LEJ-OM004xx

S2 (8) Cable length [m] LECSS2S 200 to 230 *4 *7 Nil Without cable (10) I/O Connector 2m 2 Without connector Nil 5m 5 With connector H A 10m *7The motor, encoder and lock cables are combined. 6 - 4.Construction Parts list No. Parts name Material Remarks No.

1.63

7 MGG MGC MGF Over 100 stroke MGZ MGT Component Parts Component Parts No. Description Material Note Ball bushing Spacer Piston seal Rod seal Gasket A Gasket B No.

3-Position Rotary Table

7 @5 !1 #0 t u r w @3 !9 MSZAA (High precision type) $1 e $0 @7 @1 @9 !0 !2 #2 !6 !4 @4 #3 !8 #7 #8 o #6 q #9 y i $2 @3 @2 #1 @6 #4 #5 Component Parts Note Anodized Nickel plated Chromated Note No.

Clean Gas Filter

Assembly environment Clean room: M5.5 (ISO class 7) Clean booth: M3.5 (ISO class 5) Fed.std.209E ( ): based on ISO 14644-1 High precision filtration 0.01 m filtration (filtering efficiency of 99.99%) is realized with the PTFE membrane cartridge element.

Lubrication Equipment

7 7 7 C 16 16 30 30 B 70 70 108 108 Model A 174 174 234 234 ALT-5 ALT-5-IS ALT-9 ALT-9-IS 449 482 1.17-14 Oil Distributor VA, VB/Nylon Tubing Related Products Oil Distributor Series VA, VB How to Order V A 4 6 Applicable tube O.D. 6 6 Oil Distributor Number of distribution ports (VA) (VB) VB6-6 Distribution 4 ports 6 ports 8 ports 4 ports 6 ports 10 ports 16 ports 4 6 8 4 6 10 16 Both sides

IR1000/2000/3000

Recommended proper torque Nm (kgfcm) 1/8 1/4 3/8 1/2 Connection thread 7 to 9 (70 to 90) 12 to 14 (120 to 140) 22 to 24 (220 to 240) 28 to 30 (280 to 300) Winding direction Torque Expose approx. 2 threads Pipe tape Operating Environment Warning 1.

ITV0000

When the monitor output (analog output) is not being used, keep the monitor output wire (black) from touching the other wires as this can cause a malfunction. 7. Be aware that the right angle cable does not rotate and is limited to only one entry direction. 8.

KA

Refer to p.0-26 and 0-27 for Safety Instructions and common precautions on the products mentioned in this catalog, and refer to p.2.0-7 and 2.0-8 for more detailed precautions of every series.

MGZ Series

Measures should be taken to protect against human injury and equipment damage in the event that there is a loss of power to equipment controlled by air pressure, electricity or hydraulics, etc. 7. Design circuitry to prevent sudden lurching of driven objects.

AMP

The equipment may be deformed or damaged, and if balance is lost, a fall may cause injury. 7 Series AMP Specific Product Precautions Be sure to read before handling. Refer to pages 5 through 7 for safety instructions and air cleaning equipment precautions. Mounting Supply Air Caution Caution 1. Air piping should be thoroughly flushed before mounting. 1.

CYP

The tightening torque should be approximately 0.05 to 0.1Nm. 7 Reed Switches/Direct Mount Type D-Z73/Z76/Z80 Auto Switch Specifications With indicator light D-Z73 D-Z76 Auto switch part no.

3 Port Solenoid Valve Rubber Seal Series SY100 1

SY1 4, SY1 4A only 1 2 1 2 4-3-6 7 Series SY100 Construction SY114, SY114A (A) 2 3 (R) i q y e r w V100 SY SYJ VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT VP A R P !1 o u t !0 VG VP S070 VQ VKF Part no.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(For type 20, 41, 42 and 45) Pilot pressure range SS5YA Fill the same as SS5Y . 3 5 7 3 5 7 Pilot pressure MPa Specify the part numbers for valves and options together beneath the manifold base part number. (Example) SS5YA5-42-03-02 1 set (Type 42, 3 station manifold base part no.) SYA5140 1 set (Single air operated valve part no.) SYA5240 1 set (Double air operated valve part no.)

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

End Lock Cylinder Series CBG1

(Refer to pages 4 through 7 for dimensions.) Note 2) Long strokes are applicable to the axial foot type and front flange type. In case of other mounting brackets or when long stroke limits are exceeded, the maximum useable stroke is determined with the stroke selection table. (Refer to series CG1 catalog E216-B page 45.)

Rodless Cylinder for Vacuum Series CYV ø15, ø32

9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

Modular Type Regulator Series AR

7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 18 25 26 31 35.5 37 T 18.5 28.5 32.5 38.5 42.5 42.5 U 14 16 19 21 21 AR10 AR20 AR25 AR30 AR40 AR40-06 AR50 AR60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 0 3.5 3.5 3 3.3 3.3 Note) For AR20 only, the position of the pressure gauge is above the center of the piping. 40 Regulator AR20 to 60 Made to Order Specifications Contact

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Flat type/CJ-CF MM Double clevis type cylinder A 7 TH 4-TC C0.5 +0.2 0 TU D D 0.1 0.3 TN 12 C0.5 N W L TX TV TK Round type/CJ-CR MM TDH10 A TY TT C0.5 TW RR L N Material: SUS304 W Part no.