Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Model Cushion Rubber Air Bore size (mm) Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Relief type Vacuum suction type 10-/21-CJ210 10 15, 30, 45, 60, 75, 100, 125, 150 Double 10-/21-CJ216 16 M5 x 0.8 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Standard Band mounting only acting, Non-lube 10-/22-CJ210 10 15, 30, 45, 60, 75, 100, 125, 150 Single rod 10-/22-

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Model Cushion Rubber Air Bore size (mm) Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Relief type Vacuum suction type 10-/21-CJ210 10 15, 30, 45, 60, 75, 100, 125, 150 Double 10-/21-CJ216 16 M5 x 0.8 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Band mounting only Standard acting, Non-lube 10-/22-CJ210 10 15, 30, 45, 60, 75, 100, 125, 150 Single rod 10-/22-

AC Servo Motor Driver (MECHATROLINK-III type)

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur . 2.

PSxx-OMM0006CN

kPa 100 kPa -0.1001.000 MPa -0.1 MPa 0 1 MPa -61No.PS-OMM0006CN-E M8(3 ) ZSE40A() ISE40A() 0-101.3 kPa -0.1001.000 MPa 10.0-105.0 kPa -0.1051.050 MPa 500 kPa 1.5 Mpa 0.1 kPa 0.001 Mpa DC1224 V 10 (p-p)10() 45 mA NPN PNP 1 80 mA 28 V(NPN ) 1 V (80 mA ) 2.5 ms(20,100,500,1000,2000 ms ) 0.2F.S. 1 digit 0 1 3 1/2 7 LCD 2 (/) 2 F.S.1 digit(253 ) ON OUT IP65 -550 -1060 ()

PSxx-OMM0002CN

Pam 3/s A B C 0.0-101.0kPa 0 -101.0 kPa -100.0100.0kPa -100 kPa 100 kPa -0.1001.000MPa -0.1 MPa 0 1.

AMH

Option J: With drain guide Bracket (Option) female thread T: With element service indicator Maintenance space Drain Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35

IDX-OM-M051

NIL IDF 100 F 30 4 W C 5 G Size K Size Air compressor size Note) 100kW 125kW 150kW 100 125 150 P R Note) The value is referential. Confirm the capability of the compressor used.

IDX-OM-Z004

6 2 GWP IDX-OM-Z004 6 6.3 IDF100F-30-W () (10, 2m) ) 4 (10 4x ( 20 4x 25 2m) (10, 0.7m) (10,0.7m) 107 267 460 R2 735 64 75 7001 1120 R2 (17) 17) 40 127 479 51 1276 1418) (14~18) 1375 1,3 -W4 -W4 (-W4) (-W4) Y1/2 Y 1/2 () () R1/2 R1/2 (50) 20 (143) 335 7122 752 670 1,3 (-W5) -W5 -W5 (-W5) R1/2 R1/2 IDF100F150F-W 6 3 IDX-OM-Z004 6 IDF125F-30-W () K16K (10, 2m) (10 ) ( 4

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

ASN Flow Rate and Sonic Conductance AQ ASV AS1001F AS2001F AS3001F AS2051F AS4001F Model Metric size 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Tubing O.D.

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

F/ISE

range and regulating pressure range Proof pressure 100 to 100kPa 500kPa 0.1 0.001 0.001 0.02 1 0.1 0.100 to 1.000MPa 1.5MPa 0.001 0.01 0.01 0.1 kPa MPa kgf/cm2 Note 1) Setting/Display resolution bar psi mmHg inHg Fluid that will not corrode stainless steel SUS 630 and 304 12 to 24VDC, Ripple (p-p) 10%or less 55mA or less (With no load) NPN or PNP 2 output (Max. applied voltage 30V (NPN

PC Wiring System

Input/output 10 seconds for 4 cables. 10 seconds for 4 cables. Output Elimination of branch unit The function of a branch unit is built-in a 16 point unit, allowing reduction of the number of units.

Series CJ2 10-/11- 21-/22- Air cylinder / ø6, ø10, ø16

Nil S n No D With auto switch (Built-in magnet) Model Cushion Action Standard stroke (mm) Auto Switch Mounting Tube Bore size (mm) 6 10 16 6 10 16 Port size Lubrication Model Rubber Air 10-/21-CJ26 10-/21-CJ210 10-/21-CJ216 11-/22-CJ26 11-/22-CJ210 11-/22-CJ216 Relief type Vacuum suction type 15, 30, 45, 60 15, 30, 45, 60, 75, 100, 125, 150 Band mounting only Except 6 M5 x 0.8 15, 30,

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

pressure range and regulating pressure range Proof pressure 100 to 100kPa 500kPa 0.1 0.001 0.001 0.02 1 0.1 0.100 to 1.000MPa 1.5MPa 0.001 0.01 0.01 0.1 kPa MPa kgf/cm2 Note 1) Setting/Display resolution bar psi mmHg inHg Fluid Power supply voltage Current consumption Switch output Repeatability Fluid that will not corrode stainless steel SUS 630 and 304 12 to 24VDC, Ripple (p-p) 10%or

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

44 16 12 44 54 10 120 M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 M8 x 1.25 7.5 M8 x 1.25 27 27 40 20 6.6 11 1/8 38 30 104 44 118 86 106 40 13 21.5 9 M10 x 1.5 9 32 32 46 22 8.6 14 1/4

ZFC Series

Model g (oz) ZFA100 50 (1.75) 1/8 140 (4.94) High flow rate square type ZFA200 200 (7) 1/4 190 (6.71) ZFB10 10 to 20 (0.35 to 0.7) 4, 6, 3/16", 1/4" 22 (0.78) ZFB20 30 to 50 (1.05 to 1.75) 6, 8, 1/4" 30 (1.06) Universal type ZFB30 75 (2.63) 10, 3/8" 40 (1.41) ZFB401 100 (3.5) 1/2" 62 (2.19) ZFA100 Specifications Air, Nitrogen Fluid Negative pressure Operating pressure 0.5MPa (72.5psi) Withstand

IIIIIII

(5 Kgf/cm2) A B c D E F G A B c D E F G 4.25 (108) 2.20 (56) 1.32 :33.51 0.91 1.23l o.24 (6) 0.81 :20.5) 0.39 (10) 4.43 112.5 2.38 '60.5)1.32 33_5' 0.91 (231 o.24 (6) 0.81 (20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parentheses Series NVM MECHANICAL VALVES DIMENSIONS NVM220-N02-30 230-N02-30 NVM220-N02-32 230-N022 F , O , F 1 1 4 6 l b s ( 5 2 k 9 ) P T 0 2 1 6 i n ( 5 S m

Series 10-MGF ø40, ø63, ø100 Guide Table

Cylinder stroke (mm) Model Cushion Bore size (mm) 40 63 100 Standard stroke (mm) Auto switch mounting Action Port size Lubrication Model Rubber Air 1/8 10-MGF40 10-MGF63 10-MGF100 Relief type (Both sides) Double acting 30, 50, 75, 100 1/4 Non-lube Non-standard intermediate strokes (in 5 mm increments) are available by attaching a spacer of 5, 10, 15, 20 or 25 mm width.