IDX-OM-W053

T 4-2-3 100 2 () 100 4 1 4 0 OFF 501015 OFF OFF IN/OUT ( ) 4 2 4 ) 30 () 30 O 4 3 4 AD48-A 1 ) 2019 3 2019 2 SERIAL No.XP AD48 SMC WEB IDF-S0002 1 C42FP-260S 1 IDF-S1933 1 2 4 4 5 5 5-1 3 ON OFF 600mm 1 10% () ( ) 60cm 1 10% 3 5 1 5 () 60cm 1 2 INOUT INOUT () 5 2 6 6 6 1 IDFA6E-2050Hz 0.75 m 3/h (ANR) 1 60Hz 0.82 0.7MPa 35 32 10 oC 550 0.15MPa 1.0MPa

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

20 stations (1) VO317-(-Q) (3) Port location (Direction)/Port size A Exhaust port Symbol Type R P Base (Side) Base (Side) Base (Side) ( ) 1 4 3 8 1 Common (2) ( ) 1 4 3 8 1 4 Base (Side) Base (Side) Base (Side) 3 Individual 1 4 1 4 1 4 Note 1) For more than 3 stations, supply air both sides of P port.

SYJA3000

(B) 2 (A) 4 (B) 2 (A) 4 Operating pressure to 0.7 0.1 to 0.7 0.2 to 0.7 2 position single Pilot pressure range (MPa) 2 position single 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position Ambient and fluid temperature (oc) Max.60 3 position closed center 3 position closed center Lubrication Not required (B) 2 (A) 4 (B) 2 (A) 4 Mounting position Free 300/50 Impact/Vibration resistance (m/s2) (1) 1 (P

High Power Cylinder Series RHC

500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm] 10 1/4,3/8 20 2000 6 10 1/4, 3/8 2500 7.5 =0.7 10 1/4, 3/8 0.5 3000 9 10 0.1 0.3 6 1/4,3/8 500 2.5 8 1/4, 3/8 1000 5 0 10 1/4, 3/8 1,000 2,000 3,000 25 1500 7.5 Maximum speed Vmax [mm/s] 10 1/4

Process Valve

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB4 -25A VNB5 -32A, 32F VNB5 4 -32A, 32F VNB6 -40A, 40F VNB6 4 -40A, -40F VNB7 -50A, 50F VNB7 4 -50A, 50F No.

JXCx-OMT0028CN

LEC-CGD LEC-CGD N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 LEC CN4 LEC CN4 No. No.

5 Port Solenoid Valve Series SQ1000/2000

1.TURN B 74.5 28 5.5 35 13 Approx. 10 2-M4 clamping screw Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) Triangle mark indicator position EXH. outlet Approx. 9 D side U side Station 1 2 3 4 5 6 7 8 n 37 60 Approx. 9 Release for switching connector direction C8: R(EXH) port C8: P(SUP) port For top ports 4 4 4 4 4 4 4 4 R 3 2 2 2 2 2 2 2 2 P 1 13 29.5 26 2n-C3,

Electric Actuator Triple Axis P&P Unit

For detailed information about each part, please refer to information provided by P/A. 2 ) 3 ) 4 ) 5 ) 6 ) 7 ) 8 ) 9 ) 8 Triple Axis P&P Unit Dimensions (reference drawing for assembling) Stroke+240(Table movement range) 40 30 4-M8 x 1.25 thread depth 16 40 Polyurethane stopper 30 110 2-8H7depth10 Home position gauge 200 180 (Refer to 4) (Refer to 4) 110 (Refer to 4) (Refer to 4)

Air Cylinder Series MB

Bore size (mm) Part No. l Dd9 L m d H B C D Applicable cotter pin 3 X 18 l 4 X 25 l 4 X 35 l 4 X 40 l 0.040 0.076 0.050 0.093 0.065 0.117 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 NT-12M CD-M03 CD-M05 CD-M08 IY-12 32 40 50, 63 80 100 125 32, 40 50, 63 80, 100 125 10 14 22 25 36 51 72 44 60 82 4 4.5 5 5 3 4 4 4 M10 X 1.25 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 M27 X 2.0 6 8 11 13 16 16 17

SMC CORPORATION OF JAPAN

What You Should Know Before Starting to Program. 4-1 4.1 Screen Identification .4-1 4.2 The Function Block Diagram base.4-2 4.3 The System Sketch Monitor Screen .4-3 4.4 The Programming Mode.4-4 4.4.1 The FBD base in Programming Mode. 4-4 4.4.2 Monitoring in System Sketch window in the Programming Mode. 4-4 4.5 The Simulation Mode.4-4 4.6 The Monitor Mode.4-4 4.7 Cable Connection .4-4 vii

