CQS

13 14 5 5.5 9.5 11.5 19.5 21.5 25 27 Bore size (mm) Double acting: double rod 3.5[6] 3[5.5] 8[10.5] 10[12.5] 1.5 2 6 7 5.5 5 10 12 1.5 2 6 7 5.5 5 10 12 12 16 20 25 17 19 22.5 24.5 5.5 6 10 11 9.5 9 14 16 0.5 1 4 6 5.5 6 10 11 9.5 9 14 16 19.5 21.5 25 27 Bore size (mm) CU CQS Auto switch model No.

JIS Standard Hydraulic Cylinder

4 #1 @6 @1 u @0 #0 o w !5 !8 !9 !6 !7 @9 !2 @2 @4 t e !0 CH2G Series !3 @3 r @5 !

Microspeed Cylinder

10, 15, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed

energy saving effect

L Required facility water system 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s Model Heat radiation [kW] Facility water specifications HRSH100-Wl-l Approx. 20 Refer to "Facility water system" in the specifications on pages 167 and 169. 0.05 s HRSH150-Wl-l Approx. 27 HRSH200-Wl-l Approx. 34 HRSH250-Wl-l Approx. 40 0.02 s 0.01 s 100 135 200 300

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

1500 2000 2500 3000 5000 6 10 15 20 25 30 50 For AC voltage valves there is no "S" option.

RSQ

6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

Sine Cylinder Series REC

across flats B1 I Eh8 NA D TY MM 1.5 NA Effective thread length FL AL TZ TX Width across flats KA K A TT N N F 20, 25, 40 S + Stroke H Z + Stroke ZZ + Stroke NA TX (mm) NANote) A AL F FL G H H1 I K KA D B1 MM E Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 32 M8 x 1.25 5 33.5 5 6 18 15.5 13 10.5 10 41 8 13 20 25 M10 x 1.25 6 37.5 5.5 8 22 19.5 13 10.5 10 45 10 17 26 32 M10 x 1.25 6 46.5

Sine Cylinder Series REC

across flats B1 I Eh8 NA D TY MM 1.5 NA Effective thread length FL AL TZ TX Width across flats KA K A TT N N F 20, 25, 40 S + Stroke H Z + Stroke ZZ + Stroke NA TX (mm) NANote) A AL F FL G H H1 I K KA D B1 MM E Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 32 M8 x 1.25 5 33.5 5 6 18 15.5 13 10.5 10 41 8 13 20 25 M10 x 1.25 6 37.5 5.5 8 22 19.5 13 10.5 10 45 10 17 26 32 M10 x 1.25 6 46.5

MXS Series Air Slide Table

Buffer Specifications Model MXS6 MXS8 MXS12 MXS16 MXS20 MXS25 6 8 12 16 20 25 Bore size (mm) Horizontal mounting 2-20 in/s (50~500 mm/s) 2-12 in/s (50~300 mm/s) Piston speed Buffer stroke (mm) 5 10 At 0mm stroke At max. stroke 0.67 1.12 2.25 2.92 3.82 4.72 Buffer stroke load (lbf) 1.35 1.80 2.92 3.82 5.62 6.52 Note) Refer to P. 14 for cautions on buffer.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

B 97 98 GC 17 20 Y X 11 11 LC 21.5 23 LB 9 9 6 6 LH 5.5 5.5 LT 14 14 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 S 9.5 9.5 Z 54 55 Bore size 72 73 With air cushion Air cushion type is not available for 21-/22-CJ2.

Thermo-chiller

(Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v Reference item 5 s 2 s 1 s Min. 0.5 s 0.2 s 0.1 s *1 In the case of [Mcm], it will be 0.003 to 0.01.

Thermo-chiller

Current (% for chiller main breaker volume) HRS100-A/W-20 4 h 2 h 1 h 4 min 6 min 10 min 14 min 20 min 30 min 2 min 1 min Operating time 20 s 30 s 10 s Max. 5 s 2 s 1 s Min. 0.5 s 0.2 s 0.1 s 0.05 s 0.02 s 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 5000 6000 7000 10 1500 Current (% for chiller main breaker volume) 28 Series HRS100/150 Specic Product Precautions 5 Be sure to

MY1

DWX D 11.4 d 6 Y 9 S 4 Applicable O-ring C9 Bore size (mm) 25 32 40 38 -X 11.4 13.4 6 8 48 54 11 14 6 9 C9 C11.2 Technical Data 1355 MY1W Series Dimensions: 50, 63 4 x MM depth M (LL) L 4 x B counterbore depth C LD through-hole bottom side J depth K PA YW QW LW PB Q+ Stroke PG This port is not available for use.

CRQ2

6 i q w r @5 y !5 !

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

valve S is removed from the valve S assembly and opens until the adjusted opening setting. 8 6 XMD/XYD-25 [3] Opening of the main exhaust valve (valve M) When pressure is applied to the pilot port M, the valve M is removed from the body seat surface and fully opens. 4 2 0 [4] Closing of the initial exhaust valve, the main exhaust valve By removing the pressure from the pilot ports S and

Series AK1000

Code psig/bar unit MPa unit No code 0 V3 1 2 10 40 No gauge port e e 4PL 5PC No pressure gauge (Connections: 1/4 inch NPT) Sample Order Number Port -30 in.Hg to 30 psig -30 in.Hg to 100 psig 0 to 200 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.7 MPa 0 to 1.5 MPa 0 to 7 MPa 0 to 28 MPa AK1410TS e q 6 6 6 6 w 6 6 6 6 r t qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet

CXWM/CXWL

6 !7 !8 !

Support Guide/11-LEFG Series

307 478 11-LEFG40-S-350 554 357 528 8 3 450 11-LEFG40-S-400 604 407 578 11-LEFG40-S-450 654 457 628 11-LEFG40-S-500 704 507 678 10 4 600 11-LEFG40-S-550 754 557 728 11-LEFG40-S-600 804 607 778 Model L A B n D E 11-LEFG40-S-650 854 657 828 12 5 750 11-LEFG40-S-700 904 707 878 11-LEFG40-S-750 954 757 928 11-LEFG40-S-800 1004 807 978 14 6 900 11-LEFG40-S-850 1054 857 1028 11-LEFG40-S-900 1104

TABLE OF CONTENTS

Body Brass Body S. S.

MQQ

Dimensions Foot type/MQMLL 6 25 14 33 42 18.5 6 9 2.3 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke 10, 16, 20, 25 LY LH X X Y Y 4-LC S + Stroke LS + Stroke ZZ + Stroke LX LZ Z LT (mm) Bore size (mm) LS LC LT LH LX LY S Z LZ ZZ Y X 5.5 83 2.3 14 33 25 65 19 42 108 9 6 10 5.5 92 2.3 18 42 30 74 21 54 119 9 6 16 6.8 137.5 3.2 25 40 40 97.5 20.5 55 166 20 8 20 6.8 142.5 3.2 28 40 47 102.5 24.5