Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

D C B A 91 Series LTF Construction Construction LTF6/LTF8 e t w !0 i r !3 q !4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

Manifold Regulator Modular Type ARM2500/3000 Series

SRF Flow rate (L/min (ANR)) Example of mounting ITV Pressure Characteristics (Representative Value) Initial setting P1 = 0.7 MPa P2 = 0.2 MPa Q = 20 L/min (ANR) Bracket IC ITVH Set nut Outlet pressure (MPa) ITVX PVQ VY1 VBA VBAT Model Part no.

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

Slit Valve

The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

In-line Air Filter

Applicable filter Element size Quantity ZFC-EL-1 ZFC1 5 x 3 x L11 10 ZFC-EL-2 ZFC3 6 x 4 x L25 10 2 Cover Resin PBT 2 ZFC-EL-3 ZFC5 12 x 8 x L20 10 3 Element Sintered resin 1 ZFC-EL-4 ZFC7 16 x 12 x L25 10 4 O-ring HNBR 2 5 Bracket Resin PBT 1 w OUT e w One-touch fitting r q IN r One-touch fitting t Element Replacement Procedure 1.

ZSE5/ISE5

~~===rr-N"~e-_ ~~ =4It PNP, and analog output.

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: Q (DeviceNetâ„¢), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: 1 Station, Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A,B Port Size: N1 (ø1/8" One-touch Fitting), Mounting: D (DIN Rail Mounting

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: Q (DeviceNetâ„¢), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: 1 Station, Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A,B Port Size: N1 (ø1/8" One-touch Fitting), Mounting: D (DIN Rail Mounting

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, VALVE, SOL, VALVE, VG/VGA VALVE, JA, VG BODY PT 1/2, 2.55736 lb

(normally open) by merely turning over the switch cover. 3 Port Direct Operated Poppet , Rubber Seal , Single Valve with Various Valve Functions, Low Concentration Ozone Resistant, VALVE, SOLENOID, VG342 PILOT, 3 PORT SOLENOID VALVE, 0.1791 lb

70pvpump

Refer to the brand names table given below for ISO VG342 sold by each company. 2. Do not lubricate the air operated type.

(normally open) by merely turning over the switch cover. 3 Port Direct Operated Poppet , Rubber Seal , Single Valve with Various Valve Functions, Low Concentration Ozone Resistant, VALVE, SOLENOID, VG342 PILOT, 3 PORT SOLENOID VALVE, K28, 0.1776 lb

(normally open) by merely turning over the switch cover. 3 Port Direct Operated Poppet , Rubber Seal , Single Valve with Various Valve Functions, Low Concentration Ozone Resistant, VALVE, SOLENOID, VG342 PILOT, 3 PORT SOLENOID VALVE, K28

(normally open) by merely turning over the switch cover. 3 Port Direct Operated Poppet , Rubber Seal , Single Valve with Various Valve Functions, Low Concentration Ozone Resistant, VALVE, PILOT, VG342, 3 PORT SOLENOID VALVE, 0.1776 lb

br>① 2/3-port valves for fluid control
(VX2, VXD, VXV, SXV, XP, VXR, XV, VXED, VXEZ, VDW, VNA/VNB, and VQ20/VQ30)
② 3-port solenoid valves
(V100, S070, VT307, VT317, VT325, VK300, SYJ, VQZ, VP300/VP500/VP700, VG342

Replaceable pilot valve: SY, SYJ, VF, VFR, VFS, VP4□50/4□70, VP300/500/700, VG342, and VP3145/3165/3185 series
Replaceable solenoid assembly: VT317 series

The pilot valve or solenoid assembly of the following series is NOT replaceable.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Pilot: Internal Pilot, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 3/4, Thread: NPT, Passage: Normally Closed, Option: Standard, CE Compliant: CE Compliant

Pilot: Internal Pilot, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 3/4, Thread: NPT, Passage: Normally Closed, Option: Standard, CE Compliant: CE Compliant

Pilot: Internal Pilot, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor, Port Size: 1, Thread: NPT, Passage: Normally Closed, Option: Standard, CE Compliant: CE Compliant