Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 20.5 27.5 38 50 50 60 4.5 7.5 4.5 7 9 9 Note 1) Negative figures in the table D indicate how much the load wires protrude from the cylinder body.

AME

BM51 BM52 BM53 BM54 BM55 BM56 BM57 How to Order AME 250 03 R B Option R INOUT reversal Body size HAl Accessories (Options) 150 250 350 450 550 650 850 1/8 1/4 3/8 1/2 3/4 None B AT With bracket IDl Port size 1/8B 01 02 03 04 06 10 14 20 2B 1 Thread 1/4B AMG 11/2 3/8B Rc(PT) F G(PF) N NPT 1/2B AFF 3/4B 1B AMl 11/2B Symbol Related poroducts AME Note) Refer to p.4.7-7 for "How to Order" case

MHx-OMY0001

(Nm) L(mm) MHM-16D M3x0.5 0.63 6 MHM-25D M4x0.7 1.5 8 MHM-32D M5x0.8 3 10 MHM-50D M6x1 5.2 12 (N) MHM-16D 100 MHM-25D 200 MHM-32D 300 MHM-50D 500 -7- 2-3. 40 2-4. () 5 5 P-01-11 -8- 2-5. 1.52 2-6. 1 ()ISO VG320 (SDS) -9- 2-7. 1) 1) 2) 3) 12mm -10- 2 C3 C1 C2: C3 D-M9V D-M9WV D-M9AV D-M9 D-M9W D-M9A D-P3DWA A B E G A B E G L A B E G L D F H MHM-16D 9.1 9.1 5.6 4.6 8.1 12.8 11

IR30-OM00013

PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 010. 2 M Pa M AD E I N J APAN So G No. o S o1 T P2 U Q3 V R4 W Z12 6- (1) Nm 1/4 3/8 1/2 12~14 22~24 28~30 (2) (3) (4) 7- (1) (2) (3) (4) (1) (2) (3) (1) (2) O 3 (3) 3 (4) P.5 0 (5) 0 8- (1) (2) (3) 21Nm (4) ON-OFF 5 79Nm (6) (7) (8) 0.5MPa 0.1MPa (9) AN Rc1/2 (1) (2) 9- (1) (2) 1.5~2 (1) 1 1.5 (2) (3) a b

IR20-OM00008

M AX.SUP.PRESS. 1.0 M Pa OUTPUT PRESS. 0.0050.2 M Pa M ADE I N J APAN G So No. o S o1 T P2 U Q3 V R4 W Z12 -6- 5 (1) 1/4 1214 (2) (3) (4) -7-7- (1) (2) (3) (4) 1 2 3 (1) (2) 3 (3) 1 3 1 (4) P.5 0 (5) 0 -8- (1) (2) (3) 21Nm (4) (ONOFF (5) 79Nm (6) (7) (1) (AF ) AMAFM (2) 1( 2 1.5 (1) -9- 6. (1) 1 1.5 (2) , (3) a. b. c.

NAIV

(g) 120 1 1 0 100 90 80 l|AN20002 U1 35 (1.9) .04 (17) NAN3OO-N03 % 60 (3.3) .06 t25) NANtrco+to4 90 (5.0) .08 (35) 60 NAN50(rN0,6 3A 160 (8.8) .36 (165) NAN6OO.NI O 1 27O llsl .46 e25) NAN700+i12 1]4 444 Q4l 1 .87 (4901 Supply pressure: 7l PSI Distance from silencer: NAN200-500-) 31t NAN6O0-7OO+ 6.5fi MN800_900 ,10f1 NANSOO-N,'4 1\h 590 (33) 2.21 (580) NANgOO-N2O 2 960 (53) 3.13 (820) Construction

Large Type Vacuum Unit Series ZR

PD (vacuum breaking pressure port) Breaking flow adjustment needle M5 port PS (pilot valve supply pressure port) 1 Spacer A PE 2.5 Valve unit Attachment D 1 85 80 PD Rc(PT) 1/8 port PV (vacuum pump connection port) SMC 2-4.2 (mounting hole) PS 51.5 41.5 2 20 32.5 27.5 Filter block D 16.5 16 PV 2 8 13 3 1.5 Adapter G 1 4 Bracket A Bracket A 128.7 100.8 (9.8) 4.5 Rc(PT) 1/8 port V (vacuum

ALB900

1 1 1 1 1 2 2 2 1 Relay valve Pressure gauge Diaphragm assembly Valve assembly NLP seal PNY seal Wear ring O-ring NBR NBR Cloth-inserted phenol aldehyde resin NBR Glass fiber-inserted epoxy resin !2 1 Bowl assembly 126059-4A 126060 NBR !3 2 Seal Zinc die-casted !4 Lubrication plug assembly 1 126115AP NBR AF11-2 11307 !5 !

S Couplers Series KKH

Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KKH3S-01MS -02MS KKH4S-01MS -02MS -03MS -04MS 1/8 1/8 1/4 1/4 Female thread type Female thread type Body size Port size Part no.

