TA301

VVTA300 05 1 01 Exhaust type Thread type Stations 02 1 Nil F N T 2 stations Individual exhaust 3 Common exhaust Rc G NPT NPTF For manifold Caution 20 20 stations 1. Each valve is fixed on the manifold with two M4 mounting screws. Please tighten the screws properly when valves are reassembled. Screw tightening torque: 1.4 Nm 2.

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Bore size(mfn) Standard stroke(mm) MGOftl Slide bearing MGor12, rc 10, 20, 30, 40, 50 MGOr2o,2s 20, 30, 40, 50, 75, 100 25, 50, 75, 100 MGOL Ball bush bearing MGOr32,40, 50, 63, 80,1OO . intermediate stroke As to intermediate stroke (5, 10, 15, 20, 30, 35 )' spacer of 5, 10' 15,20mm width will be used (Example) MGOM50-10 is produced by installing 1smm spacel in MGQM50'25 Consult factory when

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N4-18 NCQ2, Series NCQT 200 PSI (14 kgf/cm') -20-150.F (-25 -65"C) 2 20 inch/sec (50-500mm/sec) FEATURES 1) The NCQT Series cylinder gives a shorter, lighter and more compact package for a given stroke. 2) The unique shape enables the use of rail-mounted switches without significantly increasing the overall length. .

ø 32, ø 40, ø 50, ø 63 Compact Cylinder With Solenoid Valve Series CVQ

Valve Specifications Caution Do not separate the cylinder from the valve.

Bag Filter FGF Series

Specifications FGF1B-20 FGF3A-40 Note 7) FGF3B-40 Note 7) FGF5A-60 Note 7) FGF5B-60 Note 7) Model FGF1A-20 Operating pressure Operating temperature Maximum flow rate Note 1) Max. 0.5 MPa Max. 80C (For with pressure gauge: 60C or less) Common Approx. 400 L/min Approx. 1200 L/min Approx. 2000 L/min Applicable fluid Note 2) Water-soluble coolant, Weak alkali-based cleaning fluid, Industrial

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

Note 9) Panel dimensions.These dimensions do not include possible protrusions such as a breaker handle. Note 10) Weight in the dry state without circulating fluids 108

ZPT

06 6 08 8 10 10 13 13 16 16 20 20 1 8 NPT N01 1 8 NPTF T01 1 8 25 25 32 32 40 40 50 50 Material Pad type (Refer to Table (1) for applications.)

Large Capacity Compressed Air Filters Series AFW

Temperature 45.30 38.30 8-5/8 2 18 215 AFW1400-N30FGM-E* 1,400 48.20 38.40 10.80 3 18 326 4 AFW2100-N40FGM-E* 2,100 50.30 39.30 12.80 4 20 439 AFW2800-N60FGM-E* 2,800 6 50.30 39.30 12.80 5 20 439 AFW3500-N60FGM-E* 3,500 54.30 40.40 14 6 20 536 AFW4200-N60FGM-E* 4,200 E D EL-AFW700-E* 55.10 40.60 16 8 24 647 AFW5600-N80FGM-E* 5,600 232 psi 32 8 250F 58.10 40.60 18 10 28 778 AFW7000-N80FGM-E

Air Cylinder/Direct Mount Type: Double Acting, Single Rod Series CG1R

Tube gasket NBR CG1N32-PS Valve seal CG1N40-PS Valve retainer gasket With air cushion CG1A20-PS 20 25 32 40 CG1A20-PS CG1A25-PS CG1A32-PS CG1A40-PS Disassembly/Replacement CG1A25-PS Set of left nos. @2, @3, @4, @5, @6. Caution CG1A32-PS CG1A40-PS 1. Do not replace the bushings. The bushings are press-fit. To replace them, they must be replaced together with the cover assembly. 2.

