Fluid: 2 (Water), Body, Port Size, Orifice: Q (C37; 1/8; 3.2), Voltage, Electrical Entry: Z1D (12 VDC; Grommet), Option: E (Oil-free; NPT Thread)

Fluid: 2 (Water), Body, Port Size, Orifice: Q (C37; 1/8; 3.2), Voltage, Electrical Entry: E (230 VAC; Grommet), Option: B (NPT Thread)

Fluid: 2 (Water), Body, Port Size, Orifice: Q (C37; 1/8; 3.2), Voltage, Electrical Entry: E (230 VAC; Grommet)

Body, Port Size, Orifice: Q (Aluminum; 1/8; 3.2), Voltage, Electrical Entry: A (24 VDC; Grommet), Option: E (Oil-free; NPT Thread; Port 1/8)

Body, Port Size, Orifice: Q (Aluminum; 1/8; 3.2), Voltage, Electrical Entry: Z1D (12 VDC; Grommet), Option: E (Oil-free; NPT Thread; Port 1/8)

Body, Port Size, Orifice: Q (Aluminum; 1/8; 3.2), Voltage, Electrical Entry: A (24 VDC; Grommet), Option: E (Oil-free; NPT Thread; Port 1/8), Bracket: XB (Interchangeable w/Old Type)

MXU

76 64.5 34 40 32 79.5 80 68.5 34 45 35 8-3-7 8 Series MXU Dimensions: MXU16 (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 65.5 66 52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8 9 Compact Slide Series MXU Construction MXU6 (6) MXU10 (10) MX MTS MY CY MG CX MXU16 (16) D-X With auto switch 20Data Component Parts No. q

Clean Regulator

y q 0 1000 2000 3000 4000 Flow rate L/min (ANR) Component parts Material No.

Precision Clean Regulator

2 1 Body Stainless steel 316L 2 Valve guide Stainless steel 316 ARM 3 Spacer PPS e !1 ARP 4 Bonnet PPS 5 Knob PBT IR-A i o Electroless nickel plated 6 Set nut ZDC 7 Valve spring Stainless steel 316 IR 8 Main valve Ceramics !

Stations: 05 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: Q (Vacuum Pump System), Pressure Switch for Vacuum/Pressure Sensor: E (Digital Pressure Switch for Vacuum, -100 to 100, NPN 2 Outputs, with Unit Selection Function), Leadwire: without Leadwire, Unit Options: C [Vacuum Pump System PE Port Female Thread

Model: 10S3 (Side-Ported, Serial Interface), SI Unit Specification: Q (DeviceNetâ„¢), Valve Stations: 16 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block Assembly: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/o DIN Rail with Bracket)

Model: 10S3 (Side-Ported, Serial Interface), SI Unit Specification: Q (DeviceNetâ„¢), Valve Stations: 16 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block Assembly: R (External Pilot), A, B Port Size: C6 (ø6 One-touch Fitting)

Model: 10S3 (Side-Ported, Serial Interface), SI Unit Specification: Q (DeviceNetâ„¢), Valve Stations: 10 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block Assembly: R (External Pilot), A, B Port Size: C6 (ø6 One-touch Fitting)

Model: 10S3 (Side-Ported, Serial Interface), SI Unit Specification: Q (DeviceNetâ„¢), Valve Stations: 8 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block Assembly: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/o DIN Rail with Bracket)

Model: 10S3 (Side-Ported, Serial Interface), SI Unit Specification: Q (DeviceNetâ„¢), Valve Stations: 8 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block Assembly: S (Internal Pilot/Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/o DIN Rail with Bracket)

Model: 10S3 (Side-Ported, Serial Interface), SI Unit Specification: Q (DeviceNetâ„¢), Valve Stations: 8 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block Assembly: S (Internal Pilot/Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: Individual EXH, Specifications: Standard, Rated Voltage: 5 (24VDC), Lead Wire: WO (M8 Connector - Without Connector Cable), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Manually Operated), Port Size: w/o Subplate, Bracket: None, CE-Compliant: Q (CE-Compliant)

Size/Valve Type: E (Size: 32A; Valve Type: N.O.), Body/Port/Orifice: Q (Body Material: CAC407; Port Size: 32A Flange, Orifice Dia.: 35), Voltage/Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2A (24VDC; DIN Terminal w/Surge Voltage Suppressor & Light)

Magnet: D (Built-in Magnet), Mounting: E (Integrated Clevis), Bore Size: 20mm, Port Thread: Rc, Stroke: 75mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Pivot Bracket: N (Pivot Bracket), Rod End Bracket: Q (Rod End)

Symbol: 10R6 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 3 OUT), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: E (Plate: PFA; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2U (PFA, 1/4-28UNF), Option: None, Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)