SMC Corporation of America
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How to Order T 01 S AS 2 0 0 2 JIS Symbol Tamper proof Note) Speed controller requires a special tool for flow adjustment. Order separately with part number, AS-T-1. With seal Note) When connecting port is either M5 or 10-32 UNF thread, it is not available with seal. With gasket is provided as standard.

0 !0 t t r i u w y e q r i w e q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

O R LESS H YSTERESI S 0. 5% F. S. O R LESS PREPEATABI LI TY 0. 5% F. S. O R LESS SEN SI TI VI TY 0. 2% F. S.

Press the or button in function selection mode to display [F 0]. Press the button. Move on to display unit selection. Display unit selection Press the or button to select the display unit. Press the button to set. Return to function selection mode. [F 0] Units selection function completed Available display unit and minimum set value Part No.

-25No.PS-OML0002CN-G [F 0] (kPa/MPa) <> [F 0] ZSE ZSE [F 0] ZSE30AF ZSE30A ISE30A MPa 0.001 0.001 0.001 kPa 0.1 0.1 1 kgf/cm 2 0.001 0.001 0.01 bar 0.001 0.001 0.01 psi 0.01 0.01 0.1 InHg 0.1 0.1 mmHg 1 1 -26No.PS-OML0002CN-G [F 1] OUT1 OUT1 ONON OUT1ON,OFF 29 <> [F 1] 22 [P_1] [n_1]"P""n" [P_1] [P1L][P1H] -27No.PS-OML0002CN-G ON OFF ON OFF [F 1] OUT1 1 2 2 -28No.PS-OML0002CN-G

Sizes 10, 15 Sizes 20, 30, 40 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Flat Key Port B Port B 0 0 0 0 0 19 1 1 0 to to to 19 0 Port A 0 0 8 8 Port A to e 17 at g 0 n fl ra e 17 of ng n o e at ra ti g ta n fl ra ro on of e n Angle adjustment 5 Angle adjustment 5 ov io ti at e o ta gr ot ng R ey ro K ra ve n oo io at

0 100 200 300 400 500 600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 Flow rate l/min(ANR) Flow rate l/min(ANR) ARX21-01 ARX21-02 0.35 0.35 0.30 0.30 Downstream pressure MPa Downstream pressure MPa 0.25 0.25 0.20 0.20 0.15 0.15 0.10 0.10 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR

0 100 300 400 200 500 0 0 100 300 400 200 500 Flow rate [L/min(ANR)] Flow rate [L/min (ANR)] IW215 Flow rate characteristics IW222 Flow rate characteristics Supply pressure: 0.7 MPa 0.5 0.45 0.4 0.35 0.3 0.25 0.2 0.15 0.1 0.05 0 0 100 300 400 200 600 500 Supply pressure: 0.5 MPa 0.25 0.2 Set pressure [MPa] Set pressure [MPa] 0.15 0.1 IP 0.05 IW IW 0 0 100 300 400 200 500 Flow rate [L/min(

Movement mode Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position 0 1: Absolute 100 10 3000 3000 0 0 0 100 0 0 0.50 1 1: Absolute 100 100 3000 3000 0 0 0 100 0 0 0.50 Sequence 1: Servo ON instruction Sequence 2: Instruction to return to origin Sequence 3: Specify step data No. 0 to input the DRIVE

0.0 0 10 20 30 Flow rate (slpm, N2) 4.30 (109.2) 3.25 (82.6) Clearance For Panel Mounting KT12HF 2000 psig (13.8 MPa) Inlet pressure: 1000 psig (6.9 MPa) 11.0 1600 9.7 1400 Delivery pressure (MPa) Delivery pressure (psig) 8.3 1200 2.97 (75.4) 6.9 1000 800 5.5 2.22 (56.4) 600 4.1 0.28 (7.1) 400 2.8 200 1.4 0 0.0 0 10 20 30 40 50 Flow rate (slpm, N2) 2.80 (71.1) Viton is a registered trademark

10 11 12 0 0 5 6 7 8 0 1 2 3 4 0 2 4 6 8 1 3 5 7 9 10 12 14 11 13 15 16 0 2 1 3 4 5 6 7 8 9 Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] 6 AFF/AM/AMD Series Micro Mist Separator AMD Series Standard Specifications Model AMD70D AMD80D AMD90D Fluid Compressed air Operating pressure range [MPa] 0.1 to 1.0 Ambient and fluid temperatures [C] 5 to 60 (No

AS2052FS AS1002FS AS2002FS Inlet pressure: 0.5 MPa 500 Inlet pressure: 0.5 MPa 100 08, 09 Inlet pressure: 0.5 MPa 06, 07 01, 23, 03, 04, 06, 07 Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] 200 400 06, 07 03, 04 300 50 100 200 100 0 0 5 10 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002FS AS4002FS Inlet pressure

0 CE2 Operating direction IN Operating direction OUT 2.0 2.0 Clean gas filter Operating direction IN Operating direction OUT 1 ML2B 60 Clean bench (Class 100) 40 Displacement waveform C J G5-S 0.1 Supply rate 28.3 l/min Exhausted by relief port Displacement waveform 20 20 20 sec. 20 sec. 0 CV 0 Laser dust monitor (intake rate 28.3 l/min) 0.01 0.01 0.1 1 10 Particle diameter (m) Time Time

BMG2-012 928 Parallel Type Wide Opening Air Gripper MHL2 1122Dimensions 1122MHL2-10D 2 x M4 x 0.7 thread depth 5 (Mounting thread) D C A B 2 x 4.5 through (Hole for mounting body) 9 +0.025 3H9 0 depth 3 34 When closed E When closed J 4 4 x M4 x 0.7 thread depth 8 (Mounting thread) K cross view (Closed) +0.025 3H9 0 depth 3 +0.043 18H9 0 depth 1.5 44 M5 x 0.8 (Finger opening port) Auto switch

to 60C (No freezing) Ambient and fluid temperature +8 0 +10 0 +8 0 +10 0 +8 0 +10 0 +8 0 +10 0 90, 180 90 , 100 180 , 190 90, 180 90 , 100 180 , 190 Note) Rotating angle 5 at each rotation end 5 at each rotation end Angle adjustment range Cylinder bore size 6 8 Port size M3 x 0.5 Note) If optimum accuracy of the (rotating) angle is required, select an actuator with external stopper.

(Panel adaptor A+Panel adaptor B) ZS-22-A Standard Specifications Positive pressure Item Vacuum 1OOkPa{1.02kgticm2} type 1MPa{IO.2kgl/cm1 ~pe Panel adaptor A Z$2201 Model ZSE4B ZSE4B I ZSE4B ISE4LB ISE4LB I ISE4LB ISE4B ISE4B ISE4B -0-25 -0 -26 -0 -65 -Ql-25 -0-26 -0-65 -0-25 -0-26 -0 -65 Switch Pressure 10 -101kPa 1 0 1OOkPa -0.1 1MPa Panel adaptor B ZS-22-02 ; display range {75 -760mmHgl

6 e q #5 #4 $9 $1 $0 ^1 ^0 $7 $8 ^0 !2 #2 @4 !3 %0 %1 %2 !0 @2 ^3 @1 #3 ^6 $6 %3 @6 $5 ^2 %5 %6 @5 $4 ^0 $3 #1 ^5 %7 @8 $2 o %8 ^7 #0 %9 ML2BS %4 ^4 !

0 !1 !0 !1 !2 w !2 w !3 !4 !5 With reducer Tube extensions e t y r i u q o !1 !0 !2 w Component parts No.