Model: 23, Orifice Size: 5 (8mm), Configuration: 0 (N.C./Single Unit), Solenoid Valve Option: A (Brass Body, FKM Seal, Class B), Suffix: Standard, Port Size: 03 (3/8), Thread Type: N (NPT), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Full-wave Rectifier: None

Size: 60, Voltage: 23 (Single-phase 230 VAC, 60 HZ), Thread Type: N (NPT), Options: TV (T + V)

Series VX21/22/23, is a direct operated 2 port solenoid valve for air, gas, vacuum, water, steam and oil. Proper selection of body and sealing materials permits application of a wide variety of fluids. Application can be matched by simply choosing body materials (brass, stainless steel), seal materials (NBR, EPR, FPM, PTFE) and the solenoid coil (class B, class H).

Series VX21/22/23, is a direct operated 2 port solenoid valve for air, gas, vacuum, water, steam and oil. Proper selection of body and sealing materials permits application of a wide variety of fluids. Application can be matched by simply choosing body materials (brass, stainless steel), seal materials (NBR, EPR, FPM, PTFE) and the solenoid coil (class B, class H).

Series VX21/22/23, is a direct operated 2 port solenoid valve for air, gas, vacuum, water, steam and oil. Proper selection of body and sealing materials permits application of a wide variety of fluids. Application can be matched by simply choosing body materials (brass, stainless steel), seal materials (NBR, EPR, FPM, PTFE) and the solenoid coil (class B, class H).

Series VX21/22/23, is a direct operated 2 port solenoid valve for air, gas, vacuum, water, steam and oil. Proper selection of body and sealing materials permits application of a wide variety of fluids. Application can be matched by simply choosing body materials (brass, stainless steel), seal materials (NBR, EPR, FPM, PTFE) and the solenoid coil (class B, class H).

Series VX21/22/23, is a direct operated 2 port solenoid valve for air, gas, vacuum, water, steam and oil. Proper selection of body and sealing materials permits application of a wide variety of fluids. Application can be matched by simply choosing body materials (brass, stainless steel), seal materials (NBR, EPR, FPM, PTFE) and the solenoid coil (class B, class H).

SI Unit Specification: PROFINET, SI Unit Common, End Plate: Negative Common, 7/8" Connector, I/O Unit Stations: None, Valve Stations: 23 Stations, P,E Port, SUP/EXH Assembly: Port Location Both Sides, External Pilot, P, E Port Size: ø5/16" One-touch Fitting

Series VX21/22/23, is a direct operated 2 port solenoid valve for air, gas, vacuum, water, steam and oil. Proper selection of body and sealing materials permits application of a wide variety of fluids. Application can be matched by simply choosing body materials (brass, stainless steel), seal materials (NBR, EPR, FPM, PTFE) and the solenoid coil (class B, class H).

Booster Relay Series IL100

Contents IL100 KT-IL100 Set of left nos. t, y, u, i, o 2 Cover Aluminum alloy Silver baking finish 3 Throttle valve Stainless steel 4 Inner valve Stainless steel 5 Diaphragm assembly Aluminum alloy/NBR/Resin Chromated 6 Diaphragm NBR 7 Valve spring Stainless steel 8 O-ring NBR 9 O-ring NBR 54 Series IL100 Dimensions IL100 76 2 x 9 50 57 2 Rc1/4 IN 70 103.5 EXH EXH 80 SUP OUT 23 2 x Rc1/4,

Cylinder Positioner IP200 Series

Description Note IP200-02 Pilot valve unit Applicable bore size 50 or more 39020-23 Seal kit Ambient temperature: Standard (5 to 60) Applicable stroke 25 to 300 mm or less Sensitivity Note 2) Within 0.5% F.S. Linearity Note 2) Within 2% F.S. Hysteresis Note 2) Within 1% F.S. Repeatability Note 2) Within 1% F.S.

