Slide Tables MX Series

D 1.Body tapped H H l Guide block D l Max.tightening torque ftlb (Nm) Locating pin hole D x H (mm) Max.screw-in depth l (mm) Bolt used Model Use a bolt that is less 0.5mm than max.(l)screw-in depth to avoid contacting the guide with mounting bolt.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

(max. 20 stations) 3 SY3000 5 SY5000 Connector mounting position A, B port size Symbol Mounting position U U side SY5000 SY3000 D D side Symbol Port size 4 One-touch fitting C4 Symbol Port size 4 One-touch fitting C4 6 One-touch fitting C6 Mixed M 6 One-touch fitting C6 Valve stations 8 One-touch fitting C8 Mixed M Stations Symbol Note Single wiring specifications (up to 16 solenoids are

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

Symbol Applicable stations Mounting position U side D side Both sides M Special specifications 2 to 10 stations 2 to 10 stations 2 to 16 stations D U B Indicate special specifications separately on a manifold specification sheet. Note 2) The number of blanking plate assemblies is also included.

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 -14- 5. Parameter list (Driver side) Please configure the appropriate parameters to enable correct driver operation. Refer to [5.

EX510-GDN1.eng

COM C COM C is receiving data: Lights up COM C is having no data to receive: Goes off COM D COM D is receiving data: Lights up COM D is having no data to receive: Goes off : It is lit when input unit is connected and communicating normally. 19 18 Display/ Switch Setting (continued) Switch setting Make sure that switch setting is performed with power supply turned off.

VQ

AXT802-1A-l VG Cable Length Model VVQ100-12A-1 VVQ100-12A-2 VVQ100-12A-3 L dimensions 1.5m 3m 5m VP Mounting direction D U D side mounting U side mounting VQ Note) The number of manifold stations cannot be changed.

ZR

ZR1D1 D2 D3 10.2 SMC PRESURRE SWITCH RESET SET Attachment D Digital pressure switch Suction filter 71.3 (73.3 for D2, D3 types) 81 SMC 61 PV PD Filter block D 78.8 3 Note) 1 Dimensions for mounting bracket A 2 Dimensions for mounting spacer A Bracket A part no. : P3270153 (Standard accessory) Spacer A part no. : P3270156 13-3-19 19 Series ZR Suction Filter: ZR1-FX Specifications ZR1-FX

Digital Flow Switch

ZS-46-B Panel mount adapter ZS-46-D Panel mount adapter + Front protection cover ZS-46-5L Power supply/output connection lead wire 5-core, 2 m ZS-27-01 Front protection cover B Panel mount adapter Connection Example ZS-46-B PFG300 Sensor connector D Panel mount adapter + Front protection cover PF3A7 H Power supply/output connection lead wire ZS-46-D Lead wire and M12 connector (Option for

Angle Seat Valve /

Indicator 45 22.5 27 1/8 Pilot port 5 17 D E OUT IN E C B 2 x P Port size A A Dimensions [mm] Model Port size P A B C D E VXB215A D 3/8 23 55 99.8 88.3 11.5 VXB215B E 1/2 27 65 106.8 90.8 13.5 VXB215C F 3/4 32 75 111.5 93.2 16 6 VXB Series For Steam Replacement Parts How to order the maintenance kit Maintenance Kit Insulated Adapter (for Individual Parts) VXB021-20-1A (1 set) VXB215 KT *

100

unit only (kPa) P With unit switching function (Initial value psi) D Vacuum pressure switch *3 For q, the units for metric spec. fittings are in kPa.

Bernoulli Gripper

Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Inch Size Applicable tubing O.D. d Applicable tubing O.D. d T D1 D2 D3 L1 L2 L3 M1 L4 (3) A (2) D1 D2 L1 L2 L3 L4 (3) A (2) Weight (g) H (1) Weight (g) H (1) T M1 Model Model Min.

Speed Controller with Uni One-touch Fitting AS Series

AS-D Bore size AS-T U01 Uni Uni Uni Uni 1 8 1 4 3 8 1 2 U02 U03 U04 ASP ASN Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

With Factory Installed

Exampte)26NW o f "f able 'pllonaISpeci Ica rIons comb' matlon T Filter 1Regulator applicable model Optional specifications 2 6 8 C J N W Description Symbol Auto drain D D C 1 AW2001 AW3001 AW4001 I Differential pressure type auto drain D ActessOlY Float type auto drain(N.O.) 0 (Optioo) Float type auto drain(N.C.)

EXxx-OMW0014CN

SI (24V) (XD1) (24V) (XD2) M4 (SCRJ) 1 (XF1) (SCRJ) 2 (XF2) . 6-5 EX245-SPN1A 43 No.EX-OMW0014CN-A (24V) (XD1) (24V) (XD2) M4 (RJ45) 1 (XF1) (RJ45) 2 (XF2) . 6-6 EX245-SPN2A 44 No.EX-OMW0014CN-A 7/8 (5 ,) (XD1) 7/8 (5 ,) (XD2) M4 M12 (4 ,,D code) 1 (XF1) M12 (4 ,,D code) 2 (XF2) . 6-7 EX245-SPN3A 45 No.EX-OMW0014CN-A 7.

IZN10_C

24 24 24 24VDC VDC VDC VDC Class Class Class Class2 2 2 2 UL UL UL UL Listing Listing Listing Listing ( ( ( ( ) ) ) ) D D D D ( ( ( ( ) ) ) ) ! 0~55 -8- NOx 0.1ppm a.0~55 b.35~65%RH c. d. e. f. g. h. i.() j. k. l. m. n. (IDF )(AF/AFF )(AFM/AM , -9- 4 4 4 4-2. 2. 2. 2. 4-2-1. D D 4-2-2.

CM2x-OM0230Q

./ (mm) 1) (BM2-A)(BJ5-1/) () 2) (BM2-AS/)(BJ4-1/) D-M9A(V) BBA4D-C7/C8/H7 D-H7BA BBA4 BJ2-006BJ2-010BJ2-016 BM2-020(A)BM2-025(A)BM2-032(A) BM2-040(A) BMA2-020(A)BMA2-025(A)BMA2-032(A) BMA2-040(A)BMA2-050(A)BMA2-063(A) BBA4 M3x0.5x14L 1 D-C7C8 D-H7 BHN3-025ABHN3-032ABHN3-040A 11 - <> D-M9NM9PM9BM9NM9PVM9BV D-M9NWM9PWM9BWM9NWM9PWVM9BWV D-M9NAM9PAM9BAM9NAM9PAVM9BAV D-A90A93A96A90VA93VA96V

MH-OMY0004

D-M9/ M9W/ Y59/ Y7P/ Y7W D-M9/ M9W/ Y59/ Y7P/ Y7W D-M9 D-M9V L (mm) D-M9 D-M9W D-M9V D-M9WV D-M9A D-M9AV MHY2-10D 3 1 5 3 MHY2-16D 3 1 5 3 MHY2-20D 3 1 MHY2-25D 1 ) 11 8. 1 2 ON ON 1 1),2)1 A 2 B 1),2) C 1 1 12 2) 3) 4) 0.30.5mm 2) 0.30.5mm 0.30.5mm 0.30.5mm 13 2-4. 1.

Lubrication Equipment

A B 63 63 80 85 90 100 C Port size Rc(PT) INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model No. 1/4 15 15 15 20 22 22 141 164.5 170 180 230 251 3/8 1/4 , 3/8 , 1/2 3/4 B C D E F Port size Rc(PT) 3/4 , 1 1 Model No. A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

KB

D L A2 A1 M Part No.