Air Cylinder/Standard Type: Double Acting, Double Rod Series CG1W

9 @0 @1 With rubber bumper Rod seal Piston seal CG1WN20-PS 20 25 32 40 CG1WN20-PS CG1WN25-PS CG1WN32-PS CG1WN40-PS CG1WN25-PS Set of left nos. !7, !8, !9. Tube gasket NBR CG1WN32-PS Valve seal CG1WN40-PS Valve retainer gasket With air cushion CG1WA20-PS 20 25 32 40 CG1WA20-PS CG1WA25-PS CG1WA32-PS CG1WA40-PS Disassembly/Replacement CG1WA25-PS Set of left nos. !7, !8, !9, @0, @1.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

TB W Counter bore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60

Air Cylinder NCQ7 Series Compact Cylinder

N4-18 NCQ2, Series NCQT 200 PSI (14 kgf/cm') -20-150.F (-25 -65"C) 2 20 inch/sec (50-500mm/sec) FEATURES 1) The NCQT Series cylinder gives a shorter, lighter and more compact package for a given stroke. 2) The unique shape enables the use of rail-mounted switches without significantly increasing the overall length. .

HEP500-04 Liquid Collector Ejector Type

Additionally, do not put the tube end in the liquid. This may cause the back pressure to be applied, resulting in poor performance. 3.Liquids cannot be collected by the air. 1076 A

Manifold Specifications

Flow Characteristics at the Number of Manifold Stations (Operated single/double type individually) Passage/Stations Station 1 Station 5 Station 10 Station 15 Station 20 2.7 0.15 0.62 2.8 0.10 0.65 C [dm3/(sbar)] b Cv 2.7 0.16 0.61 2.8 0.12 0.66 2.7 0.16 0.61 2.9 0.12 0.66 2.7 0.15 0.61 2.9 0.12 0.66 2.6 0.20 0.63 2.9 0.12 0.66 1 4/2 (P A/B) C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Manifold

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Tube gasket NBR CG1N32-PS Valve seal CG1N40-PS Valve retainer gasket With air cushion CG1A20-PS 20 25 32 40 CG1A20-PS CG1A25-PS CG1A32-PS CG1A40-PS Disassembly/Replacement CG1A25-PS Set of left nos. @2, @3, @4, @5, @6. Caution CG1A32-PS CG1A40-PS 1. Do not replace the bushings. The bushings are press-fit. To replace them, they must be replaced together with the cover assembly. 2.

08-cg1w-e

9 @0 @1 With rubber bumper Rod seal Piston seal CG1WN20-PS 20 25 32 40 CG1WN20-PS CG1WN25-PS CG1WN32-PS CG1WN40-PS CG1WN25-PS Set of left nos. !7, !8, !9. Tube gasket NBR CG1WN32-PS Valve seal CG1WN40-PS Valve retainer gasket With air cushion CG1WA20-PS 20 25 32 40 CG1WA20-PS CG1WA25-PS CG1WA32-PS CG1WA40-PS Disassembly/Replacement CG1WA25-PS Set of left nos. !7, !8, !9, @0, @1.

D(mm): 8, Inner Tube I.D. d(mm): 5, Outer Layer Color: Black, Material: Inner Tube: Polyurethane / Outer Layer: Polyolefin-Type Resin (UL-94 Standard V-0 Equivalent), Maximum operating pressure(MPa): 0.8 (at 20°C), Operating Temperature(°C): -20 to +60, With Water: 0 to +40 (Do Not Freeze)

D(mm): 8, Inner Tube I.D. d(mm): 5, Outer Layer Color: Blue, Material: Inner Tube: Polyurethane / Outer Layer: Polyolefin-Type Resin (UL-94 Standard V-0 Equivalent), Maximum operating pressure(MPa): 0.8 (at 20°C), Operating Temperature(°C): -20 to +60, With Water: 0 to +40 (Do Not Freeze)

D(mm): 8, Inner Tube I.D. d(mm): 5, Outer Layer Color: Green, Material: Inner Tube: Polyurethane / Outer Layer: Polyolefin-Type Resin (UL-94 Standard V-0 Equivalent), Maximum operating pressure(MPa): 0.8 (at 20°C), Operating Temperature(°C): -20 to +60, With Water: 0 to +40 (Do Not Freeze)

D(mm): 8, Inner Tube I.D. d(mm): 5, Outer Layer Color: Red, Material: Inner Tube: Polyurethane / Outer Layer: Polyolefin-Type Resin (UL-94 Standard V-0 Equivalent), Maximum operating pressure(MPa): 0.8 (at 20°C), Operating Temperature(°C): -20 to +60, With Water: 0 to +40 (Do Not Freeze)