Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C6 (ø6), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: N (w/o Lead Wire w/Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C6 (ø6), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve), Calibration Certificate

Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: W (With Flow Adjustment Valve, Rear Ported), Port Size: N1 (NPT1/8), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve)

Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: None (Straight), Port Size: N7 (1/4), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA)

Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: F1 (G1/8), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve), Calibration Certificate

Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: None (Straight), Port Size: C6 (ø6), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only)

Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: None (Straight), Port Size: C6 (ø6), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only)

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Standard strokes (mm) Bore sizes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 50, 63 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Example) For CQ2XB40-57D, an 18mm spacer is installed inside a standard stroke CQ2XB40-75D cylinder. Specific Product Precautions Be sure to read before handling. Refer to pages 15 to 24 for safety instructions and precautions.

e-Rodless Actuator Remote type controller is added to the e-rodless actuator with no programming required

M5 tapped M4 screw (accessory) Mounting bracket Variations Bracket Mount Cam follower guide High-accuracy guide Series Guide type Cam follower guide High-accuracy guide 16 25 16 25 Nominal size 5 10 5 10 Payload kg Stroke mm 50 to 1000 (Available in 1 mm increments.)

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Connector CL Note Description Part no. 4 3 2 1 Connector 4 pcs. per set ZS-26-E Sensor cable Cable length: 3m ZS-26-F Note) At the factory, the connector is not connected to the cable, but packed together with it for shipment. Cable length: 3m Connector + Sensor cable ZS-26-G The connector is not connected to the cable at the time of shipment.

LEC-W_C

No.LEC-OM08004 (ACT Controller) / LEC-W Series 1.3 2.5 3.6 3.1 .6 3.2 .8 4.10 4.1 .10 4.2 .13 4.3 .14 4.3.1 .14 4.3.2 .14 4.3.3 .14 4.4 .15 4.5 .15 4.6 .16 4.7 .16 5.17 5.1 .17 5.2 .20 5.3 .22 5.3.1 .22 5.3.2 .24 5.3.3 .25 5.3.4 .26 5.3.5 .27 5.3.6 .28 5.4 .29 5.4.1 .29 5.4.2 .29 5.4.3.29 5.5 .30 2 - ACT Controller/ 1.

MHx-OMY0001

(Nm) L(mm) MHM-16D M3x0.5 0.63 6 MHM-25D M4x0.7 1.5 8 MHM-32D M5x0.8 3 10 MHM-50D M6x1 5.2 12 (N) MHM-16D 100 MHM-25D 200 MHM-32D 300 MHM-50D 500 -7- 2-3. 40 2-4. () 5 5 P-01-11 -8- 2-5. 1.52 2-6. 1 ()ISO VG320 (SDS) -9- 2-7. 1) 1) 2) 3) 12mm -10- 2 C3 C1 C2: C3 D-M9V D-M9WV D-M9AV D-M9 D-M9W D-M9A D-P3DWA A B E G A B E G L A B E G L D F H MHM-16D 9.1 9.1 5.6 4.6 8.1 12.8 11

VEX-OMY0001

(P2) () 3) 4) 5) 23 5 No.VEX-OMY0001 VEX3 3 / DC () 5 20N 1) 2) 1 ()ISO VG32 2 ISO VG32 ,(SDS) 6 No.VEX-OMY0001 VEX3 3 / () 30 ( ) , 1 VG32 2 ()ISO VG32 7 No.VEX-OMY0001 VEX3 VEX3 12,22,32,42 ,300mm DXT170-80-A1) 2) Lmm 2 300 6 600 1 (2 ) AC100V 10 1000 2 (2 ) AC200V 15 1500 3 (2 ) AC 20 2000 DC L 4 :+ :DC 25 2500 DXT170-71-1 30 3000 0.20.33mm ( 1.7mm) DC : M 3.23.7mm

EX500-GPR1A.eng

OUT IN BUS COM A COM B COM C COM D F R P B U S O I R DIA BF SOL RUN GATEWAY UNIT EX500 SERIES 18 19 Switch setting Open the station number switch protective cover and set the switches with a sharp-pointed watchmakers screwdriver etc. NOTE 1. Be sure to turn off the power before setting the switches. 2. Be sure to set these switches before use.

Body Size: 25, Thread: N (NPT), Port Size: 02 (1/4), Option: G (Round Type Pressure Gauge w/Limit Indicator), Attachment: V1 (3-Port Valve for Residual Pressure Release; Mounting: V+AF+AR), Semi-Standard 1: J (Drain Guide 1/8: Size 20; Drain Guide 1/4: Sizes 25, 30, 40), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 25, Thread: N (NPT), Port Size: 02 (1/4), Option: Standard, Attachment: V1 (3-Port Valve for Residual Pressure Release; Mounting: V+AF+AR), Semi-Standard 1: J (Drain Guide 1/8: Size 20; Drain Guide 1/4: Sizes 25, 30, 40), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

FLW ADJMNT,BOTTOM PIPNG 25 F/R, No.DescriptionModel 1Body6For bottom piping Flow adjustment valve assembly(with pin)For 25 l/minZS-33-25NL

Magnet: D (Built-in), Mounting: F (Front Flange), Type: Standard, Bore Size: 63mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 25mm, Body Option: CM (C+M), Auto Switch Groove: None, also for 12-25 Bore w/o Magnet, Auto Switch: M9BWV--Solid State, 2-color Indication, 2 Wire, Vertical

Magnet: None, Mounting: F (Front Flange), Type: Standard, Bore Size: 20mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 25mm, Body Option: C (Rubber Bumper), Auto Switch Groove: None, also for 12-25 Bore w/o Magnet, Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

Magnet: D (Built-in), Mounting: F (Front Flange), Type: Standard, Bore Size: 50mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 100mm, Body Option: C (Rubber Bumper), Auto Switch Groove: None, also for 12-25 Bore w/o Magnet, Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)