A-HEC-OM-J004

1.4.4 Disposing of Product . 1-10 1.5 Interlock List . 1-10 Chapter 2 Description and Function of Each Part . 2-1 2.1 Liquid Tank/Controller. 2-1 Chapter 3 Composition and Function of Product. 3-1 3.1 Composition . 3-1 3.1.1 Outline . 3-1 3.1.2 Operating Principles . 3-3 3.2 Function . 3-5 3.2.1 Auto Tuning Function . 3-5 3.2.2 Temperature Upper / Lower Deviation Limit Alarm Function (at

LG1H

plane 52.5 Stroke + 386 1 125 3 x 8H10 depth 10 thread depth 10 8 x M6 x 1 The body mounting reference plane and work piece mounting reference plane should be used as standards when mounting onto equipment.

IDX-OM-W017

5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-2 IDFA Series 1 6-3 . 6-3 6-4 . 6-4 6-5 . 6-5 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 8 C 8-1 . 8-1 8-2 . 8-1 8-3 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 (ADH4000-04) . 10-2 10-4 . 10-2 10-5 . 10-2 11 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 T 12-1 . 12-1 12-2 . 12-1 12-3 . 12

IDX-OM-W031

. 8 1 8 2 Specifications . 8 2 Chapter 9 Option Specification L 9 1 Safety instructions . 9 1 9 2 Specifications . 9 1 9 3 Maintenance . 9 2 Chapter 10 Option Specification R 10 1 Safety instructions . 10 1 10 2 Specifications of GFCI . 10 1 10 3 How to connect the power supply . 10 2 10 4 Cautions for handling the GFCI . 10 2 10 5 Electrical Circuit . 10 2 Chapter 11 Specification for Option

Sine Cylinder Series REC

10 D-B5/B64 D-B59W 8 9 10 10 13 14 14 13 D-H7/H7W D-H7NF/H7BAL 4 4.5 5 4 D-H7C D-A3/D-A44 D-G39/D-K39 D-G5NTL D-G5NBL 7 9 10 8.5 9 9 10 10 Since this is a guideline including hysteresis, not meant to be guaranteed.

Sine Cylinder Series REC

10 D-B5/B64 D-B59W 8 9 10 10 13 14 14 13 D-H7/H7W D-H7NF/H7BAL 4 4.5 5 4 D-H7C D-A3/D-A44 D-G39/D-K39 D-G5NTL D-G5NBL 7 9 10 8.5 9 9 10 10 Since this is a guideline including hysteresis, not meant to be guaranteed.

Sine Cylinder Series REC

10 D-B5/B64 D-B59W 8 9 10 10 13 14 14 13 D-H7/H7W D-H7NF/H7BAL 4 4.5 5 4 D-H7C D-A3/D-A44 D-G39/D-K39 D-G5NTL D-G5NBL 7 9 10 8.5 9 9 10 10 Since this is a guideline including hysteresis, not meant to be guaranteed.

IDX-OM-W026

1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-4 . 6-3 1 6-5 . 6-4 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 11 M 11-1 . 11-1 11-2 . 11-2 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-2 13 T 13-1 . 13-1 13-2 . 13-1 13-3

3

, N2, Ar, CO2 Air, N2 Dry air, N2 Digital Digital Digital Digital Digital 0.2 to 10 L/min 0.5 to 25 L/min 1 to 50 L/min 2 to 100 L/min 1 to 10 L/min 50 to 500 L/min 5 to 500 L/min 10 to 1000 L/min 20 to 2000 L/min 0 to 0.5 L/min 0 to 1 L/min 0 to 3 L/min 0.5 to 0.5 L/min 1 to 1 L/min 3 to 3 L/min 5 to 500 L/min 2 to 200 L/min 5 to 50 L/min 150 to 3000 L/min 10 to 1000 L/min 10 to 100 L/min

IDX-OM-W032

1 6 6-1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-4 . 6-3 6-5 . 6-4 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 (ADH4000-04) . 9-2 9-4 . 9-2 10 R 10-1 . 10-1 10-2 . 10-1 10-3 . 10-1 10-4 . 10-2 10-5 . 10-2 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 11-6 . 11-3 12 V 12-1 . 12-1 12-2 . 12-2 12-3 . 12-3 12-4

