42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%36/13?61?

The LECP6 controls NPN or PNP step motors.Motor controller: Step motor (servo/24 VDC), Servo motor (24 VDC)?

The LECP6 controls NPN or PNP step motors.Motor controller: Step motor (servo/24 VDC), Servo motor (24 VDC)?

The LECP6 controls NPN or PNP step motors.Motor controller: Step motor (servo/24 VDC), Servo motor (24 VDC)?

PA3000/5000/PAX1000

Give attention to safety measures, including the method of handling. 24 Process Pump Common Precautions 2 Be sure to read before handling. Refer to the main catalog sections for detailed precautions on each series. Selection Piping Caution Warning 1.

Digital Flow Switches

Dimensions: Remote Type Sensor Unit for Air PF2A510, 550 Internal circuits and wiring examples 98 82 23 B Sensor unit Display unit (PF2A30/31) 48.2 60 1.6 Brown 1 2 6 Main circuit Main circuit White 2 4 8 NC + Black Switch output 12 to 24VDC 4 3 7 34 44 54 Blue 3 1 5 PF2A5Sensor unit Display unit (PF2A30/31) 24 2-Port size 40 50 4-4.5 Brown 1 2 6 Analog output Main circuit Main circuit 4

PFA/PFW

After a new installation, system repair or renovation, connect the fluid and power, etc., and then perform appropriate function and leak inspections to confirm that mounting has been done correctly. 24 Specific Product Precautions 2 Series PFA/PFW Be sure to read before handling. Refer to page 23 for safety instructions.

IR1000/2000/3000

Diaphragm assembly P53801005 P53802005 Stainless steel, HNBR Valve P53803015 Brass, HNBR Valve P53803016 Brass, HNBR Valve P36202018 P36202018 P36203017 SUS304 Fixed throttle 4.35 x 1 6 x 1 8.31 x 1 HNBR O-ring 2 x 0.6 3.2 x 1 HNBR O-ring JIS B 2401 P16 (1) NBR O-ring 1.7 x 0.85 2.5 x 1 NBR O-ring 2.5 x 1 3 x 1 NBR O-ring 24 x 1.5 39.5 x 2 NBR O-ring 10 x 1.3 JIS B 2401 P11 27.8

IS3000

Light assembly for 24 VDC has 2 terminals and polarity. One is + for red load wire and the other is for black load wire. Light will not light up if wired incorrectly. 2. Light ass'y for 24 VDC has 3 mA of current leakage.

Model Selection 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 17-2-14 VV2CA2/3/4 Manifold N.C. 1/4 to 3/4 17-2-24 VCB20/30/40 Single unit 0 to 3 N.C. 1/8 to 3/4 2, 3, 4, 5, 7, 10 17-2-32 VCL20/30/40 N.C. Single unit 1/8 to 3/4 2, 3, 4, 5, 7, 10 0 to 2 (1) 17-2-36 VV2CL2/3/4 N.C.

VND

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 Main port VXA VN Main port Rc Pilot port Rc A LVC B C D E F G H J Model 1 8 1 4 1 4 VND50D-32A VND60D-40A VND70D-50A 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 LVA LVH LVD Port size

VVX31/32/33

25 25 J 30 40 40 D 22 24 24 A 40 44 44 B 20 22 22 C 9 10 10 Model VVX31 VVX32 VVX33 TI/ TIL PA PAX PB 17-3-91

Series VCL

Proper tightening torque Nm Tightening torque for piping Connection threads 7 to 9 Rc 1/8 12 to 14 Rc 1/4 22 to 24 Rc 3/8 28 to 30 Rc 1/2 28 to 30 Rc 3/4 1Nm = 0.7375ftlb 5.

Series VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

VQ7-6/7-8

Proper tightening torque Nm Tightening torque for piping Connection threads Rc1/8 Rc1/4 Rc3/8 Rc1/2 Rc3/4 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 5.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP This is used when changing piping location.

XL

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46. 24 High Vacuum Angle Valve Series XLD, XLDV Dimensions (mm) 1in=25.4mm XLDV-25/With solenoid valve 11 C Fn (KF flange) Fb (K flange) C Port R (exhaust port) K K 2.5 41.5 Initial exhaust solenoid valve Main exhaust solenoid valve G A B 8 10.5 Port P (pressure port) A Max 10.5 (except connector

ZCUK

W B D-A9, D-A9V D-M9, D-F9W D-M9V, D-F9WV Bore size (mm) B A W A B W A 10 16 20 25 32 0.5 7.5 2.5 7.5 16.5 3 12.5 16.5 1.5 (1) 0 8 1.5 8 20 4 16 20 2 (0.5) 2 10 0 10 24 6 20 24 4 (1.5) 3.5 11.5 1.5 11.5 26.5 7 22.5 26.5 5.5 (3) 4.5 12.5 2.5 12.5 27.5 8 23.5 27.5 6.5 (4) Note 1) Figures in the table above are used as a reference when mounting the auto switches for stroke end detection.

-fl Seies

ax mum stalion: 8 (Note 2) (+) and (-) iid cale lhe d rction ol DC soleno d va ve w th lrghl surge voLlage sumiessor lNoie 3) Sres VFS3o0HOM is aso possible Cable clamp 206138-1...1 pc Socket 66105-2...24 pcs. Nippon AlvlP's cable Cable clamp 206128-1...1pc Sockel 661 05'2. . .24pcs.

AS-FPQ/AS-FPG

65 61 10 18.5 35.6 49.9 23 107 100 24.5 57.2 49.7 R 1/2 24 28.6 49.9 42.4 12 21.7 38.2 24 109 102 52.5 (25.4) (58.1) (50.6) Note 1) Reference dimensions Note 2) Reference dimension for threads after installation Note 3) 1 is the weight for type AS21FPQ (brass + electroless nickel plated), 2 is the weight for type AS21FPG (Stainless steel 304).