VM

1 Stainless steel r t ZDC Metallic plated !2 Stainless steel !

Booster Regulator Series VBA1110 to 4200 1

(t) is given for 10 l tank by the graph. Then, the charging time (T) for a 100 l tank, T = t x = 49 x = 49 (s). V 10 10 10 T = t x = 110 x = 110 (s). V 10 10 10 T = t x = 2.4 x = 24 (s).

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

1 Holder assembly replacement screw y Tubing i Holder assembly r Insert pin assembly u Fitting nut Place the insert bushing t on the insert pin assembly r. t Insert bushing 2 !

Vacuum System Peripherals:

(mm) Nylon Soft nylon Polyurethane 2 2.18 2.5 3 4 4.5 5 6 6.5 7.5 8 9 12 13 ZX T TS TU ZR Nylon ZM Polyurethane coil tubing Polyurethane flat tubing This tubing makes compact piping possible and can be used with One-touch fittings. Tubing size ZH Model O.D. (mm) 2 2.5 4 5 4 6 8 Description I.D.

q"s

t signal (%F.S.)

45

T1) terminal block) -1A: +COM -1NA: COM SX3000-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

Air Cylinder MGQ Series Compact Guide Cylinder

MGOM.,/Slide bearing MGQL,,/Ball bush bearing MGQL12-25-3O more stroke MGOM'12-2s-Lil . 5 O l O O , MGQM32-1OO t l01ooT P=o.5MPa 1 ,*"1 -Tt r t r . l 080 ; , . d63 t t , 5od ' l4oo o50 E;\ .' !

Modular Type Filter Regulator Series AW

t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

High Vacuum Angle Valve, XL Series

acting (dual operation) XLA-40 Normally closed XLC-40 Valve type Model 600 600 400 400 T msec T msec Bellows seal 200 200 0 0 0.4 0.5 0.6 0.7 0.3 0.4 0.5 0.6 P MPa P MPa Double acting (dual operation) XLF-40 Normally closed XLG-40 Valve type Model 80 80 60 60 T msec T msec 40 40 O-ring seal 20 20 0 0 0.4 0.5 0.6 0.7 0.3 0.4 0.5 0.6 P MPa P MPa Valve type XLD-40 Normally closed Model Main

CLS

9 w %7 $1 $2 $3 $6 $8 $9 $0 #3 #0 @5 #2 $5 $4 %0 %1 t y !2 !1 !3 CL u !4 !6 CL1 !7 !5 MLGC CNG e ^0 ^2 !

CNS

2 %5r CNA CNS Description Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

MLGP

for hexagon bolt X 0.02 DA DB IB ID X U VB VA H T PW GC GA 2-Rc P (Plug) A + Stroke E B + Stroke FA FB C + Stroke PA + Stroke GB PB Q 2-Rc P G J K S XA H7 depth XL IE XA H7 depth XL T-slot dimensions Note 1) The intermediate strokes other than the standard strokes at left are manufactured by means of installing a spacer.

CRJ

(mm) a = Internal cross section of piping [mm] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4 2.5 4.9 QC = Air consumption required for one reciprocation of Mini-Rotary Actuator [l (ANR)] 6 4 12.6 8 5 19.6 8 6 28.3 6.5 33.2 10 7.5 44.2 12 8 50.3 12 9 63.6 9.2 66.5 16 12 113 12.7 127 16 13 133 16.1 204 21.6 366 27.6 598 Air Consumption

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

(For F, L, S, T kit) 2. U side end plate assembly no.