MHF2

1 !2 !8 !4 @0 @1 o r t !5 y !9 e !7 MHF2-8D2 i !6 Parts list Parts list Note No. Description No.

PA3000/5000/PAX1000

1/4 5 Process Pump Air Operated Type (External Switching Type) Series PA3000/5000 How to Order 1 1 PA 3 03 3 PA3000 Body size Connection port size 03 04 06 3 5 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 3/8 standard 1/2 standard Liquid contact body material Thread type 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Nil T F N Rc NPTF G NPT Diaphragm material 1 PTFE T, F, N are order

EXxx-OMV0017-D

/ 2 / 5 / 10 / 30 / 60 s 1 s Unit address order Mode 1 / Mode 2 Mode 1 -22No.EX##-OMV0017-D 3.4 Base setting Make the Base unit settings.

CLQ

1 Aluminum alloy Nickel plated Piston Chromium molybdenum steel Chromated @5 9-10-12 12 Series CLQ Compact Cylinder with Lock Double Acting, Single Rod Construction: 40 to 100 !5 @1 q @9 @7 @4 e #2 #0 i @2!9wy!6@3 !2!1 u @5r @6 @6 !5 A B CL A CL1 MLGC B Extension locking Without magnet !

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

+20 +15.5 50 +40 +25 +60.5 13-11-109 14 Series ZPT ZPT F 10-0-A14 (With buffer/One-touch fitting) 20 25 32 J K ZPT F 10-0-A14 (With buffer/One-touch fitting) 40 50 J K Applicable tubing O.D.Q Applicable tubing O.D.Q Hexagon width across flats P Rc 1/8 Hexagon width across flats P Rc 1/8 M14 x 1 M14 x 1 Hexagon width across flats 19 Hexagon width across flats 19 5 5 I I 5 D C K K 5 D C J J

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

/code: 1-051 is generated.

IDX-OM-W020

. 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 5 . 5-1 IDFB Series 1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-5 6-5 . 6-7 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 R 9-1 . 9-1 9-2 . 9-1 9-3 . 9-1 10 S 10-1 . 10-1 10-2 . 10-1 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-3 12 V 12-1 . 12

CEx-OMI0064

CE*OMI0064-C CEU5 1 . 1 2 . 4 2-1 . 4 2-2 . 4 3 . 5 4 . 7 5 . 9 6 . 10 6-1 . 10 6-2 . 10 6-3 . 11 6-4 . 11 6-5 RS-232C . 11 6-6 . 12 7 . 13 7-1 . 13 7-1-1 . 13 7-1-2 . 13 7-1-3 . 14 7-1-4 . 15 7-2 . 16 7-3 . 20 7-3-1 . 20 7-3-2 . 20 7-3-3 . 20 7-3-4 No. . 20 7-3-5 . 21 7-3-6 . 22 7-3-7 . 23 7-4 (E2ROM) . 25 8 RS-232C . 26 8-1 . 26 8-2 . 26 9 BCD .

3 Port Solenoid Valve Series VQ100

characteristics 0.011 Cv 0.009 0.036 0.045 C[dm3/(sbar)] 0.044 0.14 (6) 2 3 (2 1) 0.28 b 0.3 0.25 0.012 Cv 0.011 0.036 Response time (2) 5 ms or less 15 ms or less 5 ms or less 5 ms or less 1 W (42 mA) 24 VDC 1 W (42 mA) 0.7 W (29 mA) (3) 1 W (83 mA) 12 VDC 1 W (83 mA) 0.7 W (58 mA) (3) Power consumption (Current) 0.6 VA (6 mA) 100 VAC 0.5 VA (5 mA) 0.65 VA (5.9 mA) 110 VAC 0.55 VA (

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

M14 x 1 Width across flats 19 I 5 Width across flats 19 5 I 5 J 5 J Width across flats 12 Width across flats 12 Applicable tube O.D.

Compact Type Dual-Rod Cylinder Series CXSJ

5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

IDX-OM-W016

/ Installation 2 1 Transportation . 2 1 2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring . 2 4 2 3 Cautions for Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

IDX-OM-P023E

3 . 6 Signal output . 3 2 Chapter 4 Checks and inspection 4 . 1 Daily check . 4 1 4 . 2 Parts requiring regular maintenance . 4 1 4. 2. 1 Maintenance of the water-cooled condenser . 4 1 4. 2. 2 Caution for handling the Motor type auto drain . 4 6 Chapter 5 Troubleshooting 5 . 1 Troubleshooting . 5 1 5 . 2 Reset of protective equipment . 5 3 Chapter 6 References 6 . 1 Specification table

Digital Pressure Switch

(Example: When the value can be displayed down to 0.001 MPa for the product for 0 to 1 Mpa, the resolution is 1/1000) Display resolving power Displayed pressure value can be adjusted within the range of 5%R.D. (5% of displayed value).

AC Servo Motor Driver (Pulse input type/Positioning type)

/Program No. selection 2 DI1 CN1-23 DI2 DI1 DI0 Program method DI-1 0 0 0 Program No. 1 0 0 1 Program No. 2 0 1 0 Program No. 3 0 1 1 Program No. 4 1 0 0 Program No. 5 Point table No.

Digital Pressure Switch

Repeatability 1%F.S. 1 digit Hysteresis Hysteresis mode 0 to variable 1 Window comparator mode Output Voltage (rated pressure range) Voltage output 1 to 5 V 2.5%F.S. 2 Linearity 1.5%F.S. 1%F.S.

IDX-OM-Z004

-) 0 4.2 IDF100150F-W 4 9 IDX-OM-Z004 5 5 5.1 3 ON OFF (R) OFFON 3 2 R T 5.2 1 5.2 5.2 5.2 10% 5.2 IDF100150F-W 5.1 5 1 IDX-OM-Z004 5 1 10% 3 () 1 2 IN OUT INOUT () 424 IDF100150F-W 5.1 5 2 IDX-OM-Z004 5 5.2 1-3 51 3.6 OFF () ON OFF ON IDF100150F-W 5.2 5 3 IDX-OM-Z004 5 5.3 R () OFF OFF OFF ON ON IDF100150F-W 5.3 R 5 4 IDX-OM-Z004 6 6.1 IDF100F-30-W IDF125F

Precautions 1

2.5 1.5 1 0 6.5 5.5 7 10.5 9.5 6 4 3 6 5 2.5 1.5 1 0 6.5 5.5 7 11.5 10.5 7 5 4 7 6 3.5 2.5 2 1 7.5 6.5 8 17.5 15.5 12 10 9 12 11 8.5 7.5 7 6 13.5 11.5 13 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

VM

P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Dual pressure is available only on external pilot. 5-6-3 Mechanical Valves Series VM Precautions Be sure to read before handling.