IDX-OM-U010

ABOUT REINSTALLATION . 3-7 Chapter 4 Operation/ Shutdown . 4-1 4.1 CHECK POINTS BEFORE OPERATION . 4-1 4.2 OPERATION . 4-1 4.3 STOP . 4-2 4.4 CAUTIONS FOR RE-START . 4-2 4.5 CHECK POINTS BEFORE RESTART . 4-2 4.6 CAUTIONS WHEN THE PRODUCT IS SHUT DOWN FOR AN EXTENDED PERIOD OF TIME . 4-2 Chapter 5 Checks and Maintenance . 5-1 5.1 DAILY INSPECTION . 5-1 5.2 REGULAR MAINTENANCE . 5-2 5.2.1

HEP500-04 Liquid Collector Ejector Type

2 n tube Operating flow rate L/min th Collected flow rate L/min Collected flow rate L/min Collected flow rate L/min eng be l 1.6 0.8 0.4 4 lectio on tu Collection tube length 2 m m 7 Col ollecti 1.2 0.6 0.3 3 C m 13 m 20 m 7 0.8 0.4 0.2 2 m 7 13 m m 13 0.4 0.2 0.1 1 0 m 2 20 m 0 0.02 0.04 0.06 0.08 0.1 0 0.02 0.04 0.06 0.08 0.1 0 0.02 0.04 0.06 0.08 0.1 0 0.02 0.04 0.06 0.08 0.1 Operating

VNC

s) Conditions: Piping length/30 m Steel tube, full pressure/0.5 MPa 17-4-21 2 Series VNC How to Order Thread type Seal material Bracket (Valve size: 1/2/3/4) Nil B Nil F N T A B Rc G NPT NPTF None With bracket (VN-16) is valve size NBR seals FKM seals Note 1) Valve size 1 comes with VN1A16 (with thread).

212

For information on tubing connection, refer to the pamphlets High Purity Fluoropolymer Fittings Hyper Fitting Series LQ1/2 Work Procedure Instructions (M-E05-1) or Flare Type Series LQ3 Fitting Procedure (M-E06-4). (The pamphlets can be downloaded from the SMC website.) Caution 1.

PF-OMM0004_C

PVC PVC PVC PVC PVC , -10No.PF-OMM0004-D -11No.PF-OMM0004-D N M8 M8 R / ZS-40-K PF3W704/720 4 3X8 ZS-40-L PF3W740 4 3X8 ZS-40-M PF3W711 4 4X10 M8 ZS-40-A 3 m 2 250 L/min PVC 25 A ZS-40-U25 25 A PVC 1 PVC 30 A ZS-40-U30 30 A PVC 1 25 A ZS-40-U25-A 1 M5x80 2 30 A ZS-40-U30-A 1 M5x65 2 PVC 1~2% -12No.PF-OMM0004-D 1 DC+ 2 OUT2 3 DC4 OUT1 M8 IN OUT OUT1OUT2 ON UP ON/OFF SET

VVXA21/22

#5 " 0"8 1 E F 4 " 4 % " 4 4 4 4 7 %1 % 3 VXA212-00 VXA213-00 VXA223-00 VXA224-00 = < .G < < * 4.5 . >< * < * 6 < * $ /H"3 % .''< " % " Operating Fluid and Ambient Temperature % " ?# ! ?# " 4 4 * )< > )< > > )< )< " $ 8 @ )

VPA4

VVPA4 5 0 04 04 1 Thread type Nil Rc G NPT NPTF VP 5 port Air operated manifold F N T 5 Base size Rc A, B Port size Rc 3 4 6 1 VVPA450 Symbol 04 Port size VVPA460 1 2 3 4 Mixed 1 06 10 M (2) Piping Note 2) In the case of mixed specifications, indicate M and specify port location sparately on a manifold specification sheet.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

Residual Pressure Release Valve

fitting without a push button guard Release button (Blue) Release button (Blue) ASR ASQ D L1 Q B A D 8 4.2 Applicable tubing W (mm) M M L2 L2 Applicable tubing Weight (g) Model Applicable tubing O.D. 6 8 10 12 D L1 L2 Q W M KEB06 KEB08 KEB10 KEB12 12.8 15.2 18.5 20.9 25 27 27.7 29 21 23 26.5 28.5 5.3 6 6.8 7.5 13 15.4 18.7 21.1 17 18.5 21 22 13 17 24 31 With One-touch fitting with a push

Copper-free Actuators

D)B 1.7-6 20-M(D)B Standard 20-M(D)BW Double rod SMB-l 1.7-16 20-M(D)BB With end lock 1.7-30 5.5-2 Copper-free Actuators Air Cylinder Series Application Bore size (mm) Name of CAD file Page in Vol.2 Standard Copper-free 6 8 12 (10) 16 (15) 20 25 32 40 50 63 80 100 125 140 160 Series/Variation Air cylinder Series C(D)A1 Standard 1.9-2 20-CA1nN Double rod 1.9-16 20-CA1WnN SCA1l Non-rotating