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Maximum load mass m 1 = m/mmax = 1/5 = 0.20 L2 Review m. L1 M2 = m g (L1 + B) 103 2. Static moment m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 & M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103 m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We (L2 + A) 103 3.

X x m x g Vertical mounting Mounting orientation Ceiling m Wall m Vertical m Note) Static load m Horizontal m M M m x g x X m x g x X m x g x Z M Static moment z y Y m x g x Y m x g x Y m x g x Z M Z m x g x X m x g x Y m x g M Note) "m" is a weight movable by thrust.

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

NCmRO-OT NCI|RO-OS H3 ).250 | r-24 o.75 |.0010.621 r2s6;; 093t0.22 t0-32 uNFl0.8l L00 1 . 1 20.12 t10-32 UNF $-m 0.62 0.34 0.880.38 3.22 2.66 2.35 1.69 t.312tyt -24 003t025 O-32UNF .12 r25 1.47 0.2,1 llG32 UtlF 1A-20 0.s10.47 1.22 o.62 3.75 3.34 2-93 1.81 ).137 t%^-20 r.25 1.m).12510-38 | r. -20 UNC 't.75 1.93 0.25 t|l-20 LhrC x.-18 1 . 1 20.38 1.57 0.88 4 . 1 9 3.49 3,692.O0 slrc' Air Cvlinder

(without light), 2 W (with light) 4 W (without light), 4.2 W (with light) Non-locking push type Other (Semi-standard) Non-locking push type Power consumption DC Holding Inrush Apparent power AC VNB11V VNB12V TQ 12 (P1) 12 (P1) External pilot solenoid Manual override Note 1) For How to Order pilot solenoid valves, refer to page 570.

-) 0 4.2 IDF100150F-W 4 9 IDX-OM-Z004 5 5 5.1 3 ON OFF (R) OFFON 3 2 R T 5.2 1 5.2 5.2 5.2 10% 5.2 IDF100150F-W 5.1 5 1 IDX-OM-Z004 5 1 10% 3 () 1 2 IN OUT INOUT () 424 IDF100150F-W 5.1 5 2 IDX-OM-Z004 5 5.2 1-3 51 3.6 OFF () ON OFF ON IDF100150F-W 5.2 5 3 IDX-OM-Z004 5 5.3 R () OFF OFF OFF ON ON IDF100150F-W 5.3 R 5 4 IDX-OM-Z004 6 6.1 IDF100F-30-W IDF125F

The anchor bolts are not attached. 10 Copper, bronze and brass is not included when option M [ DI water (pure water) piping] is selected. 9.1 Specifications HRSH Series 9-2 HRX-OM-R026 Chapter 9 Documents 9.1.3 HRSH090-W-20Table 9-3 Specifications [HRSH090-W-20-] Model HRSH090-W-20Cooling method Water-cooled refrigerated type Refrigerant R410A (HFC) Control method PIDcontrol Ambient temperature1

i gl m n u a m 0 nt a e M dj m us t 19 ax e im gl u an m t ad en ju m st Friction fittings Note) Can be adjusted 5 at the rotating ends.

1 CG1 @2@3@4@5 14B MB Locking at rod end C95 CA1 CS1 Manual release non-locking style: L Material Note Component Parts Material Note Component Parts No. q w e r t y No. !7 !8 !

/75E-46 GFCI CM R 3 1 2 FM16 TB MC1 TDR MC THR MC1 MC1 MC2 CM PE PRS MC2 PRS1 FM PE PRS2 PRR PRR ILS C01 TB1 W TB2 1 T C1 W 2 C01 CM ILS TDR PRR MC1 MC1 GFCI OLR MC2 PRS1 EDV P THR TDR PRS2 TDR P THR PC EDV PE V T IDFB Series 11-6 11-4 IDX-OM-W035 12 V 12 V 12-1 ( ) IDFB Series 12-1 12-1 IDX-OM-W035 12 V 12-2 ON0.5 OFF30 IDF-S0198 (AC230V) IDF-S0199 (AC115V)

HRX-OM-S004-N Operation Manual InstallationOperation Original Instructions Thermo chiller HRS100-A-20HRS150-A-20HRS100-A-40HRS150-A-40HRS100-A-46HRS150-A-46HRS100-W-20HRS150-W-20HRS100-W-40HRS150-W-40HRS100-W-46HRS150-W-46Keep this manual available whenever necessary 2023 SMC CORPORATION All Rights Reserved To the users Thank you for purchasing SMCs Thermo chiller (hereinafter referred to

CNA Vertical (Downward) Vertical (Upward) Horizontal collision CNS CLS Type of impact CLQ MLGP RLQ W 2 g Kinetic energy E1 V2 MLU Thrust energy E2 Fs Ws Fs Fs + Ws ML1C Absorbed energy E E1 + E2 DSymbol V: Impact speed (m/s) g: Gravitational acceleration (m/s2) W: Impact object weight (kg) F: Cylinder thrust (N) s: Stroke length of shock absorber (m) -X Air Cushion Stroke Note) The speed

CNA Vertical (Downward) Vertical (Upward) Horizontal collision CNS CLS Type of impact CLQ MLGP RLQ W 2 g Kinetic energy E1 V2 MLU Thrust energy E2 Fs Ws Fs Fs + Ws ML1C Absorbed energy E E1 + E2 DSymbol V: Impact speed (m/s) g: Gravitational acceleration (m/s2) W: Impact object weight (kg) F: Cylinder thrust (N) s: Stroke length of shock absorber (m) -X Air Cushion Stroke Note) The speed

CNA Vertical (Downward) Vertical (Upward) Horizontal collision CNS CLS Type of impact CLQ MLGP RLQ W 2 g Kinetic energy E1 V2 MLU Thrust energy E2 Fs Ws Fs Fs + Ws ML1C Absorbed energy E E1 + E2 DSymbol V: Impact speed (m/s) g: Gravitational acceleration (m/s2) W: Impact object weight (kg) F: Cylinder thrust (N) s: Stroke length of shock absorber (m) -X Air Cushion Stroke Note) The speed

Y connector w Display part w Display part e Auto switch with pre-wired connector The sensor head is not used when the checker is used for the time required for stroke/operation count measurement. D M9N S A PC Application example Ordering example t Y connector IN574-95 1 pc.

MSQ Angle adjustment Range Figure 5 MSZ MSZ CRQ2X MSQX ad a ge ju Cl lt MRQ an st bo oc t r m nd en g k en tm wi in e us 10 10 se t r st on dj a ju an r on ti ot ad iti ta os ge at p ro er y nt io e b C e b n y is e ge n ad w d k an c ju lo t r C st in en g m bo st lt ju b ad M 0 ax 19 im e u ng m ra ro n ta tio Center position adjustment Table 2 R: Clockwise adjustment L: Counterclockwise