10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

Lateral vacuum inlet with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 10-25, VACUUM SERIES, ZP VACUUM PAD, UM, ZP PAD SIZE 10-25, 0.02449 lb

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 10-25, VACUUM SERIES, ZP VACUUM PAD, UM, ZP PAD SIZE 10-25, 0.14698 lb

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 10-25, VACUUM SERIES, ZP VACUUM PAD, UM, ZP PAD SIZE 10-25, 1.17249 lb

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber, ZP PAD SIZE 10-25, VACUUM SERIES, ZP VACUUM PAD, UL, ZP PAD SIZE 10-25, 0.05511 lb

Vertical vacuum entry with adapter, Pad diameter: 1.5, 2, 3.5, 4, 6, 8, 10, 13, 16, Pad type: flat, flat with groove, bellows, Pad material: NBR, FKM, silicone rubber, urethane rubber, conductive NBR, conductive silicone rubber ZP VACUUM PAD. ZP PAD SIZE 10-25. VACUUM SERIES. ZP PAD SIZE 10-25. 0.05511 lb. UL.

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 02 (1/4), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: J (Drain Guide 1/8: Size 20; Drain Guide 1/4: Sizes 25, 30, 40), Semi-Standard 2: Standard

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 02 (1/4), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: J (Drain Guide 1/8: Size 20; Drain Guide 1/4: Sizes 25, 30, 40), Semi-Standard 2: R (Flow Direction: Right to Left)

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 03 (3/8), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: J (Drain Guide 1/8: Size 20; Drain Guide 1/4: Sizes 25, 30, 40), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 04 (1/2), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: J (Drain Guide 1/8: Size 20; Drain Guide 1/4: Sizes 25, 30, 40), Semi-Standard 2: Standard

Body Size: 10, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: M5, Option: G (For Sizes 20, 25, 30, 40: Round Pressure Gauge w/Limit Indicator; For Size 10 Round Pressure Gauge w/o Limit Indicator), Semi-Standard: 1 (0.02 to 0.2MPa Setting)

Body Size: 10, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: M5, Option: G (For Sizes 20, 25, 30, 40: Round Pressure Gauge w/Limit Indicator; For Size 10 Round Pressure Gauge w/o Limit Indicator), Semi-Standard: 1N (1 + N)

Body Size: 10, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: M5, Option: G (For Sizes 20, 25, 30, 40: Round Pressure Gauge w/Limit Indicator; For Size 10 Round Pressure Gauge w/o Limit Indicator), Semi-Standard: 1R (1 + R)

Body Size: 10, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: M5, Option: G (For Sizes 20, 25, 30, 40: Round Pressure Gauge w/Limit Indicator; For Size 10 Round Pressure Gauge w/o Limit Indicator), Semi-Standard: Standard

Body Size: 10, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: M5, Option: G (For Sizes 20, 25, 30, 40: Round Pressure Gauge w/Limit Indicator; For Size 10 Round Pressure Gauge w/o Limit Indicator), Semi-Standard: N (Non-Relieving Exhaust Mechanism)

Body Size: 10, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: M5, Option: G (For Sizes 20, 25, 30, 40: Round Pressure Gauge w/Limit Indicator; For Size 10 Round Pressure Gauge w/o Limit Indicator), Semi-Standard: R (Flow Direction: Right to Left)

Body Size: 10, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: M5, Option: G (For Sizes 20, 25, 30, 40: Round Pressure Gauge w/Limit Indicator; For Size 10 Round Pressure Gauge w/o Limit Indicator), Semi-Standard: Y (Knob, Upward)

Body Size: 10, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: M5, Option: G (For Sizes 20, 25, 30, 40: Round Pressure Gauge w/Limit Indicator; For Size 10 Round Pressure Gauge w/o Limit Indicator), Semi-Standard: 1NZ (1 + N + Z)

Body Size: 10, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: M5, Option: G (For Sizes 20, 25, 30, 40: Round Pressure Gauge w/Limit Indicator; For Size 10 Round Pressure Gauge w/o Limit Indicator), Semi-Standard: 1Z (1 + Z)