Body Size: 2 (M5), Socket, Plug Type: S (Socket), Port Size: 06 (R,Rc(PT) 3/4 or Ø6 Tube), Connection: L (Elbow w/One-touch Fitting)
Clean Series: Clean Room, Stations: 06, Cylinder Port: M5 Thread, Kit: w/o Cable, Top Entry, Option: w/Back Pressure Check Valve, DIN Rail Mount Style
Size: 100 (M5 Standard), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Tube Size: 06 (ø6), Push lock: A (Push-lock)
Size: 100 (M5 Standard), Control Range: FC (50 to 150 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Tube Size: 06 (ø6), Push lock: A (Push-lock)
Body Size: 3 (1/8 Basis), Thread: (R, M5, or U10/32), Port Size: 01 (1/8), Applicable Tube OD: 06 (Ø6 mm), Sealant: S (Sealant), Push-lock Type: A (Push-lock type)
Body Size: 4 (1/4 Basis), Thread: (R, M5, or U10/32), Port Size: 02 (1/4), Applicable Tube OD: 06 (Ø6 mm), Sealant: S (Sealant), Push-lock Type: A (Push-lock type)
Body Size: 4 (1/4 Basis), Thread: Metric Thread (M5)/R(PT), Port Size: 02 (1/4), Applicable Tube OD: 06 (Ø6 mm), Sealant: S (Sealant)
Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector), Lead Wire: Lead Wire, Orifice Size: 06 (0.6mm), Port Size: M5 (w/Sub-Plate M5x0.8), Body/Seal Material: A (Body C36, Seal FKM)
Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector), Lead Wire: O (w/o Lead Wire), Orifice Size: 06 (0.6mm), Port Size: M5 (w/Sub-Plate M5x0.8), Body/Seal Material: A (Body C36, Seal FKM)
Body Size: 3 (1/8 Basis), Thread: (R, M5, or U10/32), Port Size: 01 (1/8), Applicable Tube OD: 06 (Ø6 mm), Sealant: None, Push-lock Type: A (Push-lock type)
Voltage: 6 (12VDC), Electrical Entry: L (L Plug Connector), Lead Wire: Lead Wire, Orifice Size: 06 (0.6mm), Port Size: M5 (w/Sub-Plate M5x0.8), Body/Seal Material: A (Body C36, Seal FKM)
Body Size: 5 (3/8 Basis), Thread: Metric Thread (M5)/R(PT), Port Size: 03 (3/8), Applicable Tube OD: 06 (Ø6 mm), Sealant: S (Sealant)
Body Size: 4 (1/4 Basis), Thread: Metric Thread (M5)/R(PT), Port Size: 02 (1/4), Applicable Tube OD: 06 (Ø6 mm), Sealant: S (Sealant)
Body Size: 5 (3/8 Basis), Thread: Metric Thread (M5)/R(PT), Port Size: 03 (3/8), Applicable Tube OD: 06 (Ø6 mm), Sealant: S (Sealant)
Body Size: 100 (M5, Standard), Material: None, Applicable Tube O.D.: 06 (ø6)