Precision Regulator

P36203009#1 P36203009#1 17 Valve Brass, NBR 1 1 P36203010#1 P36203010#1 18 Damper NBR, other P36201021 1 1 1 P36202026 P36202026 19 O-ring H-NBR 2.5 x 1.05 3 2 2 1.42 x 1.52 1.42 x 1.52 20 O-ring NBR 3 1 3 1 4.5 x 1 4.5 x 1 4.5 x 1 4.5 x 1 21 O-ring NBR 10 x 1.3 1 1 1 1 1 JISB2401P11 JISB2401P11 27.8 x 1.5 27.8 x 1.5 22 O-ring NBR JISB2401P5 Note 2) JISB2401P5 Note 2) 1 1 23

ITVH

ITVX G thread With flat bracket G1/4 G3/8 PVQ G1/4 20 depth, depth of counterbore 1.5 Port 1 (Supply port), Port 2 (Output port) 23 depth, depth of counterbore 2 Port 1 (Supply port), Port 2 (Output port) 20 depth, depth of counterbore 1.5 Port 3 (Exhaust port) 100 84 4 x 7 VY1 VBA VBAT 39 AP100 52 40 24 24 Flat bracket With L-bracket 1/4 (Rc, NPT) Port 3 (Exhaust port) 1/4, 3/8 (Rc, NPT)

Fieldbus System

End Plate Model EX245-EA2-1 EX245-EA2-2 Bracket Yes No Weight 200 g 150 g EX245-EA24 EX245 Series Dimensions SI Unit End Plate EX245-SPN1 EX245-EA2-1 120 6.5 14 22.1 28.6 6.6 5.6 98.8 148.5 133.5 61.5 1.6 6 85 10 EX245-EA2-2 37 18 120 14 61.5 44 50 130 23 35 Digital Input Module Digital Output Module EX245-DY1 EX245-DX1 22 22 27 13.5 61 120 120 81 27 54 54 61 5 Fieldbus System: For Input/

Fluoropolymer Tubing Variations

Air, Water Note 1), Inert gas Fluoropolymer fitting LQ series Flexibility: Improved by approx. 20% * SMC comparison (Fluoropolymer tubing, TL/TIL series) Applicable fittings Note 2) 20C 100C 200C 260C 1.4 0.7 0.35 0.2 15 9 1.6 0.9 0.45 0.23 25 15 260C Modified PTFE (Polytetrafluoroethylene resin) 1.4 0.7 0.35 0.2 20 10 1.4 0.7 0.35 0.2 40 23 0.9 0.5 0.25 0.15 75 42 Compatible with the Food

Slider Type Ball Screw Drive/11-LEFS Series

Page 576 Page 590 515 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Specifications Step Motor (Servo/24 VDC) Model 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 Stroke [mm] Note 1) 50 to 500 50 to 600 50 to 800 150 to 1000 LECP6/LECP1/LECPMJ 14 15 25 30 45 50 55 65 Horizontal Note 2) Work load [kg] LECPA 9 10 20 20 40 45 50 60 Vertical 2 4 7.5 15 10 20 2 23

Environment

SpeedWork Load Graph (Guide) For Step Motor (Servo/24 VDC) LECP6, LECP1, LECPMJ Horizontal Vertical LEY16m LEY16m for acceleration/deceleration: 2000 mm/s2 10 40 Lead 2.5: LEY16C 35 Horizontal work load [kg] Lead 2.5: LEY16C 8 Vertical work load [kg] 30 15 17 20 23 25 Lead 5: LEY16B 5 Lead 5: LEY16B 4 Lead 10: LEY16A 10 6 2 Lead 10: LEY16A 5 0 0 0 300 200 400 100 500 600 0 300 200 400 100

Series AK1000

Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Ar CClF3 Argon Halocarbon 13 C2Cl2F4 CF4 Halocarbon 114 Halocarbon 14 C2ClF5 CH2F2 Halocarbon 115 Halocarbon 32 C2F6 CH4 Halocarbon 116 Methane C2H2 CHF3 Acetylene Halocarbon 23 C2H2F4 CO2 Halocarbon 134A Carbon Dioxide C2HF5 H2 Halocarbon 125 Hydrogen C3F8 He Halocarbon R218 Helium C3H6 Kr Propene Krypton C3H8 N2

Series AP500

Vespel is a registered trademark of DuPont. 23

Quick Exhaust Valve Series AQ

Description AQ2000 AQ3000 AQ5000 AQ1500 AQ1510 Valve 30093 NBR 30073 30053 30063 30083 r O-ring 9 x 7 x 1 JIS B 2401P-7 NBR CA40-1601 CA50-1602 30066 t Dimensions AQ1500/1510 AQ2000/3000/5000 3-port size (Mounting hole) 3-port size L1 L2 L3 L4 L5 L6 L7 L8 L9 D L1 L2 L3 L4 Model Port size AQ2000 Model Port size 1 8 1 4 M5 x 0.8 AQ1500 23 20 14 3 12.5 12 15 5.5 6.5 3.1 45 40 10 45 , 3 8 1 4