Clean Gas Filter

Port size Port size Rc, NPT, TSJ, UOJ Female thread 1/4 M5 02 M5 Symbol Connection Bracket is included as a standard.

Low torque Metal seal type Rotary joint

Model MQR1-M5 MQR2-M5 MQR4-M5 MQR8-M5 MQR12-M5 Number of circuits 1 2 4 8 12 Operating fluid Air / Inert gas Seal structure Metal seal Guide structure Bearing supported Bearing supported at both ends Port size Male R1/8 Female M5 x 0.8 M5 x 0.8 Flow rate C[dm3/(s.bar)] b Cv characteristics 0.50 0.40 0.17 Lubrication Not required Min. operating pressure -100kPa Max. operating pressure 1.0MPa

Pressure Control Equipment

1 Pressure Control Equipment Regulators Series Application/Characteristics Port size Set pressure (MPa) Option Page Miniature regulator ARJ1020F Direct operated relieving type Back flow function Manifold M5 0.1 to 0.7 14-4-4 1 8 / 14-4-6 Miniature regulator ARJ210 Direct operated relieving type Bracket Pressure gauge M5 to 0.2 to 0.7 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

The connection M5 thread. Tighten thread to recommended torque value. 3. After installation, check internal leakage (leakage across seat) with inert gases. Perform a helium leak test depending on applications. Maintenance Warning 1.

Metering Valve with Silencer Series ASN2

Metering Valve with Silencer Series ASN2 Superior sound reducing performance Over 20 dB at max. flow rate Cylinder speed easily set Shape of needle is the same as that of speed controller Retainer prevents accidental loss of needle Model Model Port size Effective area (mm 2) Weight (g) ASN2-M5 ASN2-U10/32 ASN2-01 ASN2-02 ASN2-03 ASN2-04 M5 x 0.8 10-32 UNF 1.8 1.8 3.6 6.5 16.6 24.5 5 5 17

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Appropriate clamping torque (Nm) 0.18 to 0.25 1.13-3 4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000 How to Order L 1 5 5 VQD11 Body Sub-plate port size 2 3 5 M5 thread Without sub-plate (Manifold) M5 thread Body ported Body ported (Single unit) Body ported (Manifold) Base mounted M5 Base mounted M5 Valve option Electrical entry Standard (2W) Vacuum (2W) Large flow (4W) Large

CJ2

A1 L1 MM NX NDH10 R1 U1 Dd9 d L m t l 3 15.2 12.2 CD-J010 10 1.2 0.3 Type C 3.2 3.3 0.030 0.060 CM2 10 4.8 22.7 18.3 CD-Z015 16 I-J010B 10 CD-J010 1.5 0.7 Type C 5 8 21 M4 x 0.7 3 15.2 12.2 1.2 0.3 Type C 3.2 5.3 3.3 3.3 +0.048 0 0.030 0.060 0.030 0.060 3.1 8 9 CD-JA010 16 3 18.2 15.2 10 I-J016B 16 IY-J015 1.2 0.3 Type C 3.2 8 25 M5 x 0.8 4.8 16.6 12.2 1.5 0.7 Type C 5 3.3 5.3 5.3 +0.048

Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: C (NPN Open Collector 1 Output+Analog Voltage), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: No Lead Wire, Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]

Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: C (NPN Open Collector 1 Output+Analog Voltage), Unit Specifications: P (Unit Switching Function, Initial Value psi, Not Allowed for Use in Japan)

Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: C (NPN Open Collector 1 Output+Analog Voltage), Unit Specifications: M (Fixed SI Unit, kPa)

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: C (NPN Open Collector 1 Output+Analog Voltage), Unit Specifications: P (Unit Switching Function, Initial Value psi, Not Allowed for Use in Japan), Lead Wire: No Lead Wire, Adapter: D (Panel Mount Adapter+Front Protective Cover)

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: C (NPN Open Collector 1 Output+Analog Voltage), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: No Lead Wire, Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: C (NPN Open Collector 1 Output+Analog Voltage), Unit Specifications: M (Fixed SI Unit, kPa)

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: C (NPN Open Collector 1 Output+Analog Voltage), Unit Specifications: P (Unit Switching Function, Initial Value psi, Not Allowed for Use in Japan), Lead Wire: No Lead Wire, Adapter: None, Calibration Certificate: K (w/Certificate)

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: C (NPN Open Collector 1 Output+Analog Voltage), Unit Specifications: P (Unit Switching Function, Initial Value psi, Not Allowed for Use in Japan)

Type: Pressure Switch, Fluid Type: Air, Sensor, Monitor Structure: [Integrated Type] Integrated shape, Analog Output Specification: Voltage, Pipe Port Type: Female Thread, Plumbing Thread Type: M, Plumbing Thread Nominal: M5x0.8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 1.5, Operating Temperature Range(°C): -5～50, Operating Humidity Range(%): 35～85, Number

Type: Pressure Switch, Fluid Type: Air, Sensor, Monitor Structure: [Integrated Type] Integrated shape, Analog Output Specification: Voltage, Pipe Port Type: Female Thread, Plumbing Thread Type: M, Plumbing Thread Nominal: M5x0.8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 1.5, Operating Temperature Range(°C): -5～50, Operating Humidity Range(%): 35～85, Number

Type: Pressure Switch, Fluid Type: Air, Sensor, Monitor Structure: [Integrated Type] Integrated shape, Analog Output Specification: Voltage, Pipe Port Type: Female Thread, Plumbing Thread Type: M, Plumbing Thread Nominal: M5x0.8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 1.5, Operating Temperature Range(°C): -5～50, Operating Humidity Range(%): 35～85, Number

Type: Pressure Switch, Fluid Type: Air, Sensor, Monitor Structure: [Integrated Type] Integrated shape, Analog Output Specification: Voltage, Pipe Port Type: Female Thread, Plumbing Thread Type: M, Plumbing Thread Nominal: M5x0.8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 1.5, Operating Temperature Range(°C): -5～50, Operating Humidity Range(%): 35～85, Number

Type: Pressure Switch, Fluid Type: Air, Sensor, Monitor Structure: [Integrated Type] Integrated shape, Analog Output Specification: Voltage, Pipe Port Type: Female Thread, Plumbing Thread Type: M, Plumbing Thread Nominal: M5x0.8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 1.5, Operating Temperature Range(°C): -5～50, Operating Humidity Range(%): 35～85, Number