Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SHP (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Range Options: Standard, Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port Inlet; 4-Gauge Port Outlet)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections,

HRX-OM-W038

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check items after starting . 4-8 4.6 Adjustment of Circulating Fluid . 4-8 Chapter

HRX-OM-X027

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of circulating fluid . 4-3 4.4 Starting and Stopping . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check items after starting . 4-8 4.6 Adjustment of Circulating Fluid . 4-8 Chapter

CJ2X

wire 24 V Connector Diagnostic indication (2-color indication) Grommet 3-wire (PNP) 3-wire (NPN) IC circuit 5 V, 12 V Grommet 2-wire 12 V Relay, PLC Connector Yes 24 V 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indication) IC circuit 3-wire (PNP) Grommet 2-wire 12 V With diagnostic output (2-color indication) 4-wire (NPN) IC circuit 5 V, 12 V Solid state switches marked

KK/KK13

Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no.

44

KFG2L0425-01 KFG2L0425-02 KFG2L0403-01 KFG2L0403-02 KFG2L0604-01 KFG2L0604-02 KFG2L0806-01 KFG2L0806-02 KFG2L0806-03 KFG2L1075-02 KFG2L1075-03 KFG2L1075-04 KFG2L1008-02 KFG2L1008-03 KFG2L1008-04 KFG2L1209-02 KFG2L1209-03 KFG2L1209-04 KFG2L1210-02 KFG2L1210-03 KFG2L1210-04 KFG2L1613-03 KFG2L1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2

IDX-OM-P026E

.2 2 2. 2. 1 Environment.2 2 2. 2. 2 Fixing of product .2 3 2. 2. 3 Pneumatic piping .2 4 2. 2. 4 Draining piping.2 4 2. 2. 5 Electric wiring.2 5 2 . 3 Reinstallation of the product .2 7 Chapter 3 Start and stop 3 . 1 Before starting .3 1 3 . 2 Start.3 1 3 . 3 Stop.3 2 3 . 4 Precautions for restarting operation .3 2 3 . 5 Check items after starting .3 2 3 . 6 Signal output .3 2 Chapter 4

IDX-OM-P023E

2 . 2 Installation . 2 2 2. 2. 1 Environment . 2 2 2. 2. 2 Fixing of product . 2 3 2. 2. 3 Pneumatic piping . 2 4 2. 2. 4 Draining piping . 2 4 2. 2. 5 Electric wiring . 2 5 2 . 3 Reinstallation of the product . 2 7 Chapter 3 Start and stop 3 . 1 Before starting . 3 1 3 . 2 Start . 3 1 3 . 3 Stop . 3 2 3 . 4 Precautions for restarting operation . 3 2 3 . 5 Check items after starting . 3 2

EXxx-OMN0037CN

Nm (2)2 (M414)(EX600-ZMA2) 0.70.8 Nm (3)DIN DIN (4)DIN DIN (5)(M420)(EX600-ZMA2) 0.70.8 Nm -13No.EX-OMN0037CN-A M12 M8 M12 SPEEDCON SPEEDCON (1)(/)BA (2)C (3)B180(1/2) (1) (2) (3) (EX600-ZT1) -14No.EX-OMN0037CN-A EX600-AX A M12 (5 )2 2 M12 (4 ) No. 1 LED 2 () 3 4 5 () -15No.EX-OMN0037CN-A 1 24 V() 2 + 3 0 V() 4 5 FE M12 (4 ) 1 24 V 2 A/D DC24 V 3 0 V 4 5 FE FE

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

4 r e !0 !1 q i !2 o !3 y Component Parts No.

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

wire 12 V Diagnostic indication (2-color indicator) Water resistant (2-color indicator) 100 V 3-wire (NPN) Relay, PLC IC circuit 5 V, 12 V Grommet 24 V 3-wire (PNP) 2-wire Yes 12 V 3-wire (NPN) IC circuit 5 V, 12 V M9PA1 M9PAV1 3-wire (PNP) 2-wire M9BA1 M9BAV1 12 V 5 V 12 V Relay, PLC Z76 Z732 A96 A93 A90 IC circuit 3-wire (NPN equivalent) Yes Grommet 24 V 2-wire No Z80 IC circuit 100

IZN10_C

IZ*-OMS0001 : : IZN10 IZN10 IZN10 IZN10 0120-837-838 9:00~1700~ -1- 1. 1. 1. 1. 3 3 3 3 2. 2. 2. 2. 5 5 5 5 3. 3. 3. 3. 6 6 6 6 4. 4. 4. 4. 4 4 4 4-1. 1. 1. 1. 7 7 7 7 4 4 4 4-2. 2. 2. 2. 10 10 10 10 4 4 4 4-3. 3. 3. 3. 16 16 16 16 4 4 4 4-4. 4. 4. 4. 17 17 17 17 4 4 4 4-5. 5. 5. 5. 17 17 17 17 5. 5. 5. 5. 18 18 18 18 6. 6. 6. 6. 20 20 20 20 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. 21 21 21 21 7

SI unit ( device)

bytes, COM3) 0.8 ms EX260-SIL1 (in/out 0/4 bytes, COM2) 3.4 ms Process data minimum cycle time EX260-SIL1 (in/out 2/4 bytes, COM3) 1 ms EX260-SIL1 (in/out 2/4 bytes, COM2) 5 ms 0 byte input/4 bytes output 2 bytes input/4 bytes output (2 bytes input: Device State) (selectable) Process data length Number of outputs 32 outputs Vendor ID 83 hex EX260-SIL1 (in/out 0/4 bytes, COM3) 158 hex EX260

3 Port Solenoid Valve Rubber Seal Series SY100 1

For blowing off 2. For vacuum control 3. For driving single acting cylinders 4.

MXH

4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Description Material Note Description Material No. q w No. !2 !3 !4 !5 !

Clean Air Module

LLB3 LLB4 Note ZFC Clean regulator assembly 1 LVB3-1 LVB4-1 SF Pressure outlet port assembly 2 LVB3-2 LVB4-2 Without flow adjuster LVB2-3 LVB4-3 ON/OFF valve assembly/ Air operated valve SFD 3 With flow adjuster LVB2-3-1 LVB4-3-1 ON/OFF valve assembly/Manual operation valve LVB2-3-2 LVB4-3-2 LLB LLB Restrictor assembly 4 LVB2-4 LVB4-4 LVB3-65 to 100 L/min With L-type connector

SI unit ( device)

bytes, COM3) 0.8 ms EX430-SIL1 (in/out 0/4 bytes, COM2) 3.4 ms Process data minimum cycle time EX430-SIL1 (in/out 2/4 bytes, COM3) 1 ms EX430-SIL1 (in/out 2/4 bytes, COM2) 5 ms 0 byte input/4 bytes output 2 bytes input/4 bytes output (2 bytes input: Device Status) (selectable) Process data length Number of outputs 32 outputs Vendor ID 83 hex EX430-SIL1 (in/out 0/4 bytes, COM3) 237 hex EX430

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: SH (Body: 316 SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Range Options: Standard, Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet

Delivery Pressure: 15 [5 to 150 psig (0.034 to 1.0 MPa)], Material: SH (Body: 316 SS; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Range Options: Standard, Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom