Piping: Base Mounted, Stations & Port Location: 10 Stations (Type 20, 21, 41, 42), Port Size: NPTF1/8

Piping: Base Mounted, Stations & Port Location: 3 Stations Type 20, 21, 41 and 42, Port Size: NPTF1/8

Piping: Base Mounted, Stations & Port Location: 5 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 5/16" Tube

Piping: Body Ported, Stations & Port Location: 6 Stations Type 20, 21, 41 and 42, Port Size: NPTF

Piping: Base Mounted, Stations & Port Location: 6 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 1/4" Tube

Piping: Base Mounted, Stations & Port Location: 7 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 5/16" Tube

Piping: Base Mounted, Stations & Port Location: 9 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 5/16" Tube

Piping: Base Mounted, Stations & Port Location: 9 Stations Type 20, 21, 41 and 42, Port Size: NPTF1/8

Piping: Body Ported, Stations & Port Location: 6 Stations Type 20, 21, 41 and 42, Port Size: NPTF

Piping: Body Ported, Stations & Port Location: 5 Stations Type 20, 21, 41 and 42, Port Size: NPTF

Piping: Base Mounted, Stations & Port Location: 7 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 1/4" Tube

Piping: Base Mounted, Stations & Port Location: 12 Stations (Type 20, 21, 41, 42), Port Size: One-touch Fitting for 1/4" Tube

Piping: Body Ported, Stations & Port Location: 3 Stations Type 20, 21, 41 and 42, Port Size: NPTF

Piping: Base Mounted, Stations & Port Location: 8 Stations Type 20, 21, 41 and 42, Port Size: NPTF1/8

240

Positioning repeatability: 0.05 mm Possible to set position, speed and force. (64 points) LEF LEJ LEL LEM Rod Type LEPY Series Page 374 Size: 6, 10 LEPY6-25 240 g Weight LEY LES LEPY LEPS LEPY LEPS LER LEH LEY -X5 30 mm 11LEFS 125.6 mm 11LEJS 20.5 mm 25ASlide Table Type LEPS Series Page 383 Size: 6, 10 LEC LEPS6-25 290 g Weight LEC S LEC SS-T LEC Y Linear guide integrated Motorless LAT 41

LMU100/200 Series Mist Spray Unit

T0604 (6 tube) applicable T0425 (4 tube) applicable T0806 (8 tube) applicable AIR OIL AIR BLOW Port size LMV110 How to Order LMV 0 1 1 20 Nozzle tubing length: L Air blow circuit Nozzle tubing construction 20 25 30 35 200 mm 250 mm 300 mm 350 mm LMV220 1 2 Flexible tubing Copper tubing Mixing valve 1 2 Available Not available Construction Dimensions LMV10/With air blow circuit LMV10L 45 41

08-ca2wh-e

.: GR-S-010 (10 g), GR-S-020 (20 g) 41

Precision Regulator

rInterface tInterface with bracket 225 173 130 97 129 169 30 eAFM20-A 41 wAF20-A eAFM30-A qIR100--X170 wAF30-A eAFM40-A 50 qIR20--X170 qIR30--X170 wAF40-A 820 Made to Order IR1000/2000/3000 Series With Digital Pressure Switch 7 Manifold Specifications (Except IR2120 and IR3000 series) 8 With digital pressure switch (model no: ISE30A-01--ML).

ITVH

M5 x 0.8 hole Built-in regulator EXH Built-in regulator EXH IRV Solenoid valve EXH 1/4 (Rc, NPT) Port 3 (Exhaust port) VEX 38.5 24 72 41 24 Port 3 (Exhaust port) 58 39 SRH Port 2 (Output port) Port 1 (Supply port) SRP 1/4, 3/8 (Rc, NPT) Port 1 (Supply port) SRF 1/4, 3/8 (Rc, NPT) Port 2 (Output port) ITV 36 IC 36 4 x M5 x 0.8 depth 11 Bracket mounting hole ITVH ITVH Do not block three EXH

48

Bore size Standard stroke A C D FA FB G GA GB GC GD H J JC K L MM ML NN Nil TN TF 20 (16 x 2) 20, 30, 50 100, 150 38 27.5 8 7.5 3 22 12.5 7.5 11 83 11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41