Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

OMS0020

112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B

JSY1000/3000/5000 Series (Non Plug-in)

Leakage voltage Caution Take note that the leakage voltage will increase when a resistor is used in parallel with a switching element or when a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the leakage voltage passing through the C-R circuit. The suppressor residual leakage voltage should be as 3% or less of the rated voltage. 3.

3 Port Air Operated Valve

For more than 6 stations, supply air from both P ports on. For common exhaust type, exhaust from both R ports. 2. P and R ports can be 3/8 by mounting the optional mounting bracket to the manifold base. Mounting When mounting valves on the manifold base, the mounting orientation is decided. If it is mounted in the wrong direction, connected equipment may malfunction.

Base Mounted How to Order Manifold VQC1000 Series Plug-in Unit

Note 5) For external pilot option, -R, indicate the external pilot specification R for the applicable valves as well. Note 6) Built-in silencer type does not satisfy IP67. Note 7) When Without SI unit (SD0, SD60) is specified, With DIN rail (D) cannot be selected. Note 8) When changing the specifications of the EX600 from no DIN rail to DIN rail mounting, please consult SMC.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

6 r t !3 w q e !5 !0 !1 !

Suction Filter with Case FH99 Series

View port View port G1/2 Refer to page 529 for Microswitch for differential pressure indication switch. 504 A Suction Filter with Case FH99 Series Dimensions Differential pressure indication switch Blanking cap Differential pressure indicator 8 x T 16 (65) N I (34) E F U OUT X H O 62 B U U R S 4 x K OUT OUT Q P IN Differential pressure indicator Differential pressure indication switch G

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

Steam Valve

Pilot port 12(P1) Indicator (Option) 1 8 2 x (Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 TQ 80 90

New

(mm) 1 1 1 1 Outer layer thickness (mm) Black (B) Outer layer color White (W) Red (R) Blue (BU) Yellow (Y) Green (G) CAT.ES50-35A Series TRTU Flame Resistant (Equivalent to UL-94 Standard V-0) FR Three-layer Polyurethane Tubing SeriesTRTU RoHS Model P 20 m roll l 100 m reel Model TRTU1208 12 TRTU0604 6 TRTU0805 8 TRTU1065 10 Inner tube O.D. (mm) Inner tube I.D.

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: R (Right Side), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A001 (Straight Plain ref NAAMS ACA100M)

Cylinder Port: TF (G), Arm Opening Angle: 105°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A054 (70mm Offset Machined ref NAAMS ACA158M), L Arm Mtg Position: X [w/o Arm on Left Side (D Arm Position Type Only)], L Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)], Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 105°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: C (Mounting Position C), R Arm Style: A010 (Straight Machined ref NAAMS ACA110M), L Arm Mtg Position: C (Mounting Position C), L Arm Style: A010 (Straight Machined ref NAAMS ACA110M), Painted Arm: P (Paint)

Cylinder Port: NPT, Arm Opening Angle: 135°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A072 (120mm Offset Machined ref NAAMS ACA178M), L Arm Mtg Position: A (Mounting Position A), L Arm Style: A072 (120mm Offset Machined ref NAAMS ACA178M), Painted Arm: P (Paint)

Cylinder Port: TF (G), Arm Opening Angle: 105°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A011 (Straight Machined ref NAAMS ACA111M), L Arm Mtg Position: A (Mounting Position A), L Arm Style: A014 (Straight Machined ref NAAMS ACA114M), Painted Arm: P (Paint)

Cylinder Port: TF (G), Arm Opening Angle: 105°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A014 (Straight Machined ref NAAMS ACA114M), L Arm Mtg Position: A (Mounting Position A), L Arm Style: A011 (Straight Machined ref NAAMS ACA111M), Painted Arm: P (Paint)

Cylinder Port: TF (G), Arm Opening Angle: 105°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A014 (Straight Machined ref NAAMS ACA114M), L Arm Mtg Position: A (Mounting Position A), L Arm Style: A014 (Straight Machined ref NAAMS ACA114M), Painted Arm: P (Paint)

Cylinder Port: TF (G), Arm Opening Angle: 105°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A054 (70mm Offset Machined ref NAAMS ACA158M), L Arm Mtg Position: A (Mounting Position A), L Arm Style: A046 (70mm Offset Machined ref NAAMS ACA150M), Painted Arm: P (Paint)

Cylinder Port: TF (G), Arm Opening Angle: 105°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A064 (120mm Offset Machined ref NAAMS ACA170M), L Arm Mtg Position: A (Mounting Position A), L Arm Style: A064 (120mm Offset Machined ref NAAMS ACA170M), Painted Arm: P (Paint)