3 Port Air Operated Valve Series SYJA300 1

Pilot Pressure Range Vacuum/Low Ordinary pressure Pilot pressure (MPa) Operating pressure (MPa) 5-5-25 2 Flow Characteristics/Weight Flow characteristics Port size 1 2 (IN OUT) 2 3 (OUT EXH) Weight (kg) Valve model C [dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv 19 0.43 5.5 18 0.47 5.4 23 0.32 6.2 42 0.39 10 28 0.36 7.6 26 0.35 7.0 1 (IN) , 2 (OUT) 3 (EXH) 3 8 1 2 3 4 VPA3145 3 4 1.0 Port size

CL

Double Acting, Single Rod With Mounting Bracket Foot style: CLG1LN Foot Style Without rod boot With rod boot ZZ Bore size (mm) BZ M W X Y LS LT LX LH LD LZ LC ZZ 202 219.5 222.5 246 182 197.5 200.5 226 117 127 128 142 3 3 3 3 50 57 60 68 62 70 74 84 25 28 28 33 6 6 6.6 6.6 4 4 4 4 63.5 74.5 74.5 83 3 3.5 3.5 4 10 10 10 10 15 15 16 16.5 7 7 8 8.5 20 25 32 40 For long stroke, refer to page

Low Profile Slide Table Series MXF

3 !4 !2 r w e !0 o !9 !8 i !5 u !7 q !

Digital Pressure Switch ( compatible)

), ripple max. 10% voltage Power supply spec.

Digital Pressure Switch ( compatible)

(Pattern for 3 digits on the right) Characters Q, X, Z, /, or cannot be displayed. (Pattern for 1 digit on the left) Characters A to Z can be displayed (the same as the 3 digits on the right). Display OFF The Sub display is not displayed. -46No.PS-OMV0006-D [F11] Display resolution setting This function is to change the pressure display resolution.

Sensor Monitor

(Pattern for 3 digits on the right) Characters Q, X, Z, /, or cannot be displayed. (Pattern for 1 digit on the left) Characters A to Z can be displayed (the same as the 3 digits on the right). -57No.PS-OMW0014-B Special function setting [F90] Setting of all functions All functions can be set in turn. Press the UP or DOWN button in function selection mode to display [F90].

VG342

divider valve (External pilot) VG342 04 G 1 A Valve option CE-compliant Nil R Internal pilot External pilot Q CE-compliant Nil Rated voltage Electrical entry: D only 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 Pilot valve option Standard type Nil 4 Energy-saving type (DC only) Y 24 VDC 12 VDC 5 6 Continuous duty type E Option 7 240 VAC, 50/60 Hz Passage

In-line Air Filter

Applicable filter Element size Quantity ZFC-EL-1 ZFC1 5 x 3 x L11 10 ZFC-EL-2 ZFC3 6 x 4 x L25 10 2 Cover Resin PBT 2 ZFC-EL-3 ZFC5 12 x 8 x L20 10 3 Element Sintered resin 1 ZFC-EL-4 ZFC7 16 x 12 x L25 10 4 O-ring HNBR 2 5 Bracket Resin PBT 1 w OUT e w One-touch fitting r q IN r One-touch fitting t Element Replacement Procedure 1.

IZx-OMR0035

.: IZ-OMR0035 Contents Safety Instructions . 3 1. How to Order. 8 1-1. Ionizer . 8 1-2. Accessories. 8 1-3. Option . 10 2. Procedures to Operation . 10 3. Installation and Wiring . 11 3-1 Installation . 11 3-1-1. Precautions for Installation . 11 3-1-2. Installation of Ionizer . 12 3-2. Wiring . 13 3-2-1. Connection Circuit . 13 3-2-2. Wiring of the Power Supply Cable . 15 3-2-3.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Note 1) Body size AS-F AS-F With indicator Metric size Inch size 2 1/8, 1/4 3 3/8 4 1/2 Type Tubing O.D. 23 3.2 Note 2) Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" TMH 2 Elbow 04 4 06 6 08 8 10 10 12 12 16 16 ASD Control type Note) AS 0 Meter-out 1 Meter-in Indicator window direction AS-FE Note) Meter-out and meter-in types can be visually identified by color of the knob