Compact and

rate 40 40 40 10 10 20 20 20 20 5 5 10 0 0 0 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 2 4 6 8 10 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 2 4 6 8 10 12 14 16 Suction flow rate [L/min(ANR)] Suction flow rate [L/min(ANR)] Supply pressure [MPa] Supply pressure [MPa] ZU07SA Exhaust Characteristics Exhaust Characteristics Flow Rate Characteristics Flow Rate Characteristics ZU07LA 100 80 100 50 60 50 Vacuum

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

Compact Vacuum Ejector Series ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 10

COQ2BP

Intermedial e stroke between 50-100 (55, 60, 65. ). are obtained through the use 01 spacers (5, 10. I S, 2Omm) (Example) CDOBPSo-55 OM: SMC would install a 2Qmm width spacer in the C002BP 50-750M. Not.. No. Auto Switch Mounting Bracket Part No. AutoPart Specifications Auld ..

AFF

Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5

ARJ1020F

VY1 How to Order G Port size (IN, OUT) PPA 1/8 (Male thread), M5 x 0.8 (Female thread) 1/8 (Female thread) IN OUT 01 AL ARJ 3 10 01 BG ARJ 3 10 F BG With One-touch fitting 04 01 Option Body size 0.7 MPa setting (Standard) 0.2 MPa setting (1) Nil 1 S Model With seal Relieving type 10 Note 1) Compared with standard specifications, its adjusting spring has been only changed for 0.2 MPa.

IDX-OM-W035

S 10 S 10-1 10-2 PE IDFB Series 10-1 10-1 IDX-OM-W035 11 T 11 T 11-1 IEC 11-2 AC200V / 2A DC24V / 2A ( 20V / 3mA) 11-3 ON ONOFF 3 () 5 /1 () 11-1 IDFB Series 11-1 IDX-OM-W035 11 T 11-4 IDFB22E/37E PE 1 2 3 0.25inch (6.5mm) (1.25mm 2) AWG14 (2mm 2) AWG16 (1.25mm 2) AWG14 (2mm 2) AWG16 IDFB Series 11-4 11-2 IDX-OM-W035 11 T IDFB55E/75E =M4X10 3 2 1 0.25inch (6.5mm) 0.4inch (

Return Filter FH100 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM FH FH HOW Model/Rated Flow Rate Model Port size (Rc) Rated flow rate (L/min) Micromesh Paper FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 60 50 1 100 80 1 1/4 150 120 1 1/2 200 160 2 300 260 2 1/2 550 450 3 700 600 Description Part no.

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

Shock Absorber Specifications RB1007 RB1412 RB2015 RB2725 Shock absorber model MGG20 MGG25, 32 MGG80, 100 Applicable guide cylinder MGG40,50,63 Maximum energy absorption (J) 5.88 19.6 58.8 147 Stroke absorption (mm) 7 12 15 25 DMaximum collision speed (m/s) 5 70 45 25 10 Max. operating frequency (cycle/min) -X Ambient temperature range ( C) 10 to 80 Individual -X 4.22 6.86 8.34 8.83 Spring

Compact Cylinder with Lock Double Acting, Single Rod Series CLQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order CLQ B F D 30 40 30 40 M9BW CDLQ D F B With auto switch With auto switch (Built-in magnet) Made to Order Mounting style Refer to page 817

MLU Standard Stroke MLGP Bore size (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Standard stroke (mm) ML1C 20, 25 32, 40, 50, 63, 80, 100 Manufacture of Intermediate Stroke Description Part no. Spacer is installed in the standard stroke body. Refer to How to Order for the standard model no. on page 816.

CEx-OMP0016

Hyrodless Monosashi-kun (with Stroke Adjustment Unit, X417) 31 Chapter 9: Construction / Parts List 32 Chapter 10: Cushion Capacity 10-1. Cushion Selection 33 10-2. Absorbing Capacity of Air Cushion, Stroke Adjustment Unit 34 10-3. Adjusting Method 35 Chapter 11: Stopping Operation 11-1. Over run 36 11-2.

CJ2Q

Low Friction: Double Acting Single Rod Series CJ2Q 10, 16 How to Order Bore size 10 16 10mm 16mm Mounting Basic Axial foot Front flange Double clevis Standard stroke (mm) B L F D 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 CJ2Q L 16 60 Standard L 16 60 C73 CDJ2Q With auto switch Number of switches With auto switch (Built-in magnet) 2 1 n S n Auto switch

VCW

) 10 is available only for N.C.

AC Servo Motor Driver (MECHATROLINK-II type)

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur. 2.

PSxx-OML0002CN

-2No.PS-OML0002CN-G 1 1.5 3) 3) 1 1 () [] -3No.PS-OML0002CN-G () () () () -4No.PS-OML0002CN-G () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL (100 10 ) JIS B 8392-1 11.1.21.6.2:2003 () -5No.PS-OML0002CN-G * / / ,FG (35N ) () () * () 6 33 () () 10 m DC(-)() () * -6No.PS-OML0002CN-G ( ) () CE 050(5), * ON , 1015 10 /1 2146 LCD * -7No.PS-OML0002CN-G 01 N ISE30A

Air Catch Sensor

The voltage variation must stay within the -10 to +10% range of the rated voltage.

VG342

DIN terminal Terminal 1 2 + + Pilot Valve Assembly Specifications Grommet (G), Grommet terminal (E), Conduit terminal (T), DIN terminal (D) Electrical entry How to Change Passage State Enclosure Dusttight Lead wire color 100 VAC: Blue, 200 VAC: Red, 24 VDC: Red/Black AC (50/60 Hz) 100, 200, 24, 48, 110, 220, 240 Coil rated voltage (V) 24, 6, 12, 48, 100 DC Allowable voltage fluctuation