L5 73 135.5 173 210.5 248 285.5 DIN ISA-5-* * 2 3 4 5 6 7 -27No.PS-OMF0005CN-E EXH SUP RcNPTG1/8 1 1 2 3 4 5 6 L1 106 144 182 220 258 296 L2 38 76 114 152 L3 38 76 114 152 190 DIN EXH DIN SUP RcNPTG1/8 1 2

JSY1000/3000/5000 Series (Non Plug-in)

No.JSY1000V-OMW0004-A Solenoid Valve PRODUCT NAME JSY1000/3000/5000 Series (Non Plug-in) MODEL/ Series Contents Contents -1 Safety Instructions -2,3 Design / Selection -4 to 6 Mounting -6 Piping -6,7 Wiring -7 Lubrication -7 Air Supply -7,8 Operating Environment -8 Maintenance -9 Specific Product Precautions -10 to 17 Valve Construction -18 Valve Replacement Parts / Pilot Valve -19 Manifold

VEX-OMY0001

No.VEX-OMY0001 3 / / VEX3 -2,3 /-4,5 -5 -5 -6 -6 -6 -6 -7 -810 -11 -12,13 -14,15 1 No.VEX-OMY0001 *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating

EX510-GDN1.eng

Solenoid valve is not working SW2 OFF 1 6 5 4 3 2 1 ON ON Input setting (switch No.1 to 3), Output setting (switch No.4 to 6) The setting is as follows. All of the settings when shipped from plant are turned OFF, 64 I/O points.