AF800/900

VE How to Order Flow Characteristics VY1 12 AF 00 8 127 R Pressure drop (MPa) G P1 = 0.3 MPa P1 = 0.3 MPa Option P1 = 0.5 MPa P1 = 0.7 MPa P1 1 = 0.5 MP = 0.5 MPa P1 = 0.7 MP = 0.7 MPa P1 = 0.1 MPa P1 1 = 0.1 MPa Air filter PPA Drain cock thread piping {Rc 1/4} Drain guide D Body size 4 J R 8 9 1 2 1 2 AL Flow direction: From Right Left Auto-drain specifications Option Flow rate (/min (ANR

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow Type (Metal Body) Flow rate and effective area AS220M-02 Model AS120M AS220M-01 R 1/4 Cylinder side Tubing side M5 x 0.8 10-32UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Rc 1/8 l/min (ANR) {Nl/min} Flow rate 38 7 12 Controlled flow Effective area mm 0.6 0.1 0.2 l/min (ANR) {Nl/min} 420 Flow rate 105 280 Free flow 6.5 1.6 4.3 Effective area mm Note) Flow rates are values measured with

MGQ

MGQM, MGQL Common Dimensions Bore size (mm) Standard stroke (mm) B Z G NN F MM ML DA L R C H K Q X GA GB J P PW S T TA TB V W YY YL 32 40 50 63 80 100 1/8 1/8 1/4 1/4 3/8 3/8 16 17 17 19 21 25 51 51 59 72 92 112 12.5 14 14 16.5 19 23 114 96 48 112 80 100 8 8 10 10 16 16 20 20 25 25 30 35 16 16 20 20 25 30 38 38 44 44 56 62 37.5 44 44 49 56.5 66 26 26 30 36.5 46.5 56.5 30 30 40 50 60 80 47.5

Sine Rodless Cylinder Series REA

Stop 5 Series REA Sine Rodless Cylinder Dimensions (mm) REA 25, 32, 40 1in = 25.4mm Effective thread depth J L 0 0.1 NN G 4-MM H G B 2Port size I X D NB NB T N K W N S + Stroke F NA F R ZZ + Stroke MM x J B D F G H I K L N NA NB NN Model Port size REA25 REA32 REA40 Rc(PT) 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc(PT) 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15

T-FITTING 1/4R MALE, 1/4 G FEMALE, ONE-TOUCH FITTING, D.O.T., 977, 25 lb

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

(g) 120 1 1 0 100 90 80 l|AN20002 U1 35 (1.9) .04 (17) NAN3OO-N03 % 60 (3.3) .06 t25) NANtrco+to4 90 (5.0) .08 (35) 60 NAN50(rN0,6 3A 160 (8.8) .36 (165) NAN6OO.NI O 1 27O llsl .46 e25) NAN700+i12 1]4 444 Q4l 1 .87 (4901 Supply pressure: 7l PSI Distance from silencer: NAN200-500-) 31t NAN6O0-7OO+ 6.5fi MN800_900 ,10f1 NANSOO-N,'4 1\h 590 (33) 2.21 (580) NANgOO-N2O 2 960 (53) 3.13 (820) Construction

Compact and

RoHS In-line Type Vacuum Ejector Compact and Lightweight New female thread type 10.4 / (Current model 12.8) O.D. 3.9 g / (Current model 6.5 g) Weight 52 mm / (Current model 59 mm) Overall length 59 mm 52 mm Actual size 7mm reduction (11% shorter) 10.4 12.8 ZU05mA New New ZU05m Current model Variations Model Nozzle size [mm] Vacuum pressure reached 1[kPa] Maximum suction flow rate [L/min(ANR

10-my1m-e

9 @0 @1 @2 #9 Side scraper MYM50-15CK0502B MYM63-15CK0503B 2 Scraper 2 Piston seal 2 MY1M16-PS MY1M25-PS MY1M50-PS MY1M20-PS MY1M40-PS MY1M32-PS MY1M63-PS Cushion seal MY1M50-PS MY1M63-PS MY1M16-PS MY1M20-PS MY1M25-PS MY1M32-PS MY1M40-PS 2 Tube gasket 2 O-ring 4 Seal kit includes !9, @0, @1, @2 and #9. Order the seal kit based on each bore size. Seal kit includes a grease pack (10 g).

06-cxwl-e

Grease pack part no.: GR-S-010 (10 g) 144

07-cvs1k-e

Contents Bore size (mm) CVS1K40-PS CVS1K50-PS CVS1K63-PS 40 50 63 CVS1K40-PS CVS1K50-PS CVS1K63-PS @7 @8 29 #0 #1 32 #3 34 Piston seal Set of left nos. @7, @8, #0, #1, #3, #6 Rod seal Cushion seal Seal kit includes @7, @8, #0, #1, #3, #6. Order the seal kit, based on each bore size. Seal kit includes a grease pack (40, 50: 10 g, 63 or more: 20 g).

10-my2c-e

5 are shipped as single units, a grease pack (10 g per 1000 strokes) is included. Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 103